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Research Progress in Surface Plasmon Enhanced Photodetectors
Device Fabrication and Physics | Updated：2021-07-22
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Research Progress in Surface Plasmon Enhanced Photodetectors
- Chinese Journal of Luminescence Vol.42, Issue 7, (2021)
- Affiliations：College of Physics and Optoelectronics, Taiyuan University of Technology,Taiyuan,China,030024
- Author bio：
- Funds：National Natural Science Foundation of China(61775156;61922060;61805172;61905173);Shanxi Provincial Key Research and Development Project (International Cooperation)(201803D421044);Fok Ying-tung Education Foundation for Young Teachers of Higher Education
- DOI：10.37188/CJL.20210100 CLC： TN304
Published：01 July 2021，
Received：19 March 2021，
Revised：04 April 2021，
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Cite this article
Wan-ran SU, Lin FENG, Lin-lin SHI, et al. Research Progress in Surface Plasmon Enhanced Photodetectors. [J]. Chinese Journal of Luminescence 42(7):1014-1028(2021)
Wan-ran SU, Lin FENG, Lin-lin SHI, et al. Research Progress in Surface Plasmon Enhanced Photodetectors. [J]. Chinese Journal of Luminescence 42(7):1014-1028(2021) DOI： 10.37188/CJL.20210100.
Research Progress in Surface Plasmon Enhanced Photodetectors
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"data": "photodetector"
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"data": "作为最重要的光电器件之一，光电探测器在过去的几十年中引起了人们极大的研究兴趣。它可以吸收光子并将其转化为电信号，是目标探测、光视觉、红外遥感等广泛使用的核心元件"
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"data": "1902年，罗切斯特大学Wood团队首次在金属光栅实验中观察到了异常衍射现象——在反射光谱中观察到一系列明暗条纹，这种异常现象被称为Wood异常"
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"data": "。1941年，芝加哥大学Fano团队经过研究发现Wood异常与金属和介质交界面处的电磁波共振有关"
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"name": "text",
"data": "。1957年，田纳西大学Ritchie团队研究了电子在金属薄膜中传播的能量损失，并首次提出了表面等离激元概念"
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"data": "。在过去二十年里，表面等离激元共振现象激起了研究人员的热切关注。表面等离激元模式是由金属表面振荡电荷与入射光电磁场相互作用形成的电磁波。表面等离激元模式可以在多种金属纳米结构上得到激发，例如，金属纳米颗粒"
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"data": "、金属光栅"
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"data": "和金属棱镜"
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"data": "通过将表面等离激元模式与光电探测器有机地结合在一起，半导体层的光吸收可以被增强，这是表面等离激元模式在探测器方面的主要应用之一。此外，表面等离激元增强型光电探测器不仅可以在亚波长范围内实现光捕获，而且增强的局域电场强度有利于实现电子与空穴的有效分离。在宽谱范围内，具有特殊设计的金属纳米结构能够激发表面等离激元共振，并且由于表面等离激元共振模式丰富多样，因而为实现性能优良的光电探测器提供了多种不同的设计思路。研究者们对表面等离激元光电探测器开展了一系列深入研究，本文将围绕表面等离激元对半导体吸光波段的增强效应展开综述。我们首先介绍了表面等离激元模式的基本原理，主要包括传播型表面等离激元和局域表面等离激元两种模式。接着介绍了金属光栅和金属纳米颗粒结构在改善光电探测器性能方面取得的研究进展。最后，总结全文并对表面等离激元增强型光电探测器的发展前景进行了展望。"
}
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"title": [
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"name": "text",
"data": "2 表面等离激元增强型光电探测器基本原理"
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"data": "光电探测器是能够接收和探测光辐射的器件，它能将光信号转化成电信号。当入射光能量大于半导体材料禁带宽度时，价带中的电子便会被入射光激发，越过禁带跃迁至导带，从而在价带中留下空穴，形成电子空穴对。之后，电荷被传输到达对电极，形成光电流输出电信号。在光电探测器中引入表面等离激元共振效应可以增强器件对入射光的吸收与局部电场，有益于产生更多的空穴和电子，并促进载流子向电极的传输。并且通过改变金属纳米结构的尺寸、几何形状、介电环境等可以改变表面等离激元共振波长，从而调节吸收波段。"
}
]
},
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"data": [
{
"name": "text",
"data": "表面等离激元模式沿着金属表面传播，其电场强度在垂直于金属表面的方向呈指数衰减。根据表面等离激元模式的传播长度，表面等离激元可分为两大类:传播型表面等离激元(Propagating surface polaritons,PSPPs)和局域表面等离激元(Localized surface plasmon polaritons,LSPPs)。可激发表面等离激元共振的材料应满足两个条件:(1)介电常数的实部要小于0;(2)介电常数的虚部要远小于实部的绝对值。金、银和铝等贵金属材料均能满足激发表面等离激元共振效应的条件"
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"data": "["
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"data": {
"text": "14",
"type": "bibr",
"rid": "R14",
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"data": "14"
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]
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{
"name": "text",
"data": "。在可见光和紫外光波段，由于带间的电子跃迁以及自由电子在运动过程中发生的散射，金属会产生巨大损耗。金属界面局域场增强取决于介电常数的实部，而金属的损耗则取决于介电常数的虚部。在可见光和近红外光波段，银损耗最小，是优良的表面等离激元材料。就金属损耗而言，金也是较理想的材料，并且，与银相比，金的稳定性更好。在可见光波段，铝的介电常数的虚部很大，这是因为在800 nm处，铝存在带间电子跃迁。但是，在短波紫外波段，铝的介电常数实部为负数，虚部相对较低，是极有潜力的表面等离激元材料。"
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"data": [
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"data": "在金属与电介质的交界面处被激发，并且可以沿界面传播的表面等离激元叫做传播型表面等离激元"
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"rid": "R21",
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"data": " (如"
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"text": "图1(a)",
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"data": ")。传播型表面等离激元只能被磁矢量与传播方向垂直的偏振场(TM偏振场)激发，这是由金属在光波段范围内的介电性质决定的"
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"text": "22",
"type": "bibr",
"rid": "R22",
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]
},
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"data": "。由于金属中的欧姆热效应，PSPPs的能量在界面传播过程中逐渐被损耗，只能传播有限的距离。PSPPs的传播距离可定义为电场强度减小为初始值的1/e时PSPPs沿界面传播的距离，公式为"
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"data": "(a)传播型表面等离激元原理图;(b)传播型表面等离激元色散图;(c)局域表面等离激元原理图。"
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"data": "(a)Schematic diagram of propagating surface plasmons. (b)Dispersion patterns of propagating surface plasmons. (c)Schematic diagrams of local surface plasmons."
