CHU Zheng-sheng, LI Bing-sheng, LIU Yi-chun, SHEN De-zhen, FAN X W, LIU Yi-nan. High Quality ZnO Thin Films Grown by PECVD from Metal-Organic Zinc and Carbon Dioxide Mixture Gas Sources[J]. Chinese Journal of Luminescence, 2000,21(4): 383-384
CHU Zheng-sheng, LI Bing-sheng, LIU Yi-chun, SHEN De-zhen, FAN X W, LIU Yi-nan. High Quality ZnO Thin Films Grown by PECVD from Metal-Organic Zinc and Carbon Dioxide Mixture Gas Sources[J]. Chinese Journal of Luminescence, 2000,21(4): 383-384DOI:
High quality ZnO thin films were prepared by plasma enhanced chemical vapor deposition from the metal organic and carbon dioxide mixture gas sources.The wurtzite structure of ZnO thin films with a strong c axis orientation was successfully grown on the (001)Si substrate.The structure and composition were characterized by using X-ray diffraction and atomic force microscope(AFM)image.A type excition absorption line of ZnO was observed from optical transmission spectra.This method has a promise advantage in preparing high quality ZnO thin film.