垂直腔面发射激光器研究进展

张继业; 李雪; 张建伟; 宁永强; 王立军

doi:10.37188/CJL.20200339

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垂直腔面发射激光器研究进展

特邀综述 | 更新时间：2020-12-10

- 垂直腔面发射激光器研究进展
- Research Progress of Vertical-cavity Surface-emitting Laser
- 发光学报 2020年41卷第12期页码：1443-1459
- 作者机构：
  
  1.中国科学院长春光学精密机械与物理研究所发光学及应用国家重点实验室, 吉林长春 130033
  2.中国科学院大学材料与光电研究中心, 北京 100049
- 作者简介：
  
  [ "张继业(1990-), 男, 辽宁丹东人, 博士研究生, 2013年于中国矿业大学获得学士学位, 主要从事垂直外腔面发射激光器的研究。E-mail:846810633@qq.com" ]
  [ "宁永强(1965-), 男, 吉林长春人, 博士, 研究员, 1999年于中国科学院长春物理研究所获得博士学位, 主要从事大功率垂直腔面发射激光器的研究。E-mail:ningyq@ciomp.ac.cn" ]
  [ "王立军(1946-), 男, 吉林舒兰人, 研究员, 中国科学院院士, 博士研究生导师, 1982年于吉林大学获得硕士学位, 主要从事激光技术等领域的基础及应用研究。E-mail:ljwang2013ys@163.com" ]
- 基金信息：
  
  国家重点研发计划(2018YFB2002401);国家自然科学基金(61874117);国家自然科学基金(11674314);国家自然科学基金(61434005);国家自然科学基金(11774343);国家自然科学基金(61727822);国家自然科学基金(61991433);中科院先导科技专项(XDB43030302);装发共用技术(41414060103);吉林省科技发展计划重点项目(20190302042GX);济南市科技计划(2019GXRC041);广东省重点领域研发计划(2020B090922003);中国科学院STS创新创业指导项目(KFJ-STS-SCYD-318)
- DOI：10.37188/CJL.20200339
  中图分类号： TN248.4
- 收稿日期：2020-11-06，
  
  录用日期：2020-11-18，
  
  纸质出版日期：2020-12
- 稿件说明：
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张继业, 李雪, 张建伟, 等. 垂直腔面发射激光器研究进展[J]. 发光学报, 2020,41(12):1443-1459.

Ji-ye ZHANG, Xue LI, Jian-wei ZHANG, et al. Research Progress of Vertical-cavity Surface-emitting Laser[J]. Chinese journal of luminescence, 2020, 41(12): 1443-1459.
张继业, 李雪, 张建伟, 等. 垂直腔面发射激光器研究进展[J]. 发光学报, 2020,41(12):1443-1459. DOI： 10.37188/CJL.20200339.

Ji-ye ZHANG, Xue LI, Jian-wei ZHANG, et al. Research Progress of Vertical-cavity Surface-emitting Laser[J]. Chinese journal of luminescence, 2020, 41(12): 1443-1459. DOI： 10.37188/CJL.20200339.

摘要

垂直腔面发射激光器（Vertical-cavity surface-emitting laser，VCSEL）是40多年前被发明的，具有很多独特的优势，例如尺寸小、功耗低、效率高、寿命长、圆形光束以及二维面阵集成等。近年来，VCSEL市场发展迅速，在5G通信、光信息存储、3D传感、激光雷达、材料加工以及激光显示等领域被广泛应用。针对不同的应用需求，VCSEL的功率、速率、能效、高温性能以及波长的多样性等性能都有了长足的进步。本文首先介绍了VCSEL的研究历程和优点特性；综述了VCSEL在高功率、高速、高温下工作等方面的研究进展和应用现状；最后对VCSEL的最新应用做了介绍，展望了VCSEL的市场。

Abstract

The vertical-cavity surface emitting laser(VCSEL) was invented 40 years ago

where a lot of unique features can be expected

such as small footprint

low power consumption

high efficiency

long lifetime

circular beam and two-dimensional arrangement and so on. In recent years

the market of VCSELs has been growing up rapidly

and VCSELs are now key devices in the fields of 5G communication

optical information storage

3D sensing

material processing

light detection and ranging(LiDAR)

and laser display. For different application requirements

VCSEL has great achievements in the area of power

efficiency

speed and wavelength. In this paper

firstly

the research history and advantages of VCSEL are introduced; then

the research progress and application status of VCSEL at high power

high speed and high temperature are reviewed; lastly

the latest application of VCSEL is introduced

and the market of VCSEL is prospected.

关键词

Keywords

references

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