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"data": "为金属介电常数的虚部，"
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{
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"data": "为电介质介电常数的实部。由公式(1)可知，PSPPs传播距离由其波矢的虚部决定。"
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"data": "中，PSPPs的色散曲线位于光色散曲线的右侧，即在相同入射光频率下其沿水平方向传播的波矢比真空中自由传播的光波的波矢大，因此，入射光无法在平整的金属表面结构直接激发传播型表面等离激元"
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"data": {
"text": "23",
"type": "bibr",
"rid": "R23",
"data": [
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"data": "23"
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]
},
{
"name": "text",
"data": "。金属纳米结构在产生PSPPs共振时，应满足入射光的波矢在水平方向的分量等于PSPPs的传播矢量，即要满足光子的横向动量守恒。一般可由以下几种方式激发PSPPs，例如近场激发、棱镜耦合、波导耦合和衍射光栅结构等"
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"text": "24",
"type": "bibr",
"rid": "R24",
"data": [
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"data": "24"
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]
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{
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}
]
},
{
"name": "text",
"data": "。其中，衍射光栅结构激发PSPPs共振的方式比较常用。利用衍射光栅结构改变入射光场的平面波矢量，是解决平面激发动量不匹配问题的一种方法。当频率为"
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]
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"data": "的TM入射光以入射平面与光栅矢量相平行的情形入射时，满足以下条件，即可激发PSPPs:"
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"data": "为光栅周期。一维金属光栅结构(周期纳米光栅)、二维金属光栅(二维金属孔阵列)和圆光栅均能激发PSPPs共振。"
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"data": [
{
"name": "text",
"data": "金属纳米结构与入射光相互作用引起的金属纳米结构表面的自由电子集体振荡的现象叫做局域表面等离激元"
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"data": {
"text": "25",
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"rid": "R25",
"data": [
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"data": "25"
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]
}
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"data": "，这里以金属纳米颗粒为例进行说明(如"
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"data": ")。与"
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},
{
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"data": "的激发条件相比，"
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]
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{
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"data": "的激发条件较为简单。它可以由照射在金属纳米颗粒的入射光直接激发，激发的条件是金属纳米颗粒的大小应小于入射光的波长。"
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"data": "LSPPs"
}
]
},
{
"name": "text",
"data": "是一种非传播的表面波，可以将电场局域在金属纳米颗粒表面附近，使之具有更强的场增强效果。"
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"data": "LSPPs"
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]
},
{
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"data": "只能在特定的频率下得到激发，其复频率取决于金属纳米颗粒的大小和形状，以及它的介电函数"
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"data": {
"text": "21",
"type": "bibr",
"rid": "R21",
"data": [
{
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"data": "21"
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"data": ","
},
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"data": "共振产生的过程是:金属纳米颗粒的自由电子在外部光场的驱动下发生位移，从而在位移相对的表面产生正电荷，如"
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"data": "所示"
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"data": [
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"name": "text",
"data": "["
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"data": {
"text": "28",
"type": "bibr",
"rid": "R28",
"data": [
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"data": "28"
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]
}
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{
"name": "text",
"data": "。由于正负电荷相互吸引，所以存在一个恢复力，这种现象类似电子振荡器，当入射光频率刚好等于电荷的振荡频率时，金属纳米颗粒对入射光发生共振吸收。随着金属纳米颗粒尺寸的增大，表面电荷的相对距离增大，电荷恢复力降低，"
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{
"name": "text",
"data": "共振峰红移。因此，尺寸引起的恢复力的变化影响着"
},
{
"name": "italic",
"data": [
{
"name": "text",
"data": "LSPPs"
}
]
},
{
"name": "text",
"data": "共振峰的位置。例如，"
},
{
"name": "italic",
"data": [
{
"name": "text",
"data": "Al"
}
]
},
{
"name": "text",
"data": "纳米圆盘的尺寸从70 "
},
{
"name": "italic",
"data": [
{
"name": "text",
"data": "nm"
}
]
},
{
"name": "text",
"data": "增加到130 "
},
{
"name": "italic",
"data": [
{
"name": "text",
"data": "nm"
}
]
},
{
"name": "text",
"data": "时，光谱红移"
},
{
"name": "sup",
"data": [
{
"name": "text",
"data": "["
},
{
"name": "xref",
"data": {
"text": "29",
"type": "bibr",
"rid": "R29",
"data": [
{
"name": "text",
"data": "29"
}
]
}
},
{
"name": "text",
"data": "]"
}
]
},
{
"name": "text",
"data": "。"
}
]
},
{
"name": "p",
"data": [
{
"name": "text",
"data": "金属纳米颗粒的形状越尖锐，其电荷分离的程度越强，电子振荡的恢复力越弱，共振峰位红移越显著"
},
{
"name": "sup",
"data": [
{
"name": "text",
"data": "["
},
{
"name": "xref",
"data": {
"text": "30",
"type": "bibr",
"rid": "R30",
"data": [
{
"name": "text",
"data": "30"
}
]
}
},
{
"name": "text",
"data": "]"
}
]
},
{
"name": "text",
"data": ";并且金属纳米颗粒形状的对称性决定了共振的强度"
},
{
"name": "sup",
"data": [
{
"name": "text",
"data": "["
},
{
"name": "xref",
"data": {
"text": "31",
"type": "bibr",
"rid": "R31",
"data": [
{
"name": "text",
"data": "31"
}
]
}
},
{
"name": "text",
"data": "]"
}
]
},
{
"name": "text",
"data": "。此外，金属纳米颗粒共振极化数越多，共振峰数量也越多"
},
{
"name": "sup",
"data": [
{
"name": "text",
"data": "["
},
{
"name": "xref",
"data": {
"text": "32",
"type": "bibr",
"rid": "R32",
"data": [
{
"name": "text",
"data": "32"
}
]
}
},
{
"name": "text",
"data": "]"
}
]
},
{
"name": "text",
"data": "。例如，华盛顿大学"
},
{
"name": "italic",
"data": [
{
"name": "text",
"data": "Matthew"
}
]
},
{
"name": "text",
"data": "团队研究了球形、立方体、四面体、八面体形状的"
},
{
"name": "italic",
"data": [
{
"name": "text",
"data": "Ag"
}
]
},
{
"name": "text",
"data": "纳米颗粒对局域表面等离激元共振峰的影响"
},
{
"name": "sup",
"data": [
{
"name": "text",
"data": "["
},
{
"name": "xref",
"data": {
"text": "33",
"type": "bibr",
"rid": "R33",
"data": [
{
"name": "text",
"data": "33"
}
]
}
},
{
"name": "text",
"data": "]"
}
]
},
{
"name": "text",
"data": "，发现随着"
},
{
"name": "italic",
"data": [
{
"name": "text",
"data": "Ag"
}
]
},
{
"name": "text",
"data": "纳米颗粒形状的尖锐程度增加，即球形"
},
{
"name": "italic",
"data": [
{
"name": "text",
"data": "<"
}
]
},
{
"name": "text",
"data": "立方体"
},
{
"name": "italic",
"data": [
{
"name": "text",
"data": "<"
}
]
},
{
"name": "text",
"data": "四面体"
},
{
"name": "italic",
"data": [
{
"name": "text",
"data": "<"
}
]
},
{
"name": "text",
"data": "八面体，共振峰位红移。"
}
]
},
{
"name": "p",
"data": [
{
"name": "text",
"data": "对于同一种金属纳米颗粒，可以通过改变颗粒周围的介电材料来调节其表面等离激元共振峰的位置，高折射率的周围介电材料可以得到长波长的共振峰位置。这是因为当周围介电材料的折射率增大时，介质会诱导出更多的极化电荷来抵消金属纳米颗粒表面的电荷量，从而减小内部电子振荡的库仑回复力，减小的库仑回复力使得表面等离激元共振频率降低，即"
},
{
"name": "italic",
"data": [
{
"name": "text",
"data": "LSPPs"
}
]
},
{
"name": "text",
"data": "共振峰红移。例如，北京理工大学杨晨团队探究了金纳米棒在不同介电环境下的"
},
{
"name": "italic",
"data": [
{
"name": "text",
"data": "LSPPs"
}
]
},
{
"name": "text",
"data": "共振峰峰位"
},
{
"name": "sup",
"data": [
{
"name": "text",
"data": "["
},
{
"name": "xref",
"data": {
"text": "34",
"type": "bibr",
"rid": "R34",
"data": [
{
"name": "text",
"data": "34"
}
]
}
},
{
"name": "text",
"data": "]"
}
]
},
{
"name": "text",
"data": "，他们发现，当介质折射率从1"
},
{
"name": "italic",
"data": [
{
"name": "text",
"data": "."
}
]
},
{
"name": "text",
"data": "3增加到1"
},
{
"name": "italic",
"data": [
{
"name": "text",
"data": "."
