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厦门大学 福建省半导体材料与应用重点实验室 物理系及半导体光子学研究中心
收稿:2009-11-25,
修回:1900-1-2,
网络首发:2010-04-30,
纸质出版:2010-04-30
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詹华瀚, 黄斌旺, 吴雅苹, 等. Si(001)衬底上闪锌矿ZnO的制备与分析[J]. 发光学报, 2010,31(2):209-213.
ZHAN Hua-han, HUANG Bin-wang, WU Ya-ping, et al. Growth and Investigation of Zincblende ZnO on Si(001)[J]. Chinese Journal of Luminescence, 2010, 31(2): 209-213.
采用分子束外延方法在室温下于Si(001)表面上生长ZnO材料。实验发现:样品为闪锌矿和六角结构的ZnO混合多晶薄膜
其表面分布着一系列具一定取向的近似长方形的纳米台柱结构。在不同参数的高温退火后
这些梯形台柱将变小
形成梯形纳米环
或分解为较小的纳米柱及其团簇结构等。分析表明:ZnO混合多晶薄膜的形成
以及表面纳米台柱的演变
与Si(001)衬底、较低温的生长温度及热效应等因素相关联。
paper
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