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中国科学技术大学, 物理系
收稿:2007-10-25,
修回:2007-11-24,
纸质出版:2008-03-20
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田珂, 施媛媛, 徐小秋, 钟声, 傅竹西. CVD法制备ZnO薄膜生长取向和表面形貌[J]. 发光学报, 2008,29(2): 294-298
TIAN Ke, SHI Yuan-yuan, XU Xiao-qiu, ZHONG Sheng, FU Zhu-xi. The Investigation of Growth Orientations of ZnO Films by CVD[J]. Chinese Journal of Luminescence, 2008,29(2): 294-298
利用具有特定温度梯度的CVD设备
以锌粉和氧气为原料
在Si(100)衬底上制备了ZnO薄膜。研究发现
锌粉中加入某些氯化物后可以改变ZnO薄膜的生长取向。用FESEM观察ZnO薄膜的表面形貌
发现Zn和氯化物的量比为1:1时
生长的ZnO薄膜表面晶粒呈菱形或三角形({101}面)
当二者的量比为10:1时薄膜表面晶粒呈六棱台形({001}面)。XRD分析结果证实
前者只观察到(101)和(202)衍射峰
而后者出现(002)衍射峰且其强度大于(101)衍射峰。改变衬底或温度后得到的结果相同。因此
作者认为氯化物改变薄膜生长取向的现象与衬底和生长温度无关
添加的氯化物起到降低ZnO{101}面表面能的作用
随着氯化物浓度的增加
薄膜从沿[001]方向生长逐渐转向沿[101]方向生长。
Jiang Zhiyuan,Xu Tao,Xie Zhaoxiong,et al.Molten salt route toward the growth of ZnO nanowires in unusual growth directions[J].J.Phys.Chem.B,2005,109(49):23269-23273.
Neugebauer J.Ab initio analysis of surface structure and adatom kinetics of group-Ⅲ nitrides[J].Phys.Stat.Sol.(b),2001,227(1):93-114.
Zúiga-Pérez J,Muoz-Sanjosé V.Palacios-Lidón E,et al.Facets evolution and surface electrical properties of nonpolar m-plane ZnO thin films[J].Appl.Phys.Lett.,2006,88(26):261912-1-3.
Northrup J,Romano L,Neugebauer J.Surface energetics,pit formation,and chemical ordering in InGaN alloys[J].Appl.Phys.Lett.,1999,74(16):2319-2321.
Laudise R A,Ballman A A.Hydrothermal synthesis of zinc oxide and zinc sulfide[J].J.Phys.Chem.,1960,64(5):688-691.
Preetam Singh,Ashvani Kumar,Deepak,et al.Growth and characterization of ZnO nanocrystalline thin films and nano-powder via low-cost ultrasonic spray pyrolysis[J].J.Crystal Growth,2007,306(2):303-310.
Zhou Shengming,Zhou Jianhua,Huang Taohua,et al.Nonpolar α-plane ZnO films fabricated on (302)γ-LiAlO2 by pulsed laser deposition[J].J.Crystal Growth,2007,303(2):510-514.
Yao B D,Chan Y F,Wang N.Formation of ZnO nanostructures by a simple way of thermal evaporation[J].Appl.Phys.Lett.,2002,81(4):757-759.
Chakrabarti S,Ganguli D,Chaudhuri S.Substrate dependence of preferred orientation in sol-gel-derived zinc oxide films[J].Materials Lett.,2004,58(30):3952-3957.
Liu Z W,Sun C W,Gu J F,et al.Epitaxial relationship of ZnO film with Si (001) substrate and its effect on growth and morphology[J].Appl.Phys.Lett.,2006,88(25):251911-1-3.
Chen X L,Geng X H,Xue J M,et al.Temperature-dependent growth of zinc oxide thin films grown by metal organic chemical vapor deposition[J].J.Crystal Growth,2006,296(1):43-50.
Zhu Junjie,Yao Ran,Liu Cihui,et al.Effect of total gas velocity on the growth of ZnO films by metal-organic chemical vapor deposition[J].Thin Solid Films,2006,514(1):306-309.
Zhou Xi,Xie Zhaoxiong,Jiang Zhiyuan,et al.Formation of ZnO hexagonal micro-pyramids:a successful control of the exposed polar surfaces with the assistance of an ionic liquid[J].Chem.Comm.,2005,(44):5572-5574.
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