}
]
},
{
"name": "text",
"data": "4时，金纳米棒"
},
{
"name": "italic",
"data": [
{
"name": "text",
"data": "LSPPs"
}
]
},
{
"name": "text",
"data": "共振峰红移。"
}
]
},
{
"name": "p",
"data": [
{
"name": "text",
"data": "与随机分布的金属纳米颗粒相比，金属纳米颗粒阵列不仅能激发"
},
{
"name": "italic",
"data": [
{
"name": "text",
"data": "LSPPs"
}
]
},
{
"name": "text",
"data": "模式，还可通过优化阵列周期和尺寸来调节共振波长进而拓宽光谱。例如，南丹麦大学"
},
{
"name": "italic",
"data": [
{
"name": "text",
"data": "Nielsen"
}
]
},
{
"name": "text",
"data": "团队提出了用直径分别为60,80,100,120 "
},
{
"name": "italic",
"data": [
{
"name": "text",
"data": "nm"
}
]
},
{
"name": "text",
"data": "的金纳米颗粒作为一个单元，周期为400 "
},
{
"name": "italic",
"data": [
{
"name": "text",
"data": "nm"
}
]
},
{
"name": "text",
"data": "的金属纳米颗粒阵列结构修饰"
},
{
"name": "italic",
"data": [
{
"name": "text",
"data": "Si"
}
]
},
{
"name": "text",
"data": "光电探测器"
},
{
"name": "sup",
"data": [
{
"name": "text",
"data": "["
},
{
"name": "xref",
"data": {
"text": "35",
"type": "bibr",
"rid": "R35",
"data": [
{
"name": "text",
"data": "35"
}
]
}
},
{
"name": "text",
"data": "]"
}
]
},
{
"name": "text",
"data": "。由于"
},
{
"name": "italic",
"data": [
{
"name": "text",
"data": "LSPPs"
}
]
},
{
"name": "text",
"data": "共振，器件的吸收率可达到89"
},
{
"name": "italic",
"data": [
{
"name": "text",
"data": "%"
}
]
},
{
"name": "text",
"data": "。为进一步提高吸收率及调节共振峰位置， 他们通过在单元中添加小直径的颗粒来提高填充因子，从而降低反射。除此之外，可以通过增大颗粒直径并优化阵列周期，来调节共振峰的位置，实现在可见和近红外范围内的低反射。金属纳米颗粒阵列还可激发“法布里"
},
{
"name": "italic",
"data": [
{
"name": "text",
"data": "-"
}
]
},
{
"name": "text",
"data": "珀罗("
},
{
"name": "italic",
"data": [
{
"name": "text",
"data": "FP"
}
]
},
{
"name": "text",
"data": ")”腔"
},
{
"name": "italic",
"data": [
{
"name": "text",
"data": "PSPPs"
}
]
},
{
"name": "text",
"data": "模。"
},
{
"name": "italic",
"data": [
{
"name": "text",
"data": "FP-PSPPs"
}
]
},
{
"name": "text",
"data": "模式是"
},
{
"name": "italic",
"data": [
{
"name": "text",
"data": "FP"
}
]
},
{
"name": "text",
"data": "微腔模式与"
},
{
"name": "italic",
"data": [
{
"name": "text",
"data": "PSPPs"
}
]
},
{
"name": "text",
"data": "共振模式发生耦合而形成的。在金属微纳结构构成的"
},
{
"name": "italic",
"data": [
{
"name": "text",
"data": "PSPPs"
}
]
},
{
"name": "text",
"data": "微腔中，"
},
{
"name": "italic",
"data": [
{
"name": "text",
"data": "PSPPs"
}
]
},
{
"name": "text",
"data": "共振决定了金属微纳结构界面所产生的反射相位移，而反射相位移又进一步影响"
},
{
"name": "italic",
"data": [
{
"name": "text",
"data": "FP"
}
]
},
{
"name": "text",
"data": "腔共振模式的性质，故通过改变金属微纳结构的尺寸、形状、周围介质环境等，可实现对"
},
{
"name": "italic",
"data": [
{
"name": "text",
"data": "FP-PSPPs"
}
]
},
{
"name": "text",
"data": "微腔光谱响应的控制。此外，一维金属光栅和二维金属孔阵列结构也能激发"
},
{
"name": "italic",
"data": [
{
"name": "text",
"data": "LSPPs"
}
]
},
{
"name": "text",
"data": "共振。一维金属光栅可以看作是金属"
},
{
"name": "italic",
"data": [
{
"name": "text",
"data": "-"
}
]
},
{
"name": "text",
"data": "绝缘体"
},
{
"name": "italic",
"data": [
{
"name": "text",
"data": "-"
}
]
},
{
"name": "text",
"data": "金属的一个截面结构，其中，绝缘体的厚度有限小。当t"
},
{
"name": "text",
"data": ">"
},
{
"name": "text",
"data": "(λε"
},
{
"name": "sub",
"data": [
{
"name": "italic",
"data": [
{
"name": "text",
"data": "d"
}
]
}
]
},
{
"name": "text",
"data": ")("
},
{
"name": "italic",
"data": [
{
"name": "text",
"data": "π"
}
]
},
{
"name": "text",
"data": "/"
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"data": [
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"data": "其中t为厚度，"
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"data": [
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"data": "k"
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},
{
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{
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"data": "为金属介电常数的实部，"
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]
},
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{
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"data": "为电介质介电常数的实部。一维金属光栅能激发LSPPs共振，电场主要局限在金属槽内。对于二维金属孔阵列结构而言，对称性较差的金属孔阵列不仅能激发PSPPs共振，还能激发LSPPs共振。其中，LSPPs共振特性主要依赖于小孔的形状和尺寸，电场主要局限在小孔内壁中。"
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"data": "通过激发表面等离激元共振，金属光栅结构可以用来提高半导体的光吸收和器件性能"
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"data": "["
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"type": "bibr",
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}
},
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}
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"type": "bibr"
}
},
{
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}
]
},
{
"name": "text",
"data": "。根据金属光栅的结构，我们将其分为一维光栅和二维光栅，并依次对其进行综述。"
}
]
},
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"title": [
{
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],
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"data": [
{
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"data": "入射光与金属光栅相互作用产生表面等离激元共振效应，并通过亚波长孔进入基板中，金属光栅结构可以增强亚波长孔的光透射，从而提高器件对入射光的吸收，并产生更多的激子，最终提高光电探测器性能。根据一维金属光栅的形状，可分为线性光栅和圆光栅。本节我们将依次介绍不同的光栅结构对器件光吸收的影响。"
}
]
},
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"data": [
{
"name": "text",
"data": "惠灵顿维多利亚大学Masouleh团队提出了用金纳米光栅修饰砷化镓(GaAs)MSM光电探测器"
},
{
"name": "sup",
"data": [
{
"name": "text",
"data": "["
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{
"name": "xref",
"data": {
"text": "39",
"type": "bibr",
"rid": "R39",
"data": [
{
"name": "text",
"data": "39"
}
]
}
},
{
"name": "text",
"data": "]"
}
]
},
{
"name": "text",
"data": "。与传统的GaAs MSM光电探测器相比，该器件的光吸收增强效果提高了约13.5倍。根据有效介质理论，通过亚波长孔径的光透射会随着周期纳米光栅结构层间有效折射率的增大而增加"
},
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"data": [
{
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"data": "["
},
{
"name": "xref",
"data": {
"text": "40",
"type": "bibr",
"rid": "R40",
"data": [
{
"name": "text",
"data": "40"
}
]
}
},
{
"name": "text",
"data": "]"
}
]
},
{
"name": "text",
"data": "。MSM光电探测器的光吸收将随着孔径、纳米光栅数量和纳米光栅高度等参数的变化而变化。他们也研究了亚波长孔径、光栅数和光栅高度对GaAs MSM光电探测器的光吸收影响。随着亚波长孔径的增大，光吸收增强迅速减小。对于对称的表面等离激元模式，有效折射率是狭缝宽度的函数。因此，随着亚波长孔径宽度的减小，有效折射率增大，导致光吸收增强。光吸收增强随纳米光栅数"
},
{
"name": "italic",
"data": [
{
"name": "text",
"data": "N"
}
]
},
{
"name": "text",
"data": "的增加而增大，这是由于纳米光栅数目的增加提高了PSPPs的有效传播长度;当"
},
{
"name": "italic",
"data": [
{
"name": "text",
"data": "N"
}
]
},
{
"name": "text",
"data": "≥4时，对光的吸收达到饱和。这是由于PSPPs在到达亚波长孔径之前，因其传播的距离变长而会重新辐射。起初随着金纳米光栅高度的增加，光吸收增强;但是超过一定高度后，随着光栅高度的继续增加，光吸收降低。这是因为此时入射光照射激发的是LSPPs模式而不是PSPPs模式"
},
{
"name": "sup",
"data": [
{
"name": "text",
"data": "["
},
{
"name": "xref",
"data": {
"text": "41",
"type": "bibr",
"rid": "R41",
"data": [
{
"name": "text",
"data": "41"
}
]
}
},
{
"name": "text",
"data": "]"
}
]
},
{
"name": "text",
"data": "，激发模式的变化是光吸收降低的主要原因。惠灵顿维多利亚大学Masouleh团队还研究了金光栅截面的形状对MSM光电探测器光吸收的影响，如"
},
{
"name": "xref",
"data": {
"text": "图2(a)",
"type": "fig",
"rid": "F2",
"data": [
{
"name": "text",
"data": "图2(a)"
}
]
}
},
{
"name": "text",
"data": "所示"
},
{
"name": "sup",
"data": [
{
"name": "text",
"data": "["
},
{
"name": "xref",
"data": {
"text": "42",
"type": "bibr",
"rid": "R42",
"data": [
{
"name": "text",
"data": "42"
}
]
}
},
{
"name": "text",
"data": "]"
}
]
},
{
"name": "text",
"data": "。通过对比椭圆纳米光栅、矩形纳米光栅、圆锥纳米光栅，他们发现，椭圆纳米光栅可以使得器件对光的吸收提高33.6倍。这是由于非线性狭缝(椭圆纳米光栅)在收集和引导(或控制)更多光到达中心孔径方面效率最强。"
}
]
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"caption": [
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"title": [
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"data": "(a)具有矩形、三角形、梯形和椭圆纳米光栅的砷化镓(GaAs)MSM光电探测器结构图;(b)基于圆形光栅结构的光电探测器截面示意图;(c)左:围绕狭缝的圆形光栅扫描电镜图，右:围绕狭缝的圆形光栅狭缝处的电场强度。"
}
]
},
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"lang": "en",
"label": [
{
"name": "text",
"data": "Fig.2"
}
],
"title": [
{
"name": "text",
"data": "(a)Schematic illustration of metal-semiconductor-metal photodetector(MSM-PD) structure with rectangular, triangular, trapezoidal, and ellipse wall nanogratings on the metallic underlayer and semiconductor substrate(GaAs). (b)Cross section diagram of photodetector based on circular grating structure. (c)Left: scanning electron microscope image of circular grating surrounding the slit, right: electric field strength at the slot of the circular grating surrounding the slit."
