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中国科学技术大学 物理系
收稿:2009-01-25,
修回:1900-1-2,
网络首发:2010-06-30,
纸质出版:2010-06-30
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钟 泽, 孙利杰, 徐小秋, 等. 氮气氛中高温退火对ZnO薄膜发光性质的影响[J]. 发光学报, 2010,31(3):359-363.
ZHONG Ze, SUN Li-jie, XU Xiao-qiu, et al. Effect of High Temperature Annealing in Nitrogen on the Luminescence Property of ZnO Films[J]. Chinese Journal of Luminescence, 2010, 31(3): 359-363.
以二乙基锌和水汽分别作为锌源和氧源
用LP-MOCVD方法在p型Si(100)衬底上生长了单一取向的ZnO薄膜。对得到的样品在氮气气氛中进行高温热处理
退火温度分别为900
1 000
1 100 ℃。 利用室温PL谱、XRD、AFM、XPS等方法对样品的性质进行了研究。研究表明:(1)随着退火温度的升高
样品的结晶性质也逐渐提高
从表面形貌观察到晶粒尺寸逐渐增大;(2)当退火温度从900 ℃升高至1 000 ℃时
样品的光致发光谱中可见光波段的发光强度有所减弱
而紫外波段的发光强度明显增强;当退火温度升高至1 100 ℃时
可见光波段的发光几乎完全被抑制
而紫外波段的发光强度急剧增强。分析认为
高温退火改善晶体结晶质量的同时调制了样品的Zn/O比
氮气气氛下的热处理使得样品内的氧原子逸出
来自受主缺陷O
Zn
的可见发射随温度升高逐渐减弱
而当退火温度达到1 000 ℃以上时样品成为富锌状态
此时与施主缺陷Zn
i
有关的紫外发射急剧增强。
paper
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