LIU Bang-wu, ZHONG Si-hua, HE Jing, XIA Yang, LI Chao-bo. SiO<sub>2</sub> Film Synthesized by Liquid Phase Deposition and Its Passivation Performance[J]. Chinese Journal of Luminescence, 2012,(11): 1264-1267
LIU Bang-wu, ZHONG Si-hua, HE Jing, XIA Yang, LI Chao-bo. SiO<sub>2</sub> Film Synthesized by Liquid Phase Deposition and Its Passivation Performance[J]. Chinese Journal of Luminescence, 2012,(11): 1264-1267 DOI: 10.3788/fgxb20123311.1264.
film has been successfully synthesized by liquid phase deposition (LPD) method. The microstructure and passivation performance of the SiO
2
film have been investigated by scanning electron microscopy (SEM)
X-ray photoelectron spectroscopy (XPS) and microwave photoconductive decay (μ-PCD). The results show that the deposited SiO
2
film contains a little amount of F element and it is very smooth and dense. The reflectance and surface recombination velocity reduced to 10.88% and 2 830 cm/s
respectively.
关键词
液相沉积二氧化硅薄膜钝化
Keywords
liquid phase depositionSiO2 filmpassivation
references
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