}
]
}
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{
"name": "p",
"data": [
{
"name": "text",
"data": "在亚波长孔径的中心对称地镀上一层超薄金属薄膜，可以使得入射光更加有效地集中在活性层。基于此，惠灵顿维多利亚大学Masouleh团队提出了一种新型的表面等离激元增强型MSM光电探测器"
},
{
"name": "sup",
"data": [
{
"name": "text",
"data": "["
},
{
"name": "xref",
"data": {
"text": "38",
"type": "bibr",
"rid": "R38",
"data": [
{
"name": "text",
"data": "38"
}
]
}
},
{
"name": "text",
"data": "]"
}
]
},
{
"name": "text",
"data": "。该器件是在椭圆纳米金光栅基础上，将超薄金薄膜沉积在亚波长孔径中心。当亚波长狭缝两侧纳米光栅数为4、光栅高度为140 nm、宽度为40 nm，该器件光吸收增强系数约为1 330，是相同结构的裸中心狭缝的40倍。这是由于在中心孔径内制造的纳米尺度结构打破了传统衍射极限，导致在纳米量级上形成了集中的亚波长光斑，从而提高了活性区域内的光能量。"
}
]
},
{
"name": "p",
"data": [
{
"name": "text",
"data": "除了以上结构，研究者们还针对双金属光栅结构对MSM光电探测器光吸收的影响做了大量的工作。例如，韩国光州科学技术院Lysak团队提出了具有双金属光栅结构的光电探测器，该器件的光吸收增强是单金属光栅结构的1.6倍"
},
{
"name": "sup",
"data": [
{
"name": "text",
"data": "["
},
{
"name": "xref",
"data": {
"text": "43",
"type": "bibr",
"rid": "R43",
"data": [
{
"name": "text",
"data": "43"
}
]
}
},
{
"name": "text",
"data": "]"
}
]
},
{
"name": "text",
"data": "。光电探测器结构由四部分组成，即顶部金光栅、亚波长孔径、底部金光栅和衬底。这使得入射光与顶部的光栅结构耦合，然后激发表面等离激元共振并通过亚波长孔径进行透射，最后利用底部的金光栅结构耦合出来。吸收增强的改善是由于底部光栅结构的耦合作用，它将光更广泛地分布到亚波长孔径的两侧。该团队还分析了顶部、底部光栅对器件性能的影响。顶部光栅结构的所有参数对吸收增强都有影响;而底部光栅的占空比和周期对吸收增强的影响可以忽略不计，因为此时光透射只有微小的变化，只有底部光栅的厚度对光吸收增强有显著影响。"
}
]
},
{
"name": "p",
"data": [
{
"name": "text",
"data": "与线性光栅相比，圆形光栅对入射光的聚焦更有利"
},
{
"name": "sup",
"data": [
{
"name": "text",
"data": "["
},
{
"name": "blockXref",
"data": {
"data": [
{
"name": "xref",
"data": {
"text": "44",
"type": "bibr",
"rid": "R44",
"data": [
{
"name": "text",
"data": "44"
}
]
}
},
{
"name": "text",
"data": "-"
},
{
"name": "xref",
"data": {
"text": "46",
"type": "bibr",
"rid": "R46",
"data": [
{
"name": "text",
"data": "46"
}
]
}
}
],
"rid": [
"R44",
"R45",
"R46"
],
"text": "44-46",
"type": "bibr"
}
},
{
"name": "text",
"data": "]"
}
]
},
{
"name": "text",
"data": "。哥伦比亚大学Bhat团队提出了具有圆形金属光栅结构的红外光电探测器，在最优圆光栅参数下，信噪比可提高5.2倍，如"
},
{
"name": "xref",
"data": {
"text": "图2(b)",
"type": "fig",
"rid": "F2",
"data": [
{
"name": "text",
"data": "图2(b)"
}
]
}
},
{
"name": "sup",
"data": [
{
"name": "text",
"data": "["
},
{
"name": "xref",
"data": {
"text": "44",
"type": "bibr",
"rid": "R44",
"data": [
{
"name": "text",
"data": "44"
}
]
}
},
{
"name": "text",
"data": "]"
}
]
},
{
"name": "text",
"data": "。他们还研究了光栅参数对于器件的影响。首先，光栅与中心孔之间的距离对器件吸收有重要的影响，因为它影响了经光栅耦合的表面等离激元与入射光之间的相位差。其次，中心孔的直径对光吸收有影响。当孔径在0~2.4 mm之间，随着直径增加，吸收增强;当孔径大于2.4 mm，随着孔径增加，吸收急剧下降。最后，光栅周期对吸收的影响:起初，随着光栅周期"
},
{
"name": "italic",
"data": [
{
"name": "text",
"data": "N"
}
]
},
{
"name": "text",
"data": "的增加，器件吸收增强，这是由于光栅额外收集的光激发的表面等离激元增加;但是当光栅周期继续增加时，吸收降低，这是由于当额外捕获的光被再辐射达到平衡时，吸收将达到饱和点"
},
{
"name": "sup",
"data": [
{
"name": "text",
"data": "["
},
{
"name": "blockXref",
"data": {
"data": [
{
"name": "xref",
"data": {
"text": "47",
"type": "bibr",
"rid": "R47",
"data": [
{
"name": "text",
"data": "47"
}
]
}
},
{
"name": "text",
"data": "-"
},
{
"name": "xref",
"data": {
"text": "48",
"type": "bibr",
"rid": "R48",
"data": [
{
"name": "text",
"data": "48"
}
]
}
}
],
"rid": [
"R47",
"R48"
],
"text": "47-48",
"type": "bibr"
}
},
{
"name": "text",
"data": "]"
}
]
},
{
"name": "text",
"data": "。此时，表面等离激元再辐射的传播损耗占主导地位。"
}
]
},
{
"name": "p",
"data": [
{
"name": "text",
"data": "在相同的光栅参数下，与围绕中心孔的圆形光栅相比，围绕狭缝的圆形光栅具有更强的光吸收，这就意味着在保持相同的光吸收条件下，圆形光栅的直径可大大减小。南京大学任芳芳团队提出了围绕狭缝的圆形光栅结构的光电探测器，如"
},
{
"name": "xref",
"data": {
"text": "图2(c)",
"type": "fig",
"rid": "F2",
"data": [
{
"name": "text",
"data": "图2(c)"
}
]
}
},
{
"name": "sup",
"data": [
{
"name": "text",
"data": "["
},
{
"name": "xref",
"data": {
"text": "45",
"type": "bibr",
"rid": "R45",
"data": [
{
"name": "text",
"data": "45"
}
]
}
},
{
"name": "text",
"data": "]"
}
]
},
{
"name": "text",
"data": "。与围绕中心孔的圆形光栅光电探测器相比，该器件光电流提高了4.6倍，达到了4.6 nA。从"
},
{
"name": "xref",
"data": {
"text": "图2(c)",
"type": "fig",
"rid": "F2",
"data": [
{
"name": "text",
"data": "图2(c)"
}
]
}
},
{
"name": "text",
"data": "右图中可以看出狭缝圆形光栅结构性能更优越的原因是:由于铝和锗在狭缝处形成了肖特基势垒，半导体区域分布的电场强度更强，在相同参数下，更多入射光被捕获，从而产生更多的电子空穴对。所以在狭缝圆形光栅结构中，高光近场与内置电场的双重作用使得光电探测器获得了更好的性能。"
}
]
}
]
},
{
"name": "sec",
"data": [
{
"name": "sectitle",
"data": {
"title": [
{
"name": "text",
"data": "3.2 基于二维金属光栅结构的表面等离激元增强型光电探测器"
}
],
"level": "2",
"id": "s3b"
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},
{
"name": "p",
"data": [
{
"name": "text",
"data": "美国普林斯顿大学Ebbesen团队首先报道了"
}
]
},
{
"name": "p",
"data": [
{
"name": "text",
"data": "具有亚波长孔阵列的金属薄膜由于表面等离激元而表现出非凡的光透射现象"
},
{
"name": "sup",
"data": [
{
"name": "text",
"data": "["
},
{
"name": "xref",
"data": {
"text": "49",
"type": "bibr",
"rid": "R49",
"data": [
{
