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1. 中国科学院 研究生院
2. 长春理工大学 材料科学与工程学院
3. 中国科学院 激发态物理重点实验室, 长春光学精密机械与物理研究所
收稿:2010-08-25,
修回:2010-11-15,
网络首发:2011-10-22,
纸质出版:2011-10-22
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曹建明, 秦杰明, 张振中, 王立昆, 郑剑, 韩舜, 赵延民, 张炳烨, 张吉英, 申德振. 热处理对立方相结构Mg<sub>0.57</sub>Zn<sub>0.43</sub>O 合金薄膜表面和组成的影响[J]. 发光学报, 2011,32(10): 973-976
CAO Jian-ming, QIN Jie-ming, ZHANG Zhen-zhong, WANG Li-kun, ZHENG Jian, HAN Shun, ZHAO Yan-min, ZHANG Bing-ye, ZHANG Ji-ying, SHEN De-zhen. Annealing Effect on Smoothness and Composition of Cubic-phase Mg<sub>0.57</sub>Zn<sub>0.43</sub>O Thin Film[J]. Chinese Journal of Luminescence, 2011,32(10): 973-976
曹建明, 秦杰明, 张振中, 王立昆, 郑剑, 韩舜, 赵延民, 张炳烨, 张吉英, 申德振. 热处理对立方相结构Mg<sub>0.57</sub>Zn<sub>0.43</sub>O 合金薄膜表面和组成的影响[J]. 发光学报, 2011,32(10): 973-976 DOI:
CAO Jian-ming, QIN Jie-ming, ZHANG Zhen-zhong, WANG Li-kun, ZHENG Jian, HAN Shun, ZHAO Yan-min, ZHANG Bing-ye, ZHANG Ji-ying, SHEN De-zhen. Annealing Effect on Smoothness and Composition of Cubic-phase Mg<sub>0.57</sub>Zn<sub>0.43</sub>O Thin Film[J]. Chinese Journal of Luminescence, 2011,32(10): 973-976 DOI:
MgZnO合金具有可覆盖日盲紫外波段的禁带宽度和晶格匹配的单晶衬底
是理想的日盲紫外探测材料。由于MgO和ZnO分属立方相和六角相
分相问题使高质量单一相MgZnO难以获得。热处理是提高薄膜结晶质量的有效手段。利用MOCVD方法制备了单一立方相Mg
0.57
Zn
0.43
O合金薄膜
研究了薄膜的退火行为对薄膜结构和光学性能的影响。研究发现
450 ℃的原生样品经过550
650
750
850 ℃氧气氛退火后
薄膜的结晶特性和表面形貌得到明显的改善。随着退火温度的增加
薄膜吸收截止边逐渐蓝移
带隙展宽。X光电子能谱分析发现
随着退火温度增加
Zn含量逐渐减小
这种现象被归结为组分蒸汽压的差异。在退火温度达到950 ℃时
样品发生了分相
出现了低Mg含量的六角相MgZnO。
paper
Li G R, Qin Z X, Sang L W, et al. Fabrication and characterization of GaN based p-i-n avalanche photodetectors [J]. Chin. J. Lumin. (发光学报) , 2011, 32 (3):262-265 (in Chinese).[2] Tut T, Gokkavas M, Inal A, et al. AlxGa1-xN-based avalanche photodiodes with high reproducible avalanche gain [J]. Appl. Phys. Lett., 2007, 90 (16):163506-1-3.[3] Adivarahan V, Simin G, Tamulaitis G, et al. Indium-silicon co-doping of high-aluminum-content AlGaN for solar blind photodetectors[J]. Appl. Phys. Lett., 2001, 79 (12):1903-1905.[4] Kuryatkov V V, Temkin H, Campbell J C, et al. Low-noise photodetectors based on heterojunctions of AlGaN-GaN [J]. Appl. Phys. Lett., 2001, 78 (21):3340-3342.[5] Huang J, Wang L J, Tang K, et al. Ultraviolet detector based on ZnO/diamond film heterojunction diode [J]. Chin. J. Lumin. (发光学报), 2011, 32 (3):272-276 (in Chinese).[6] Vashaei Z, Minegishi T, Uzuki H, et al. Structural variation of cubic and hexagonal MgxZn1-xO layers grown on MgO(111)/c-sapphire [J]. J. Appl. Phys., 2005, 98 (5):054911-1-4.[7] Choopun S, Vispute R D, Yang W, et al. Realization of band gap above 5.0 eV in metastable cubic-phase MgxZn1-xO alloy films [J]. Appl. Phys. Lett., 2002, 80 (9):1529-1531.[8] Ju Z G, Shan C X, Jiang Y, et al. MgxZn1-xO-based photodetectors covering the whole solar-blind spectrum range [J]. Appl. Phys. Lett., 2008, 93 (17):173505-1-3.[9] Zhong Z, Sun L J, Xu X Q, et al. Effect of high temperature annealing in nitrogen on the luminescence property of ZnO films [J]. Chin. J. Lumin. (发光学报), 2010, 31 (3):359-363 (in Chinese).[10] Ju Z G, Shan C X, Yang C L, et al. Phase stability of cubic Mg0.55Zn0.45O thin film studied by continuous thermal annealing method [J]. Appl. Phys. Lett., 2009, 94 (10):101902-1-3.[11] Liu W S, Gu H L, Zhu S M, et al. The deposition and annealing study of MOCVD ZnMgO [J]. J. Crystal Growth, 2005, 277 (1-4):416-421.[12] Ohtomo A, Shiroki R, Ohkubo I, et al. Thermal stability of supersaturated MgxZn1-xO alloy films and MgxZn1-xO/ZnO heterointerfaces [J]. Appl. Phys. Lett., 1999, 75 (26):4088-4090.[13] Banyai L, Koch S W. Semiconductor Quantum Dots, World Scientific Series on Atomic, Moleculor and Optical Physics [M]. Second Revised. Singapore: World Scientific, 1993:97-102.[14] Chen Y W, Liu Y C, Lu S X, et al. Photoelectric properties of ZnO: In nanorods/SiO2/Si heterostructure assembled in aqueous solution [J]. Appl. Phys. B, 2006, 84 (3):507- 510.
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