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Published:05 August 2022,
Received:11 April 2022,
Revised:21 April 2022,
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赵晶晶,刘丽华,秦彬皓等.高真空磁控溅射温度对Ga2O3微观结构及光学性能的影响[J].发光学报,2022,43(08):1236-1243.
ZHAO Jing-jing,LIU Li-hua,QIN Bin-hao,et al.Effect of Sputtering Temperature on Microstructural and Optical Properties of Gallium Oxide Deposited by High-vacuum Magnetron Sputtering[J].Chinese Journal of Luminescence,2022,43(08):1236-1243.
赵晶晶,刘丽华,秦彬皓等.高真空磁控溅射温度对Ga2O3微观结构及光学性能的影响[J].发光学报,2022,43(08):1236-1243. DOI: 10.37188/CJL.20220131.
ZHAO Jing-jing,LIU Li-hua,QIN Bin-hao,et al.Effect of Sputtering Temperature on Microstructural and Optical Properties of Gallium Oxide Deposited by High-vacuum Magnetron Sputtering[J].Chinese Journal of Luminescence,2022,43(08):1236-1243. DOI: 10.37188/CJL.20220131.
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