SOI多环级联光学谐振腔滤波器

王晓倩; 马可贞; 赵宇; 冯薪霖; 薛晨阳; 张文栋; 闫树斌

doi:10.3788/fgxb20133405.0645

您当前的位置：

首页 >

文章列表页 >

SOI多环级联光学谐振腔滤波器

发光学应用及交叉前沿 | 更新时间：2020-08-12

- SOI多环级联光学谐振腔滤波器
- SOI Multi-ring Cascade Optic Resonator Filters
- 发光学报 2013年34卷第5期页码：645-649
- 作者机构：
  
  1. 中北大学仪器科学与动态测试教育部重点实验室电子测试技术国家重点实验室,山西太原,030051
  2. 山西大学物理电子工程学院,山西太原,030006
- 作者简介：
- 基金信息：
  
  国家自然科学基金(91123036,61178058,61275166)();山西省自然科学基金(2010011003-2)();山西省教育厅优秀青年学术带头人资助项目
- DOI：10.3788/fgxb20133405.0645
  中图分类号： O436
- 收稿日期：2013-01-23，
  
  修回日期：2013-03-16，
  
  网络出版日期：2013-03-22，
  
  纸质出版日期：2013-05-10
- 稿件说明：
移动端阅览
王晓倩, 马可贞, 赵宇, 冯薪霖, 薛晨阳, 张文栋, 闫树斌. SOI多环级联光学谐振腔滤波器[J]. 发光学报, 2013,34(5): 645-649

WANG Xiao-qian, MA Ke-zhen, ZHAO Yu, FENG Xin-lin, XUE Chen-yang, ZHANG Wen-dong, YAN Shu-bin. SOI Multi-ring Cascade Optic Resonator Filters[J]. Chinese Journal of Luminescence, 2013,34(5): 645-649
王晓倩, 马可贞, 赵宇, 冯薪霖, 薛晨阳, 张文栋, 闫树斌. SOI多环级联光学谐振腔滤波器[J]. 发光学报, 2013,34(5): 645-649 DOI： 10.3788/fgxb20133405.0645.

WANG Xiao-qian, MA Ke-zhen, ZHAO Yu, FENG Xin-lin, XUE Chen-yang, ZHANG Wen-dong, YAN Shu-bin. SOI Multi-ring Cascade Optic Resonator Filters[J]. Chinese Journal of Luminescence, 2013,34(5): 645-649 DOI： 10.3788/fgxb20133405.0645.

摘要

利用MEMS工艺制备了基于SOI的小尺寸、高集成光波导多环级联谐振腔滤波器

理论分析了多环级联微环腔的光场传输特性与光谱响应特性

实验验证并得到了不同级联环数与谐振谱线滚降垂直度的关系。研究表明:当波导宽度为450 nm、半径为5 m时

单环、双环和十环滤波器响应谱线的-3 dB带宽分别为0.313

0.279

0.239 nm

相应结果与理论吻合

即随着级联环数的增多

谐振谱线顶端趋于平坦

滚降垂直度增高。设计制备了环形与跑道形两种级联谐振腔滤波器

研究了相应的透射谱特性。

Abstract

Based on Silicon on insulator(SOI) material and mature Micro-electro-mechanical systems (MEMS) technology

an optical waveguide cascaded resonator filter with high integration and small size was processed. The light field transmission characteristics and spectral response characteristics of multi-ring cascaded cavity were theoretically analyzed. Moreover

the relationship between different number of cascaded micro-ring and resonance spectrum roll-off verticality was also proved in experiment. When the waveguide width is 450 nm and radius is 5 m

the experimental results show that -3 dB response bandwidth of the 1st order

2nd order and 10th order filters spectral are 0.313

0.279 and 0.239 nm

which are consistent with the theoretical results. That means more cascaded rings result in flatter top resonance and higher roll-off vertical degree. Micro-ring and racetrack-shaped cascaded resonator filters were fabricated and the properties of transmission spectrum was also tested.

关键词

Keywords

references

Dong P, Feng N N, Feng D Z, et al. GHz-bandwidth optical filters based on high-order silicon ring resonators [J]. Opt. Exp., 2010, 18(23):23784-23789.[2] Irace A, Breglio G. All-silicon optical temperature sensor based on multi-mode interference [J]. Opt. Exp., 2003, 11(22):2807-2812.[3] Li S, Wu Y D, Yin X J, et al. Tunable filters based on an SOI nano-wire waveguide micro ring resonator [J]. J. Semiconductors, 2011, 32(8):084007-1-5.[4] Padmaraju K, Chan J, Chen L, et al. Thermal stabilization of a microring modulator using feedback control [J]. Opt. Exp., 2012, 20(27):27999-28008.[5] Furukawa H, Shinada S, Miyazawa T, et al. A multi-ring optical packet and circuit integrated network with optical buffering [J]. Opt. Exp., 2012, 20(27):28764-28771.[6] Maru K, Abe Y. Low-loss, flat-passband and athermal arrayed-waveguide grating multi/demultiplexer [J]. Opt. Exp., 2007, 15(26):8351-18356.[7] Xiao S J, Khan M H, Shen H, et al. Silicon-on-insulator microring add-drop filters with free spectral ranges over 30 nm [J]. J. Lightw. Technol., 2008, 26(2):228-236.[8] Xie S, Zhang B, Mao L H, et al. Finite element analysison SOI based microring resonator design [J]. Chin. J. Lumin.(发光学报), 2010, 31(4):599-604 (in Chinese).[9] Xiao S J, Khan M H, Shen H, et al. A highly compact third-order silicon microring add-drop filter with a very large free spectral range, a flat passband and a low delay dispersion [J]. Opt. Exp., 2007, 15(22):14765-14771.[10] Wang L, Yan Y Z, Zhang Y G, et al. Effect of vibration noise on the high-Q optical microcavity coupling system and it's suppression methods [J]. Chin. J. Lumin.(发光学报), 2011, 32(9):950-955 (in Chinese).[11] Little B E, Chu S T, Absil P P, et al. Very high-order microring resonator filters for WDM applications [J]. Photon. Technol. Lett., 2004, 16(10):2263-2265.[12] Hryniewicz J V, Absil P P, Little B E, et al. Higher order filter response in coupled microring resonators [J]. Photon. Technol. Lett., 2000, 12(3):320-322.[13] Ye L, Huang H, Huang Y Q, et al. Cascaded micro-ring photodetector with flat-top and steep-edge response [J]. Infrared and Laser Engineering (红外与激光工程), 2011, 40(5):905-909 (in Chinese).[14] Sumetsky M. Vertically-stacked multi-ring resonator [J]. Opt. Exp., 2005, 17(13):6354-6376.[15] Shen Y, Fan D H, Fu J W, et al. Theoretical research on optical properties of gain-assisted plasmonic coupled resonator optical waveguide [J]. Acta Phys. Sinica (物理学报), 2011, 60(11):117302-1-5 (in Chinese).[16] Shen Y, Wang G P. Gain-assisted time delay of plasmons in coupled metal ring resonator waveguides [J]. Opt. Exp., 2009, 17(15):12807-12812.

浏览量

305

下载量

CSCD

文章被引用时，请邮件提醒。

提交

工具集

关联资源

CsPbBr₃光波导中激子局域场和复合速率的增强

亚波长之字形MIM等离子波导宽带滤波器

集成光学波导光栅研究进展

模折射率透镜的研制

离子注入石英玻璃光波导的研究