膜层厚度对蓝宝石衬底上生长的ITO薄膜性质的影响

王 新; 向 嵘; 李 野; 王国政; 付申成; 端木庆铎; 姜德龙; 吴 奎

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膜层厚度对蓝宝石衬底上生长的ITO薄膜性质的影响

论文 | 更新时间：2020-08-12

- 膜层厚度对蓝宝石衬底上生长的ITO薄膜性质的影响
- Effects of Thickness on the Properties of ITO Thin Films Grown on Sapphire Substrate
- 发光学报 2009年30卷第5期页码：712-716
- 作者机构：
  
  长春理工大学理学院
- 作者简介：
- 基金信息：
- DOI：
  中图分类号： O484.4+1;O484.4+2
- 收稿：2009-01-25，
  
  修回：1900-1-2，
  
  网络首发：2009-10-30，
  
  纸质出版：2009-10-30
- 稿件说明：
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王新, 向嵘, 李野, 等. 膜层厚度对蓝宝石衬底上生长的ITO薄膜性质的影响[J]. 发光学报, 2009,30(5):712-716.

WANG Xin, XIANG Rong, LI Ye, et al. Effects of Thickness on the Properties of ITO Thin Films Grown on Sapphire Substrate[J]. Chinese Journal of Luminescence, 2009, 30(5): 712-716.
王新, 向嵘, 李野, 等. 膜层厚度对蓝宝石衬底上生长的ITO薄膜性质的影响[J]. 发光学报, 2009,30(5):712-716. DOI：

WANG Xin, XIANG Rong, LI Ye, et al. Effects of Thickness on the Properties of ITO Thin Films Grown on Sapphire Substrate[J]. Chinese Journal of Luminescence, 2009, 30(5): 712-716. DOI：

摘要

采用磁控溅射的方法在蓝宝石衬底上制备了氧化铟锡(ITO)透明氧化物薄膜;研究了不同厚度薄膜的结构、光学和电学特性。经X射线衍射(XRD)测量

发现在蓝宝石衬底上生长的ITO薄膜呈现了较高的(222)择优取向;随着膜层厚度的增加

该衍射峰对应的2

衍射角逐渐向大角度方向移动

同时该衍射峰的半峰全宽逐渐减小

平均晶粒尺寸增大。经光学透射光谱测量

发现随着膜层厚度的增加

光学透过率逐渐减小。膜层厚度为0.2 μm时

可见光透过率超过80%

当膜层厚度为0.8 μm时

可见光透过率下降到60%。电学测量结果表明

随着膜层厚度的增加

薄膜电阻率逐渐减小。膜层厚度为0.2 μm时

电阻率为9×10

-4

Ω·cm

膜层厚度为0.8 μm时

电阻率为5.5×10

-4

Ω·cm。

Abstract

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references

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