"name": "text",
"data": "49"
}
]
}
},
{
"name": "text",
"data": "]"
}
]
},
{
"name": "text",
"data": "，此后，基于亚波长孔阵列的二维金属光栅结构的光电探测器受到了研究者们的关注"
},
{
"name": "sup",
"data": [
{
"name": "text",
"data": "["
},
{
"name": "blockXref",
"data": {
"data": [
{
"name": "xref",
"data": {
"text": "50",
"type": "bibr",
"rid": "R50",
"data": [
{
"name": "text",
"data": "50"
}
]
}
},
{
"name": "text",
"data": "-"
},
{
"name": "xref",
"data": {
"text": "60",
"type": "bibr",
"rid": "R60",
"data": [
{
"name": "text",
"data": "60"
}
]
}
}
],
"rid": [
"R50",
"R51",
"R52",
"R53",
"R54",
"R55",
"R56",
"R57",
"R58",
"R59",
"R60"
],
"text": "50-60",
"type": "bibr"
}
},
{
"name": "text",
"data": "]"
}
]
},
{
"name": "text",
"data": "。接下来，本节将依次介绍亚波长孔阵列的大小、周期、厚度和形状等参数对光电探测器性能的影响。"
}
]
},
{
"name": "p",
"data": [
{
"name": "text",
"data": "二维金属孔阵列的大小、周期、厚度等对光电探测器性能都产生影响。西北大学吴伟团队提出用二维金圆孔阵列来增强量子阱的光吸收和改善量子阱的性能，如"
},
{
"name": "xref",
"data": {
"text": "图3(a)",
"type": "fig",
"rid": "F3",
"data": [
{
"name": "text",
"data": "图3(a)"
}
]
}
},
{
"name": "sup",
"data": [
{
"name": "text",
"data": "["
},
{
"name": "xref",
"data": {
"text": "56",
"type": "bibr",
"rid": "R56",
"data": [
{
"name": "text",
"data": "56"
}
]
}
},
{
"name": "text",
"data": "]"
}
]
},
{
"name": "text",
"data": "，器件响应率和探测率分别提高至7 A·W"
},
{
"name": "sup",
"data": [
{
"name": "text",
"data": "-1"
}
]
},
{
"name": "text",
"data": "和7.4×10"
},
{
"name": "sup",
"data": [
{
"name": "text",
"data": "10"
}
]
},
{
"name": "text",
"data": " Jone，如"
},
{
"name": "xref",
"data": {
"text": "图3(b)",
"type": "fig",
"rid": "F3",
"data": [
{
"name": "text",
"data": "图3(b)"
}
]
}
},
{
"name": "text",
"data": "。器件性能提高的机制是利用二维金圆形孔阵列结构，将入射的红外光转换成PSPPs, PSPPs可激发带间跃迁并被量子阱吸收。他们对孔阵列的周期、孔的直径、金薄膜的厚度等参数对表面等离激元共振效应的影响进行了模拟和讨论，结果表明:改变孔阵列的周期，共振峰的位置以及强度都会发生改变;改变孔的直径，共振峰的位置变化不大，强度发生改变;当金薄膜厚度超过一定值时，对PSPPs共振几乎无影响。"
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"caption": [
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"lang": "zh",
"label": [
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"name": "text",
"data": "图3"
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"title": [
{
"name": "text",
"data": "(a)二维金圆孔阵列修饰的光电探测器结构示意图;(b)圆孔和矩形孔阵列结构;(c)改变周期时的电场强度增强;(d)"
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"data": [
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"name": "text",
"data": "a"
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]
},
{
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"data": "=3.4 μm、"
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"data": "d"
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"data": " =1.4 μm的圆孔，"
},
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"data": [
{
"name": "text",
"data": "a"
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]
},
{
"name": "text",
"data": "=3.0 μm、"
},
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"data": [
{
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"data": "L"
}
]
},
{
"name": "text",
"data": "=1.3 μm的方孔和"
},
{
"name": "italic",
"data": [
{
"name": "text",
"data": "a"
}
]
},
{
"name": "text",
"data": "=3.0 μm、"
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"data": [
{
"name": "text",
"data": "L"
}
]
},
{
"name": "text",
"data": "×"
},
{
"name": "italic",
"data": [
{
"name": "text",
"data": "W"
}
]
},
{
"name": "text",
"data": "=2 μm×1 μm的矩形孔的透射光谱比较。"
}
]
},
{
"lang": "en",
"label": [
{
"name": "text",
"data": "Fig.3"
}
],
"title": [
{
"name": "text",
"data": "(a)Schematic diagram of the photodetector modified by the array of two-dimensional gold circular holes. (b)Black line is the detection rate and the red line is the response rate. (c)Structure of circular and rectangular hole arrays. (d)Transmission spectra of circular hole with"
},
{
"name": "italic",
"data": [
{
"name": "text",
"data": "a"
}
]
},
{
"name": "text",
"data": "=3.4 μm, "
},
{
"name": "italic",
"data": [
{
"name": "text",
"data": "d"
}
]
},
{
"name": "text",
"data": "=1.4 μm; square hole with "
},
{
"name": "italic",
"data": [
{
"name": "text",
"data": "a"
}
]
},
{
"name": "text",
"data": "=3.0 μm, "
},
{
"name": "italic",
"data": [
{
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"data": "L"
}
]
},
{
"name": "text",
"data": "=1.3 μm and rectangular hole with "
},
{
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"data": [
{
"name": "text",
"data": "a"
}
]
},
{
"name": "text",
"data": "=3.0 μm, "
},
{
"name": "italic",
"data": [
{
"name": "text",
"data": "L"
}
]
},
{
"name": "text",
"data": "×"
},
{
"name": "italic",
"data": [
{
"name": "text",
"data": "W"
}
]
},
{
"name": "text",
"data": "=2 μm×1 μm."
