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Al2O3/PMMA交叠薄膜制备及OLED封装性能
Fabrication of Al2O3/PMMA Laminates and Its Barrier Performance in OLED Encapsulation
- 发光学报 2021年42卷第1期 页码：118-125
- 作者机构：
1.福州大学 物理与信息工程学院, 福建 福州 350116
2.中国福建光电信息科学与技术创新实验室, 福建 福州 350116
- 作者简介：
[ "周雄图(1982-), 男, 福建晋江人, 博士, 教授, 2010年于华东师范大学获得博士学位, 主要从事光电显示技术与器件的研究。E-mail:xtzhou@fzu.edu.cn" ]
[ "张永爱(1977-), 男, 江西永丰人, 博士, 研究员, 2011年于福州大学获得博士学位, 主要从事新型显示材料与器件的研究。E-mail:yongaizhang@fzu.edu.cn" ]
- 基金信息：国家自然科学基金(61775038);福建省高等学校新世纪优秀人才支持计划(50011516)
DOI：10.37188/CJL.20200325
中图分类号： TN383;TN873纸质出版日期：2021-01，
收稿日期：2020-10-28，
录用日期：2020-11-19
- 稿件说明：
移动端阅览
周雄图, 陈桂雄, 孙钒, 等. Al2O3/PMMA交叠薄膜制备及OLED封装性能[J]. 发光学报, 2021,42(1):118-125.
XIONG-TU ZHOU, GUI-XIONG CHEN, FAN SUN, et al. Fabrication of Al2O3/PMMA Laminates and Its Barrier Performance in OLED Encapsulation. [J]. Chinese journal of luminescence, 2021, 42(1): 118-125.
周雄图, 陈桂雄, 孙钒, 等. Al2O3/PMMA交叠薄膜制备及OLED封装性能[J]. 发光学报, 2021,42(1):118-125. DOI： 10.37188/CJL.20200325.
XIONG-TU ZHOU, GUI-XIONG CHEN, FAN SUN, et al. Fabrication of Al2O3/PMMA Laminates and Its Barrier Performance in OLED Encapsulation. [J]. Chinese journal of luminescence, 2021, 42(1): 118-125. DOI： 10.37188/CJL.20200325.
摘要
可靠的薄膜封装对提高有机发光二极管（Organic light-emitting diode，OLED）器件寿命至关重要。本文采用原子层沉积实现了致密Al
2
O
3
薄膜的低温制备，并研究了喷墨打印PMMA墨水在Al
2
O
3
薄膜的均匀成膜以及Al
2
O
3
/PMMA交叠薄膜的水汽阻隔性能。实验结果表明，当打印分辨率为300 DPI时，PMMA墨水在Al
2
O
3
薄膜表面均匀成膜，Al
2
O
3
/PMMA交叠薄膜具有良好的水汽阻隔性能和光学透过率。钙膜电学测试结果显示，3对Al
2
O
3
/PMMA薄膜的水汽透过率低至8.34×10
-5
g/（m
2
·d），而光学透光率在可见光范围内高于95%，表现出良好的OLED器件薄膜封装性能。
Abstract
Reliable thin film encapsulation is of great importance in the development of organic light emitting diodes(OLED). In this work
dense Al
2
O
3
thin films were achieved using atomic layer deposition(ALD) under low temperature of 90℃
and ink-jet printing(IJP) was applied to deposit PMMA thin films on the surface of Al
2
O
3
thin films with different resolutions in terms of dots per inch(DPI). It was found that Al
2
O
3
/PMMA laminates exhibited good barrier performance and optical transmittance. The water vapor transmission rate(WVTR) of the 3 dyads Al
2
O
3
/PMMA laminates showed WVTR of 8.34×10
-5
g/(m
2
·d). Besides
the optical transmittance of the thin films was higher than 95% in the visible wavelength
exhibiting good barrier and optical performances in OLED encapsulation.
关键词
薄膜封装原子层沉积喷墨打印水汽透过率OLED
Keywords
thin film encapsulationatomic layer depositionink-jet printingwater vapor transmission rateOLED
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