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1.中山大学 电子与信息工程学院, 广东 广州 510275
2.广东工业大学 物理与光电工程学院, 广东 广州 510006
[ "陈 毅 聪 (1988-),男,广 东 佛 山 人,博士,副 教 授,2016 年 于 中 山 大 学 获 得博士学位,主要从事真空微纳电子学研究。E-mail: chenyic@gdut. edu. cn" ]
[ "陈军(1969-),男,浙江舟山人,博士,教授,2004年于中山大学获得博士学位,主要从事冷阴极电子源及其真空微电子器件应用研究。" ]
收稿:2025-02-25,
修回:2025-03-17,
纸质出版:2025-06-25
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陈毅聪,陈军.氧化锌纳米冷阴极及其X射线源应用[J].发光学报,2025,46(06):981-994.
CHEN Yicong,CHEN Jun.ZnO Nanowire Cold Cathode and Its Application in X-ray Sources[J].Chinese Journal of Luminescence,2025,46(06):981-994.
陈毅聪,陈军.氧化锌纳米冷阴极及其X射线源应用[J].发光学报,2025,46(06):981-994. DOI: 10.37188/CJL.20240306. CSTR: 32170.14.CJL.20240306.
CHEN Yicong,CHEN Jun.ZnO Nanowire Cold Cathode and Its Application in X-ray Sources[J].Chinese Journal of Luminescence,2025,46(06):981-994. DOI: 10.37188/CJL.20240306. CSTR: 32170.14.CJL.20240306.
氧化锌纳米冷阴极兼具优良的场发射特性、稳定的化学性质和易于低成本大面积制备等特点,在大面积冷阴极电子源器件上有重要应用。经过多年的研究,关于氧化锌纳米冷阴极的场发射机制、性能调控、电子源器件应用等工作都相继被报道。要进一步推进氧化锌纳米冷阴极的实际应用,有必要对其发展现状及挑战进行总结。本文将以大面积冷阴极电子源器件的性能需求为出发点,从场发射特性调控、栅极结构设计与制备以及X射线源器件应用探索三个方面总结氧化锌纳米冷阴极研究进展,最后展望了未来研究趋势及挑战。
Due to its excellent field emission properties, stable chemical properties, and ease of low-cost large-area preparation, zinc oxide nanowire has important applications in large-area cold cathode electron source devices. Many works on the field emission mechanism, performance modulation, and electron source device applications of ZnO nanowire cold cathodes have been reported in the past decades. To further advance the practical applications of ZnO nanowire cold cathodes, it is necessary to summarize the current status and challenges of their development. In this paper, we review the progress of ZnO nanowire cold cathode in aspects of field emission property, gate structure design and fabrication, and the X-ray source application, from the point of view of the performance requirements of large-area cold cathode electron source. Finally, a perspective on future research trends and challenges is given.
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