}
]
}
],
"subcaption": [],
"note": [],
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"name": "p",
"data": [
{
"name": "text",
"data": "调整二维金属光栅的形状可以扩宽光电探测器的响应范围。具有亚波长孔的二维金属薄膜透射增强与表面等离激元的伍德异常和共振激发有关。零阶透射光谱的极值位置由孔阵列的几何形状决定，其中极小值与表面等离激元的伍德异常有关"
},
{
"name": "sup",
"data": [
{
"name": "text",
"data": "["
},
{
"name": "xref",
"data": {
"text": "61",
"type": "bibr",
"rid": "R61",
"data": [
{
"name": "text",
"data": "61"
}
]
}
},
{
"name": "text",
"data": "]"
}
]
},
{
"name": "text",
"data": "，而极大值与表面等离激元共振有关"
},
{
"name": "sup",
"data": [
{
"name": "text",
"data": "["
},
{
"name": "xref",
"data": {
"text": "62",
"type": "bibr",
"rid": "R62",
"data": [
{
"name": "text",
"data": "62"
}
]
}
},
{
"name": "text",
"data": "]"
}
]
},
{
"name": "text",
"data": "。因此，二维金属光栅的几何形状影响其对光的透射。中国台湾大学Lee团队设计了3种不同形状的样品来探究不同的金属孔阵列形状对光电探测器的影响，如"
},
{
"name": "xref",
"data": {
"text": "图3(c)",
"type": "fig",
"rid": "F3",
"data": [
{
"name": "text",
"data": "图3(c)"
}
]
}
},
{
"name": "text",
"data": "所示"
},
{
"name": "sup",
"data": [
{
"name": "text",
"data": "["
},
{
"name": "xref",
"data": {
"text": "63",
"type": "bibr",
"rid": "R63",
"data": [
{
"name": "text",
"data": "63"
}
]
}
},
{
"name": "text",
"data": "]"
}
]
},
{
"name": "text",
"data": "。他们发现，矩形孔阵列的响应比圆形孔阵列的响应范围要广得多，响应峰为10.6 μm。他们还研究了不同形状影响器件响应的原因。如"
},
{
"name": "xref",
"data": {
"text": "图3(d)",
"type": "fig",
"rid": "F3",
"data": [
{
"name": "text",
"data": "图3(d)"
}
]
}
},
{
"name": "text",
"data": "所示，矩形孔阵列中孔占总面积的比例最高，所以由表面等离激元散射引起的辐射阻尼对矩形孔阵列的金属薄膜影响最大。矩形孔阵列透射峰红移到10.6 μm，并且半峰宽最宽。这是由于矩形孔长边处局域表面等离激元共振最强且有效散射长度最长达到2 μm。"
}
]
}
]
}
]
},
{
"name": "sec",
"data": [
{
"name": "sectitle",
"data": {
"title": [
{
"name": "text",
"data": "4 基于金属纳米颗粒结构的表面等离激元增强型光电探测器"
}
],
"level": "1",
"id": "s4"
}
},
{
"name": "p",
"data": [
{
"name": "text",
"data": "除了金属光栅结构，用金属纳米颗粒结构激发表面等离激元效应来提高光电探测器性能的研究也层出不穷"
},
{
"name": "sup",
"data": [
{
"name": "text",
"data": "["
},
{
"name": "blockXref",
"data": {
"data": [
{
"name": "xref",
"data": {
"text": "64",
"type": "bibr",
"rid": "R64",
"data": [
{
"name": "text",
"data": "64"
}
]
}
},
{
"name": "text",
"data": "-"
},
{
"name": "xref",
"data": {
"text": "78",
"type": "bibr",
"rid": "R78",
"data": [
{
"name": "text",
"data": "78"
}
]
}
}
],
"rid": [
"R64",
"R65",
"R66",
"R67",
"R68",
"R69",
"R70",
"R71",
"R72",
"R73",
"R74",
"R75",
"R76",
"R77",
"R78"
],
"text": "64-78",
"type": "bibr"
}
},
{
"name": "text",
"data": "]"
}
]
},
{
"name": "text",
"data": "。金属纳米颗粒结构按排列方式可分为随机分布和有序分布两种，在这一节中，我们将详细介绍用两种不同分布方式的金属纳米颗粒结构修饰的表面等离激元增强型光电探测器研究进展，并进一步说明在不同结构的器件中，其响应率、探测率和光电流等性能是如何得到提高的。"
}
]
},
{
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"data": [
{
"name": "sectitle",
"data": {
"title": [
{
"name": "text",
"data": "4.1 基于随机金属纳米颗粒结构的表面等离激元增强型光电探测器"
}
],
"level": "2",
"id": "s4a"
}
},
{
"name": "p",
"data": [
{
"name": "text",
"data": "随机金属纳米颗粒也可以与入射光耦合产生LSPPs共振，并且可以通过选择恰当的金属和改变金属纳米颗粒的形貌来提高光电探测器在特定波段的探测性能。此外，由于制作随机金属纳米颗粒的方法多样且简单(例如蒸镀法、磁控溅射法、种子介导法等)，所以基于随机金属纳米颗粒结构的表面等离激元增强型光电探测器层出不穷。"
}
]
},
{
"name": "p",
"data": [
{
"name": "text",
"data": "在紫外光波段，中国科学院长春光学精密机械与物理研究所申德振团队用磁控溅射将99.99%的Ag沉积在ZnO薄膜表面，再在450 ℃的氮气中退火20 min，制作了随机Ag NPs"
},
{
"name": "sup",
"data": [
{
"name": "text",
"data": "["
},
{
"name": "xref",
"data": {
"text": "79",
"type": "bibr",
"rid": "R79",
"data": [
{
"name": "text",
"data": "79"
}
]
}
},
{
"name": "text",
"data": "]"
}
]
},
{
"name": "text",
"data": "。用Ag NPs修饰的ZnO光电探测器利用高阶等离激元共振模式选择性地提高了紫外波段的响应率。与无Ag NPs修饰的氧化锌光电探测器相比，响应率从2.16 A·W"
},
{
"name": "sup",
"data": [
{
"name": "text",
"data": "-1"
}
]
},
{
"name": "text",
"data": "增加到2.86 A·W"
},
{
"name": "sup",
"data": [
{
"name": "text",
"data": "-1"
}
]
},
{
"name": "text",
"data": "，如"
},
{
"name": "xref",
"data": {
"text": "图4(a)",
"type": "fig",
"rid": "F4",
"data": [
{
"name": "text",
"data": "图4(a)"
}
]
}
},
{
"name": "text",
"data": "所示。响应率在380 nm左右增加明显的原因是Ag NPs在紫外波段产生的四极子等离激元共振和散射作用;而其它波段响应率明显降低的原因是Ag NPs的遮光作用导致ZnO的光吸收降低。此外，其暗电流密度从60 mA·cm"
},
{
"name": "sup",
"data": [
{
"name": "text",
"data": "-2"
}
]
},
{
"name": "text",
"data": "下降到38 mA·cm"
},
{
"name": "sup",
"data": [
{
"name": "text",
"data": "-2"
}
]
},
{
"name": "text",
"data": "。暗电流密度降低的原因是ZnO薄膜与Ag NPs之间存在的肖特基结耗尽了ZnO表面附近的载流子"
},
{
"name": "sup",
"data": [
{
"name": "text",
"data": "["
},
{
"name": "xref",
"data": {
"text": "79",
"type": "bibr",
"rid": "R79",
"data": [
{
"name": "text",
"data": "79"
}
]
}
},
{
"name": "text",
"data": "]"
}
]
},
{
"name": "text",
"data": "。"
}
]
},
{
"name": "fig",
"data": {
"id": "F4",
"caption": [
{
"lang": "zh",
"label": [
{
"name": "text",
"data": "图4"
}
],
"title": [
{
"name": "text",
"data": "(a)在2 V偏压下，CuO/ZnO和CuO/Ag/ZnO光电探测器的光谱响应;(b)金纳米棒修饰的碲化汞(HgTe)量子点(QD)光电探测器结构图;(c)二氧化硅包覆的Au纳米棒修饰的单层石墨烯/磷化铟(SLG/InP)肖特基结光电探测器。"
}
]
},
{
"lang": "en",
"label": [
{
"name": "text",
"data": "Fig.4"
}
],
"title": [
{
"name": "text",
"data": "(a)Spectral responses of CuO/ZnO and CuO/Ag/ZnO photodetectors at a bias voltage of 2 V. (b)Structure diagram of mercury telluride(HgTe) quantum dot(QD) photodetector modified with gold nanorods. (c)Structure diagram of a monolayer graphene/indium phosphide(SLG/InP) Schottky junction photodetector modified with silica-coated Au nanorods."
