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贵州大学理学院物理系, 光电子技术与应用重点实验室,贵州 贵阳,550025
收稿日期:2008-09-20,
修回日期:2008-10-28,
纸质出版日期:2008-11-20
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王海旭, 冯彩玲, 金锋. 退火氧化生成的硅锗低维结构的光致发光性质[J]. 发光学报, 2008,29(6): 1050-1054
WANG Hai-xu, FENG Cai-ling, JIN Feng. The Properties of PL in Low-dimensional Structure with Si<sub>1-x</sub>Ge<sub>x</sub> Formed by Annealing [J]. Chinese Journal of Luminescence, 2008,29(6): 1050-1054
用激光辐照辅助电化学刻蚀的方法加工硅锗薄膜样品
30min后
在样品表面形成了多孔状的结构
该结构在724nm处有很强的光致发光(PL)峰.将该多孔状结构的样品置于高温氧化炉中进行不同时间的退火氧化处理后
发现在不同的退火氧化条件下样品的PL光谱发生了明显的变化.通过分析
作者根据量子受限(QC)和量子限制-发光中心(QCLC)模型
建立了新的量子受限-晶体与氧化物界面态综合模型来解释样品PL发光的变化.
Many strategies have been developed to improve silicon's and germanium's light emission efficiency
such as band gap engineering and quantum confinement in low-dimensional structures.Porous silicon
silicon nanocrystals and germanium nanocrystals in the SiO
2
layer are being investigated actively as some means of improving the light-emission properties of silicon and germanium.Many physical mechanisms have been proposed to explain the photoluminescence(PL)in low-dimensional nanostructures.In this paper
some kinds of low-dimensional nanostructures were formed by etching with laser irradiation on Si
1-x
Ge
x
sample.Dot structure and line structure was formed
respectively
on the SiGe film after anodizing and irradiating for 5 min and 10 min;after 15 min
nano-strap pieces structure was formed when the SiGe layer was dug up.Due to the impaction of ion and the irradiation of laser
after etching with laser irradiation for 30 min
the Si
1-x
Ge
x
layer was almost peeled
then porous structure was formed on the substrate.After anodizing and irradiation
the porous structure samples were oxided by annealing treatment in the furnace at 800℃ for different time.We studied the evolution of photoluminescence with annealing time.It was found that the PL peak at 724 nm increases obviously on the porous structure where the Si nanocrystals/SiO
2
Ge nanocrystals/GeO
2
system exists before annealing treatment.After annealing for 20 min
the PL intensity reduces obviously.However
the PL intensity incresases again after annealing for 30 min
and that PL emission shows blue-shift obviously to 683 nm.When annealing time was longer than 90 min
the PL spectra vanishes.The change of PL emission of SiGe sample cannot be explained by quantum confinement(QC)or quantum confinement-luminescence center(QCLC)model.According to the QC and QCLC model
a new model of quantum confinement-the trap states of the interface between some oxides of silicon and nanocrystal was proposed for interpreting the change of PL emission in Si
1-x
Ge
x
alloys.Through this model
we hope to solve the problem of "critical size" in QC and QCLC models.In this model
the photoexcitation occurs in Si nanoclusters and Ge nanoclusters embedded in the oxide layer
where the band gap opens by quantum confinement.The enhancing photoemission occurs in the interface states of the Si oxide adjacent to the nanocrystals only when the level of the excitation states opened by QC is higher than that of the interface states
so that the interface states can trap the electrons photoexcited.It is clear that after deeper oxidation on SiGe
the level of the excitation states opened is lower than that of the interface states due to higher level of oxide states where the PL band is weaker.The wavelength of intensive PL peaks is also determined by the level position of the trap states in the crystal-oxide interface due to oxidation conditions in laser irradiation and annealing.We think that the energy state distribution is various in different crystals and different oxide interface states which play an important role for explaining the change of frequency and intensity of PL.
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