侧向耦合分布反馈半导体激光器光栅结构及耦合特性

李瑞冬; 邹永刚; 田锟; 王睿; 范杰; 兰云萍

doi:10.37188/CJL.20210314

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侧向耦合分布反馈半导体激光器光栅结构及耦合特性

器件制备及器件物理 | 更新时间：2021-12-17

- 侧向耦合分布反馈半导体激光器光栅结构及耦合特性
  增强出版
- Grating Structure and Coupling Characteristics of Laterally-coupled Distributed Feedback Semiconductor Lasers
- 发光学报 2021年42卷第12期页码：1921-1927
- 作者机构：
  
  长春理工大学　高功率半导体激光国家重点实验室，吉林　长春　130022
- 作者简介：
  
  [ "李瑞冬(1997-)，男，吉林桦甸人，硕士研究生，2019年于长春理工大学获得学士学位，主要从事半导体激光器的研究。E-mail: 1074329267@qq.com" ]
  [ "邹永刚(1982-)，男，吉林长春人，博士，研究员，博士研究生导师，2009年于吉林大学获得博士学位，主要从事激光技术与应用、光电子器件等方面的研究。E-mail: zouyg@cust.edu.cn" ]
- 基金信息：
  
  吉林省科技发展计划(20190302052GX;20210201030GX)
- DOI：10.37188/CJL.20210314
  中图分类号： TN248.4
- 纸质出版日期：2021-12，
  
  收稿日期：2021-09-29，
  
  修回日期：2021-10-09，
- 稿件说明：
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李瑞冬, 邹永刚, 田锟, 等. 侧向耦合分布反馈半导体激光器光栅结构及耦合特性[J]. 发光学报, 2021,42(12):1921-1927.

RUI-DONG LI, YONG-GANG ZOU, KUN TIAN, et al. Grating Structure and Coupling Characteristics of Laterally-coupled Distributed Feedback Semiconductor Lasers. [J]. Chinese journal of luminescence, 2021, 42(12): 1921-1927.
李瑞冬, 邹永刚, 田锟, 等. 侧向耦合分布反馈半导体激光器光栅结构及耦合特性[J]. 发光学报, 2021,42(12):1921-1927. DOI： 10.37188/CJL.20210314.

RUI-DONG LI, YONG-GANG ZOU, KUN TIAN, et al. Grating Structure and Coupling Characteristics of Laterally-coupled Distributed Feedback Semiconductor Lasers. [J]. Chinese journal of luminescence, 2021, 42(12): 1921-1927. DOI： 10.37188/CJL.20210314.

摘要

耦合系数是评价分布反馈(DFB)半导体激光器光栅性能的重要参数。本文基于耦合波理论，结合数值模拟，研究了侧向耦合表面光栅结构参数对其耦合特性的影响。与矩形光栅侧向耦合脊波导结构对比，研究了对称梯形、错位梯形、对称结形、错位结形、双对称梯形和双对称结形六种特殊侧向微结构光栅，通过改变光栅侧壁纵向倾角、调整光栅的光学限制因子等途径，有效地实现了光栅的耦合系数调控。模拟分析了脊波导特殊侧向微结构光栅的占空比、脊宽、光栅侧向宽度等结构参数对耦合系数的影响，发现合理的结构参数能够有效地缓解耦合系数的波动，有助于减少工艺误差对耦合系数的影响。本工作为后续光栅结构设计与制备提供了理论依据。

Abstract

Coupling coefficient is an important parameter for evaluating the grating performance of distributed feedback(DFB) semiconductor lasers. In this paper

based on the coupled-wave theory and combined with numerical simulation

the effect of the structural parameters of the laterally-coupled surface grating on their coupling characteristics is investigated. In contrast to the laterally-coupled ridge-waveguide structure of rectangular gratings

six special lateral microstructure gratings

namely

symmetric trapezoid

misaligned trapezoid

symmetric junction

misaligned junction

bisymmetric trapezoid and bisymmetric junction

have been studied to effectively achieve the coupling coefficient regulation of gratings by changing the longitudinal inclination angle of the grating sidewalls and adjusting the optical confinement factor of the grating. The effects of structural parameters such as duty cycle

ridge width and lateral width of the grating on the coupling coefficient of the special lateral microstructure grating of ridge-waveguide were simulated and analyzed

and it was found that reasonable structural parameters can effectively mitigate the fluctuation of the coupling coefficient and help reduce the effect of process errors on the coupling coefficient. The work in this paper provides a theoretical basis for the design and preparation of subsequent grating structures.

关键词

布拉格光栅耦合系数侧向耦合分布反馈

Keywords

Bragg gratingcoupling coefficientlaterally-coupleddistributed feedback

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