}
]
}
],
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"data": [
{
"name": "text",
"data": "同年，四川大学李高明团队研究了金属纳米颗粒的位置对光电探测器性能的影响。他们用柠檬酸钠溶液与硝酸银溶液进行反应得到银纳米颗粒溶液，并将银纳米颗粒溶液旋涂在ZnO薄膜上"
},
{
"name": "sup",
"data": [
{
"name": "text",
"data": "["
},
{
"name": "xref",
"data": {
"text": "80",
"type": "bibr",
"rid": "R80",
"data": [
{
"name": "text",
"data": "80"
}
]
}
},
{
"name": "text",
"data": "]"
}
]
},
{
"name": "text",
"data": "。与无金属纳米颗粒修饰的器件相比，埋入型光电探测器的响应率达到10.52 A·W"
},
{
"name": "sup",
"data": [
{
"name": "text",
"data": "-1"
}
]
},
{
"name": "text",
"data": "(提高了22.3倍)，表面型光电探测器的响应率达到51.3 A·W"
},
{
"name": "sup",
"data": [
{
"name": "text",
"data": "-1"
}
]
},
{
"name": "text",
"data": "(提高了100倍)。表面型光电探测器响应率更高的原因是:两种器件的电场主要分布在ZnO表面，位于表面的Ag NPs使得LSPPs共振在表面被激发，与埋入型器件相比，电子可以被更有效地收集起来。但是，埋入型光电探测器的暗电流较低，其原因是Ag NPs相当于较小的电阻，降低了相邻电极之间的总等效电阻，对于埋入型而言，银纳米颗粒位于ZnO层之下，电场主要分布在表面附近，这使得其降低电阻效应不如表面型明显。"
}
]
},
{
"name": "p",
"data": [
{
"name": "text",
"data": "在可见光波段，华中科技大学李露颖团队将磁控溅射的时间控制为5,8,10,15 s，之后在300 ℃下退火10 min，制备出直径为13,19,25,40 nm的Ag NPs。随着Ag NPs尺寸的增加，LSPPs的共振峰红移"
},
{
"name": "sup",
"data": [
{
"name": "text",
"data": "["
},
{
"name": "xref",
"data": {
"text": "81",
"type": "bibr",
"rid": "R81",
"data": [
{
"name": "text",
"data": "81"
}
]
}
},
{
"name": "text",
"data": "]"
}
]
},
{
"name": "text",
"data": "，吸收可从紫外光波段拓展至可见光波段。经研究发现，在入射光为610 nm时，用直径为25 nm的Ag NPs修饰的二硫化钼(MoS"
},
{
"name": "sub",
"data": [
{
"name": "text",
"data": "2"
}
]
},
{
"name": "text",
"data": ") 单分子层光电探测器，响应率达到2.97×10"
},
{
"name": "sup",
"data": [
{
"name": "text",
"data": "4"
}
]
},
{
"name": "text",
"data": " A·W"
},
{
"name": "sup",
"data": [
{
"name": "text",
"data": "-1"
}
]
},
{
"name": "text",
"data": "。合肥科技大学罗林保团队用2 A·s"
},
{
"name": "sup",
"data": [
{
"name": "text",
"data": "-1"
}
]
},
{
"name": "text",
"data": "的速度热蒸发沉积金，在Ar气中以350 ℃退火50 min制备了Au NPs修饰的碲化镉(CdTe)光电探测器"
},
{
"name": "sup",
"data": [
{
"name": "text",
"data": "["
},
{
"name": "xref",
"data": {
"text": "82",
"type": "bibr",
"rid": "R82",
"data": [
{
"name": "text",
"data": "82"
}
]
}
},
{
"name": "text",
"data": "]"
}
]
},
{
"name": "text",
"data": "。与未经修饰的CdTe光电探测器相比，经AuNPs修饰后，器件的响应率从3.6×10"
},
{
"name": "sup",
"data": [
{
"name": "text",
"data": "2"
}
]
},
{
"name": "text",
"data": " A·W"
},
{
"name": "sup",
"data": [
{
"name": "text",
"data": "-1"
}
]
},
{
"name": "text",
"data": "提高到2.26×10"
},
{
"name": "sup",
"data": [
{
"name": "text",
"data": "4"
}
]
},
{
"name": "text",
"data": " A·W"
},
{
"name": "sup",
"data": [
{
"name": "text",
"data": "-1"
}
]
},
{
"name": "text",
"data": "。响应率增强的原因有三个方面:首先，金属纳米颗粒的散射特性可以增加半导体内部的光程长度，从而有效地捕获光，使半导体中的光吸收增加;其次，LSPPs使局域场增强，促进载流子生成"
},
{
"name": "sup",
"data": [
{
"name": "text",
"data": "["
},
{
"name": "xref",
"data": {
"text": "83",
"type": "bibr",
"rid": "R83",
"data": [
{
"name": "text",
"data": "83"
}
]
}
},
{
"name": "text",
"data": "]"
}
]
},
{
"name": "text",
"data": ";最后，LSPPs的能量通过电子的直接转移从金属转移到半导体"
},
{
"name": "sup",
"data": [
{
"name": "text",
"data": "["
},
{
"name": "blockXref",
"data": {
"data": [
{
"name": "xref",
"data": {
"text": "83",
"type": "bibr",
"rid": "R83",
"data": [
{
"name": "text",
"data": "83"
}
]
}
},
{
"name": "text",
"data": "-"
},
{
"name": "xref",
"data": {
"text": "84",
"type": "bibr",
"rid": "R84",
"data": [
{
"name": "text",
"data": "84"
}
]
}
}
],
"rid": [
"R83",
"R84"
],
"text": "83-84",
"type": "bibr"
}
},
{
"name": "text",
"data": "]"
}
]
},
{
"name": "text",
"data": "。"
}
]
},
{
"name": "p",
"data": [
{
"name": "text",
"data": "合肥科技大学罗林保团队还研究了一种用溶液合成法制备的空心Au纳米壳修饰的硫化铋光电探测器"
},
{
"name": "sup",
"data": [
{
"name": "text",
"data": "["
},
{
"name": "xref",
"data": {
"text": "76",
"type": "bibr",
"rid": "R76",
"data": [
{
"name": "text",
"data": "76"
}
]
}
},
{
"name": "text",
"data": "]"
}
]
},
{
"name": "text",
"data": "。与无空心Au纳米壳修饰的硫化铋光电探测器相比，其可见光波段的响应率从1.4×10"
},
{
"name": "sup",
"data": [
{
"name": "text",
"data": "2"
}
]
},
{
"name": "text",
"data": " A·W"
},
{
"name": "sup",
"data": [
{
"name": "text",
"data": "-1"
}
]
},
{
"name": "text",
"data": "提高到1.09×10"
},
{
"name": "sup",
"data": [
{
"name": "text",
"data": "3"
}
]
},
{
"name": "text",
"data": " A·W"
},
{
"name": "sup",
"data": [
{
"name": "text",
"data": "-1"
}
]
},
{
"name": "text",
"data": "。罗林保团队探究了空心Au纳米壳对LSPPs共振的影响:一方面，空心Au纳米壳产生较强的LSPPs共振效应，这是由于在空心Au纳米壳的腔内还有一个表面，内外表面在光照条件下能够激发更强的局域表面等离激元共振，从而导致相对较大的局域场;另一方面，空心Au纳米壳的内外半径比一定时，吸收强度随直径的增大而增大，这是因为较大直径的空心Au纳米壳能够增加纳米结构内部的光程长度。基于核壳AuNPs结构的光电探测器可以在减少金材料消耗的情况下，通过调整内外半径比，使纳米颗粒表现出更佳的LSPPs共振效应，从而实现具有良好光谱选择性的高性能光电器件。"
}
]
},
{
"name": "p",
"data": [
{
"name": "text",
"data": "在红外光波段，中国香港中文大学赵铌团队研究了用种子介导法制备的Au纳米棒结构相对于光活性层的位置对碲化汞(HgTe)量子点(QD)光电探测器在红外光波段的吸收和电荷产生/输运过程的影响"
},
{
"name": "sup",
"data": [
{
"name": "text",
"data": "["
},
{
"name": "xref",
"data": {
"text": "85",
"type": "bibr",
"rid": "R85",
"data": [
{
"name": "text",
"data": "85"
}
]
}
},
{
"name": "text",
"data": "]"
}
]
},
{
"name": "text",
"data": "，如"
},
{
"name": "xref",
"data": {
"text": "图4(b)",
"type": "fig",
"rid": "F4",
"data": [
{
"name": "text",
"data": "图4(b)"
}
]
}
},
{
"name": "text",
"data": "。金纳米棒的横向LSPPs共振峰位于500 nm左右，纵向LSPPs共振峰位于900 nm左右。在该器件中，红外入射光主要被HgTe QD层和Au纳米棒吸收。一方面，由于Au纳米棒内部的电子集体共振引起局域电磁场增强，进而影响了QD层的光吸收，因此，QD层的吸收随ZnO涂层厚度的变化而变化。另一方面，Au纳米棒本身具有很强的吸收能力。在这种情况下，HgTe QD层的吸收对Au纳米棒位于活性层的相对位置依赖性非常明显。合肥科技大学罗林保团队研究了被二氧化硅(SiO"
},
{
"name": "sub",
"data": [
{
"name": "text",
"data": "2"
}
]
},
{
"name": "text",
"data": ")包覆的Au纳米棒修饰的单层石墨烯/磷化铟(SLG/InP)肖特基结光电探测器，如"
},
{
"name": "xref",
"data": {
"text": "图4(c)",
"type": "fig",
"rid": "F4",
"data": [
{
"name": "text",
