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1. 中国工程物理研究院, 电子工程研究所, 四川, 绵阳, 621900
2. 电子科技大学, 应用所, 四川, 成都, 610054
3. 四川大学, 电子信息学院, 四川, 成都, 610064
4. 中国科学院, 光电研究所, 四川, 成都, 610209
5. 中国科学院, 西安光学精密机械研究所, 陕西, 西安, 710119
6. 中国科学院, 上海光学精密机械研究所, 上海, 201800
纸质出版日期:2007-11-20,
收稿日期:2007-5-9,
修回日期:2007-8-9,
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蔡然, 胡渝, 曾岚, 薛蔡, 陈建国, 蔡贵顺, 胡诗杰, 曹捷, 荣健, 董吉辉, 林为干. 超大功率二维半导体激光列阵并路自适应稳模技术[J]. 发光学报, 2007,28(6): 895-903
CAI Ran, HU Yu, ZENG Lan, XUE Cai, CHEN Jian-guo, CAI Gui-shun, HU Shi-jie, CAO Jie, RONG Jian, DONG Ji-hui, LIN Wei-gan. Self-adaption Two-control Stabilization Technology for Ultra High-power Diode Laser Arrays Phase-locking[J]. Chinese Journal of Luminescence, 2007,28(6): 895-903
蔡然, 胡渝, 曾岚, 薛蔡, 陈建国, 蔡贵顺, 胡诗杰, 曹捷, 荣健, 董吉辉, 林为干. 超大功率二维半导体激光列阵并路自适应稳模技术[J]. 发光学报, 2007,28(6): 895-903 DOI:
CAI Ran, HU Yu, ZENG Lan, XUE Cai, CHEN Jian-guo, CAI Gui-shun, HU Shi-jie, CAO Jie, RONG Jian, DONG Ji-hui, LIN Wei-gan. Self-adaption Two-control Stabilization Technology for Ultra High-power Diode Laser Arrays Phase-locking[J]. Chinese Journal of Luminescence, 2007,28(6): 895-903 DOI:
半导体列阵量子效率高
输出波长范围涵盖570~1600nm
工作寿命可达数百万小时
叠层列阵可提供超高功率激光输出
在工业、医学等很多领域具有非常广阔的应用前景.但列阵在自由运行时
各发光单元发出的光是不相干的
输出质量差
采用1/4Talbot外腔镜耦合技术
列阵实现了空间锁相最高阶超模
然而唯有基超模远场分布是中心单瓣结构
输出接近衍射极限.为得到最小谱宽、最小发散角、最大功率密度输出
必须将外腔镜倾斜β=λ/2d(λ为工作波长
d为列阵周期)
这使得仅有基超模光能成像于发光单元内而被允许振荡.应用此技术于超大功率二维半导体列阵相干锁相时
尽管冷却子系统保障了持续出光
但一段时间后
残余热效应等将导致外腔镜发生随机形变
使β漂移超过阈值使基超模失配
非基超模振荡使远场为非中心单瓣结构
极大地恶化了输出质量.可见
必须适时补偿β漂移
为此
在列阵超模选择稳定性分析基础上
研发了并路自适应稳模技术
并由置于特定结构中的传感探测光源、微透镜等构成的传感探测子系统、补偿子系统实现.试验结果显示
β漂移被及时感知补偿
基超模光稳定占优地成像于发光单元内
使输出光质量高
列阵性能被有效增进
在满足有高品质需求的应用上意义重大.
Laser diode array can operate with high quantum efficiency
output wavelength can range from 570 nm to 1600 nm
and hours of work can be even longer than mega hours.Multi-array stack of Laser Diode Arrays(LDAs) can supply ultrahigh power laser beam and are becoming widespread sources for many kinds of applications involving regions of industries
medicine etc.However
a free-running LDAs always operate on a wide bandwidth with the poor coherence
the laser beam cannot be focused to a small spot with a well-defined intensity profile
and the requirements of high quality laser applications can not be met.So external quarter-Talbot cavity is employed for phase-locking
but corresponding supermode is the out-of-phase supermode
and among all supermodes
only the far-field of the fundamental supermode is central single-lobe
the output is near diffraction-limited
the angle of divergence is the smallest
the concentration of light beam is the greatest
the laser spectrum is the narrowest
thus it is necessary for the external mirror to be tilted by an angle of β=λ/2d
here
λ is the operating wavelength
and d is the period distance
this makes feedback light from array lasing in the fundamental supermode be imaged dominantly in lasing aperture but makes the others be imaged exactly in between lasing apertures
thus only the fundamental supermode be allowed oscillating
but if the output power of a LDAs is ultra high
after it emits a short time
though there is cooling subsystem
so the LDAs can operate continuously
induced by the residual thermal radiation etc
the external mirror will be deformed stochastically to make β drift off λ/2d
with the output power increasing
the margin will up to the cri-tical value
the tilt in degree will mismatch the fundamental supermode
feedback light from array lasing in the fundamental supermode won't be imaged dominantly in lasing aperture
this result in LDAs allowing the other supermode oscillating
the far field distribution will be not single-lobe far field pattern any longer
quality of the output laser beam will be lowered severely
therefore the stability analysis of ultrahigh power LDAs phase-locking with tilted external cavity and corresponding law of change have been specially done at first
then the novel self-adaption two-control technology can be and has been specially developed
with fitting sensor detecting source
matched lens array and so forth in the specially designed structure
the sensing subsystem can effectively detect the deformation of the external mirror in time
and the mating regulating subsystem will compensate the margin concurrently
feedback light from array lasing in the fundamental supermode will be imaged dominantly in lasing aperture stably.The experiment demonstrates that working parameters of a ultra high power LDAs with tilted external cavity is stable by realizing the proposed technology
quality of the output beam from the LDAs is guaranteed high
the performance of the LDAs is improved
so the LDAs can be adequate to satisfy requirements of high quality laser applications
this is significant for ultra high power LDAs applications.
超大功率二维半导体激光列阵基超模1/4 Talbot外腔镜形变并路自适应稳模
ultra high-power laser diode arraysthe fundamental supermodeexternal quarter-Talbot cavitydeformationself-adaption two-control stabilization
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