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长春理工大学, 光电子技术研究所,吉林 长春,130022
收稿日期:2008-07-20,
修回日期:2008-10-02,
纸质出版日期:2008-11-20
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姜德龙, 向嵘, 吴奎, 王新, 王国政, 付申成. SiO<sub>2</sub>防离子反馈膜的制备及其性能[J]. 发光学报, 2008,29(6): 1096-1100
JIANG De-long, XIANG Rong, WU Kui, WANG Xin, WANG Guo-zheng, FU Shen-cheng. Preparation and Characteristics of SiO<sub>2</sub> Ion-preventive Feedback Thin Film [J]. Chinese Journal of Luminescence, 2008,29(6): 1096-1100
姜德龙, 向嵘, 吴奎, 王新, 王国政, 付申成. SiO<sub>2</sub>防离子反馈膜的制备及其性能[J]. 发光学报, 2008,29(6): 1096-1100 DOI:
JIANG De-long, XIANG Rong, WU Kui, WANG Xin, WANG Guo-zheng, FU Shen-cheng. Preparation and Characteristics of SiO<sub>2</sub> Ion-preventive Feedback Thin Film [J]. Chinese Journal of Luminescence, 2008,29(6): 1096-1100 DOI:
防离子反馈膜是一种覆盖在微通道板输入端的Al
2
O
3
或SiO
2
连续超薄膜
该膜对延长微光像管的使用寿命具有重要的作用.首先采用射频磁控溅射方法在0.5~1μm的有机载膜上制备Si薄膜
然后在4~6Pa氧气下放电使其贴敷到微通道板上
同时使Si膜氧化和有机载膜分解
最后在微通道板输入面上形成满足设计要求的SiO
2
防离子反馈膜.该制膜方法工艺稳定
重复性好
成品率超过90%.给出了有、无薄膜时微通道板的电子透过特性曲线和膜层厚度与死电压间关系曲线.对相同厚度为nm的SiO
2
和Al
2
O
3
防离子反馈膜的电子透过特性进行了分析和比较
得出了SiO
2
比Al
2
O
3
薄膜对电子透过稍好
相应的死电压分别为220V和255V的结论.结合对膜层电子透过和离子阻止特性的综合分析可以看出
SiO
2
也是制作微通道板防离子反馈膜较为理想的材料之一.为了定量表征微通道板防离子反馈膜的离子阻止能力
最后指出了防离子反馈膜离子透过率的测量是今后该项研究工作的当务之急.
Microchannel plate(MCP)is a key component in the low-level-light image intensifier.When the intensifier is working
positive ion feedback will be produced in front of the output surface of MCP.On the one hand
the ion feedback destroy the linear operation characteristics of the MCP;on the other hand
electron emission produced by these feedback ions results in the appearance of ion spots on the screen;furthermore
these positive ions can bombard the photo-electrical cathode and shorten the operating life of the cathode.At present
the effective method for minimizing the ion feedback phenomenon is to fabricate a super-thin Al
2
O
3
or SiO
2
thin film on the input surface of MCP.This thin film allows some electrons with certain energy and stop effectively positive ions to pass though it
thus the cathode can avoid the bombard from the feedback ions and prolong the operation life of image tube.In this paper
the silicon thin film with the thickness of 0.5~1 μm was firstly formed on an organic self-sustaining thin film using radio-frequency magnetron sputtering method.Next
the silicon thin film was attached on the MCP by discharging oxygen gas under a vacuum of 4~6 Pa.At the same time
silicon thin film was oxidized and the organic film was discomposed in this process.Finally a thin layer of SiO
2
ion-preventive feedback thin film satisfied the requirement was formed on the input surface of MCP.This fabrication method is very stable
and with a good reproducibility
the yield of this method is well above 90%.The technological parameters in the fabrication of sputtered Si thin film on the self-sustaining organic thin film were also reported in this paper.The structure and operating method of vacuum-discharge attaching was introduced and the advantage of ion-preventive feedback thin film fabricated by this method was shown.After the measurement
the electron transmittance characteristics though the ion-preventive feedback thin film for unfilmed and filmed MCPs were shown.The relationship between the thickness of the ion-preventive feedback thin film and the dead-voltage(characterize the electron transmittance propertied through the film)was given.The electron transmittance characteristics for SiO
2
ion-preventive feedback thin film was compared with that for Al
2
O
3
thin film.The electron transmittance characteristic of SiO
2
ion-preventive feedback thin film is better than that of Al
2
O
3
film(the dead-voltage is 220 V for SiO
2
thin film and 255 V for Al
2
O
3
film with the same film's thickness of 5 nm).At the end
it was pointed out that the emphasis of this project should be placed on the measurement of ion transmittance characteristics.
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