ZHOU Lu, WANG Yun-hua, JIA Bao-shan, BAI Duan-yuan, ZHANG Si-yu, QIAO Zhong-liang, GAO Xin, BO Bao-xue. Deposition of AlN Film for AR Coating of Semiconductor Lasers[J]. Chinese Journal of Luminescence, 2011,32(12): 1292-1296
ZHOU Lu, WANG Yun-hua, JIA Bao-shan, BAI Duan-yuan, ZHANG Si-yu, QIAO Zhong-liang, GAO Xin, BO Bao-xue. Deposition of AlN Film for AR Coating of Semiconductor Lasers[J]. Chinese Journal of Luminescence, 2011,32(12): 1292-1296DOI:
Ziegler M, Tomm J W, Reeber D, et al. Catastrophic optical mirror damage in diode lasers monitored during single-pulse operation [J]. Appl.Phys. lett., 2009, 94 (19):191101-1-4.[2] Silfvenius C, Sun Y T, Blixt P, et al. Nitride facet passivation raises reliability, COMD and enables high temperature operation of InGaAs and InAlGaAs lasers [J]. SPIE, 2005, 5711 :189-199.[3] Li Z J, Hu L M,Wang Y, et al. Coating for 808 nm Al-containing semiconductor laser diodes [J]. Optics and precision Engineering (光学 精密工程), 2010, 18 (6):1258-1263(in Chinese).[4] Cao X, Luo J S, Chen T S. AlN/GaAs Interface analyses by anger electron spectroscopy and X-ray photoelectron spectroscopy [J]. Chin. J. Semiconductors(半导体学报), 1999, 20 (7):539-542 (in Chinese).[5] Jiang Jianping. Semiconductor Laser [M]. Beijing: Electronic Industry Press, 2001:153-155.[6] Monch W. Growth of AlN on GaAs (110) by reactive molecular beam deposition [J]. Vacuum Science & Technology,1992, 10 (4):1735-1739.[7] Tang Jinfa, Gu peifu, Liu Xu. Morden Optical Film Technology [M]. Hangzhou: Zhejiang University Press, 1983.[8] Zhao S X, Wackelgard E. The optical properities of sputtered composite of Al-AlN [J]. Solar Energy Materials & Solar Cells, 2006, 13 (90):1861-1874[9] Tong H B, Ba D C,Wen L S. Sputtering conditions and optical properties of AlN films [J].Chin. J. Vacuum Science and Technology (真空科学与技术学报), 2007, 27 (4):332-335(in Chinese).