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1. 上海大学材料科学与工程学院
2. 上海大学 新型显示技术及应用集成教育部重点实验室
收稿:2010-08-25,
修回:2010-11-15,
网络首发:2011-02-22,
纸质出版:2011-02-22
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周帆, 张良, 李俊, 张小文, 林华平, 俞东斌, 蒋雪茵, 张志林. Ta<sub>2</sub>O<sub>5</sub>绝缘层厚度对ZnO基薄膜晶体管器件性能的影响[J]. 发光学报, 2011,32(2): 188-193
ZHOU Fan, ZHANG Liang, LI Jun, ZHANG Xiao-wen, LIN Hua-ping, YU Dong-bin, JIANG Xue-yin, ZHANG Zhi-lin. Effect of Ta<sub>2</sub> O<sub>5</sub> Thickness on The Performances of ZnO-based Thin Film Transistors[J]. Chinese Journal of Luminescence, 2011,32(2): 188-193
周帆, 张良, 李俊, 张小文, 林华平, 俞东斌, 蒋雪茵, 张志林. Ta<sub>2</sub>O<sub>5</sub>绝缘层厚度对ZnO基薄膜晶体管器件性能的影响[J]. 发光学报, 2011,32(2): 188-193 DOI:
ZHOU Fan, ZHANG Liang, LI Jun, ZHANG Xiao-wen, LIN Hua-ping, YU Dong-bin, JIANG Xue-yin, ZHANG Zhi-lin. Effect of Ta<sub>2</sub> O<sub>5</sub> Thickness on The Performances of ZnO-based Thin Film Transistors[J]. Chinese Journal of Luminescence, 2011,32(2): 188-193 DOI:
报道了不同厚度Ta
2
O
5
栅绝缘层对氧化锌薄膜晶体管器件性能的影响。在室温下用射频磁控溅射分别制备了100
85
60
40 nm厚度的Ta
2
O
5
薄膜作为绝缘层的一组底栅氧化锌薄膜晶体管器件。从实验结果可以得出如下结论:随着Ta
2
O
5
栅绝缘层厚度的增加
相应器件的场效应迁移率下降
其数值分别是50.5
59.3
63.8
71.2 cm
2
/V
&
middot;s
对应100
85
60
40 nm厚度的绝缘层。从原子力显微图像可以看到
Ta
2
O
5
薄膜表面粗糙度随着薄膜厚度的减小而降低
这是场效应迁移率得以提高的主要原因。而100
85
60
40 nm不同厚度的绝缘层相应器件的开关电流比分别是1.2
&
times;10
5
4.8
&
times;10
5
3.2
&
times;10
4
7.2
&
times;10
3
其阈值电压分别为1.9
1.5
1.2
0.9 V。从各项性能综合考虑
85 nm厚度的Ta
2
O
5
栅绝缘层所制备的薄膜晶体管器件具有最佳性能。
paper
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