LI Xiang-ping, ZHANG Bao-lin, DONG Xin, ZHANG Yuan-tao, XIA Xiao-chuan, ZHAO Lei, ZHAO Wang, MA Yan, DU Guo-tong. Study on the Properties of ZnO Films Prepared by Photo-assisted MOCVD[J]. Chinese Journal of Luminescence, 2008,29(1): 139-143
LI Xiang-ping, ZHANG Bao-lin, DONG Xin, ZHANG Yuan-tao, XIA Xiao-chuan, ZHAO Lei, ZHAO Wang, MA Yan, DU Guo-tong. Study on the Properties of ZnO Films Prepared by Photo-assisted MOCVD[J]. Chinese Journal of Luminescence, 2008,29(1): 139-143DOI:
substrates by photo-assisted Metal Organic Chemical Vapor Deposition (PA-MOCVD). The effects of photo-assisted on the properties of ZnO films were studied by X-ray diffraction
transmission spectrum and Van der Pauw Hall effect
respectively. The results indicated that the samples prepared under photo irradiation have better crystal and optical quality
and they have lower electron concentration. The light irradiation during the growth of ZnO films is benefit for the decompositon of metal organic source
and can afford enough energy for these adsorption atoms migrating to proper lattice position.