"data": "图4(c)"
}
]
}
},
{
"name": "text",
"data": "。在980 nm的波长下，Au纳米棒纵横比("
},
{
"name": "italic",
"data": [
{
"name": "text",
"data": "L/W"
}
]
},
{
"name": "text",
"data": ")为5.6,SiO"
},
{
"name": "sub",
"data": [
{
"name": "text",
"data": "2"
}
]
},
{
"name": "text",
"data": "涂层厚度为40 nm 时，响应率达到了139.8 mA·"
},
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},
{
"name": "text",
"data": "。器件性能增强的原因是:(1)经修饰后，SLG/InP肖特基势垒高度从0.70 eV 提高到0.75 eV，内建电场的增强有利于空穴和电子的有效分离;(2)在980 nm光照下， Au纳米棒激发LSPPs共振，有利于光吸收增强。"
}
]
}
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"data": {
"title": [
{
"name": "text",
"data": "4.2 基于金属纳米颗粒阵列结构的表面等离激元增强型光电探测器"
}
],
"level": "2",
"id": "s4b"
}
},
{
"name": "p",
"data": [
{
"name": "text",
"data": "与随机金属纳米颗粒结构相比，金属纳米颗粒阵列可以通过AAO模板、电子束光刻技术等制作，虽然制作方法复杂且成本高，但是，金属纳米颗粒阵列应用于光电探测器中，除了能激发LSPPs模和PSPPs模，还可同时激发“法布里-珀罗”腔PSPPs模以及其他光子模式，可以更好地提高光电探测器的性能。"
}
]
},
{
"name": "p",
"data": [
{
"name": "text",
"data": "在紫外光波段，西安交通大学张晓辉团队将确定直径的AAO模板转移到金刚石基底后，利用热蒸发方式在样品表面沉积10 nm的金属薄膜，随后将样品浸泡在沸腾的丙酮溶液中去除AAO模板，从而在金刚石表面形成了确定直径的金属纳米椭球颗粒阵列，如"
},
{
"name": "xref",
"data": {
"text": "图5(a)",
"type": "fig",
"rid": "F5",
"data": [
{
"name": "text",
"data": "图5(a)"
}
]
}
},
{
"name": "text",
"data": "所示"
},
{
"name": "sup",
"data": [
{
"name": "text",
"data": "["
},
{
"name": "xref",
"data": {
"text": "86",
"type": "bibr",
"rid": "R86",
"data": [
{
"name": "text",
"data": "86"
}
]
}
},
{
"name": "text",
"data": "]"
}
]
},
{
"name": "text",
"data": "。由于金属纳米颗粒阵列与入射光耦合产生LSPPs共振，与未修饰的光电探测器相比，器件在紫外波段的响应率从6.97×10"
},
{
"name": "sup",
"data": [
{
"name": "text",
"data": "-3"
}
]
},
{
"name": "text",
"data": " A·W"
},
{
"name": "sup",
"data": [
{
"name": "text",
"data": "-1"
}
]
},
{
"name": "text",
"data": "提高到 0.13 A·W"
},
{
"name": "sup",
"data": [
{
"name": "text",
"data": "-1"
}
]
},
{
"name": "text",
"data": "。随后，他们还研究了不同直径的金属纳米颗粒阵列对器件响应率的影响。结果表明，随着金属纳米椭球尺寸的增大，偶极模式的共振峰位置发生红移，共振峰强度(较长的波长)增加。与直径为20 nm的金属椭球阵列修饰的光电探测器相比，直径为40 nm的金属椭球阵列修饰的器件的共振峰扩展至可见光范围，响应率从8.44×10"
},
{
"name": "sup",
"data": [
{
"name": "text",
"data": "-5"
}
]
},
{
"name": "text",
"data": " A·W"
},
{
"name": "sup",
"data": [
{
"name": "text",
"data": "-1"
}
]
},
{
"name": "text",
"data": "提高到1.03×10"
},
{
"name": "sup",
"data": [
{
"name": "text",
"data": "-4"
}
]
},
{
"name": "text",
"data": " A·W"
},
{
"name": "sup",
"data": [
{
"name": "text",
"data": "-1"
}
]
},
{
"name": "text",
"data": "。"
}
]
},
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"id": "F5",
"caption": [
{
"lang": "zh",
"label": [
{
"name": "text",
"data": "图5"
}
],
"title": [
{
"name": "text",
"data": "(a)纳米椭球颗粒阵列修饰的金刚石光电探测器结构图;(b)检测线偏振光或圆偏振光的光电探测器结构图;(c)Au膜-SiO"
},
{
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"data": [
{
"name": "text",
"data": "2"
}
]
},
{
"name": "text",
"data": "-Au领结阵列修饰的钙钛矿光电探测器结构图;(d)Au圆盘阵列修饰的光电探测器结构图。"
}
]
},
{
"lang": "en",
"label": [
{
"name": "text",
"data": "Fig.5"
}
],
"title": [
{
"name": "text",
"data": "(a)Structure diagram of diamond photodetector modified by nano ellipsoid particle array. (b)Structural diagram of photodetectors which can detect linearly and circularly polarized light, respectively. (c)Structure diagram of perovskite photodetector modified with Au film-SiO"
},
{
"name": "sub",
"data": [
{
"name": "text",
"data": "2"
}
]
},
{
"name": "text",
"data": "-Au bow tie array. (d)Structure diagram of photodetector modified by Au disk array."
}
]
}
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},
{
"name": "p",
"data": [
{
"name": "text",
"data": "在可见光波段，南丹麦大学Nielsen团队制作了含有4个不同直径的Au NPs作为一个单元的金属纳米颗粒阵列"
},
{
"name": "sup",
"data": [
{
"name": "text",
"data": "["
},
{
"name": "xref",
"data": {
"text": "35",
"type": "bibr",
"rid": "R35",
"data": [
{
"name": "text",
"data": "35"
}
]
}
},
{
"name": "text",
"data": "]"
}
]
},
{
"name": "text",
"data": "。由于金属纳米颗粒阵列可以激发LSPPs共振，在可见光波段范围内，用该金属纳米颗粒阵列修饰的光电探测器对入射光偏振不敏感，仅对入射角度有微弱的依赖性，吸收率为94%。通过在单元中添加小直径的颗粒提高填充因子，器件的反射率进一步降低，吸收率提高至98%。墨尔本大学Panchenko团队提出了两种可以分别检测线偏振光或圆偏振光的光电探测器，如"
},
{
"name": "xref",
"data": {
"text": "图5(b)",
"type": "fig",
"rid": "F5",
"data": [
{
"name": "text",
"data": "图5(b)"
}
]
}
},
{
"name": "text",
"data": "所示"
},
{
"name": "sup",
"data": [
{
"name": "text",
"data": "["
},
{
"name": "xref",
"data": {
"text": "87",
"type": "bibr",
"rid": "R87",
"data": [
{
"name": "text",
"data": "87"
}
]
}
},
{
"name": "text",
"data": "]"
}
]
},
{
"name": "text",
"data": "。这种探测器由金属-半导体-金属(MSM)光电二极管组成，在半导体Si上覆盖正交排列的Al纳米棒阵列的光电探测器可检测线偏振光，而在半导体Si上覆盖手性排列的Al纳米棒阵列的光电探测器可检测圆偏振光。在该结构中，金属纳米颗粒阵列与入射光耦合产生LSPPs共振，从而将入射光聚集在半导体Si处，Si吸收光产生的电子空穴对在内建电场下被分离并收集。由于金属纳米颗粒阵列的排布方式不同，这两个光电探测器会产生与偏振相关的差分电流。"
}
]
},
{
"name": "p",
"data": [
{
"name": "text",
"data": "在近红外光波段，中科院长春光机所王斌团队提出了一种由Au膜-SiO"
},
{
"name": "sub",
"data": [
{
"name": "text",
"data": "2"
}
]
},
{
"name": "text",
"data": "-Au领结阵列构成的准“法布里-珀罗”腔结构，并将其应用于钙钛矿光电探测器中，使得器件的探测波段从可见光扩宽至近红外，如"
},
{
"name": "xref",
"data": {
"text": "图5(c)",
"type": "fig",
"rid": "F5",
"data": [
{
"name": "text",
"data": "图5(c)"
}
]
}
},
{
"name": "text",
"data": "所示"
},
{
"name": "sup",
"data": [
{
"name": "text",
"data": "["
},
{
"name": "xref",
"data": {
"text": "88",
"type": "bibr",
"rid": "R88",
"data": [
{
"name": "text",
"data": "88"
}
]
}
},
{
"name": "text",
"data": "]"
}
]
},
{
"name": "text",
"data": "。在近红外波段，与未修饰的光电探测器相比，用该金属纳米颗粒阵列修饰的器件的响应率从3.9 mA·W"
},
{
"name": "sup",
"data": [
{
"name": "text",
"data": "-1"
}
]
},
{
"name": "text",
"data": "提高到 119.4 mA·W"
},
{
"name": "sup",
"data": [
{
"name": "text",
"data": "-1"
}
]
},
{
"name": "text",
"data": "。响应率提高的原因在于:由于双极、高阶LSPPs耦合和“法布里-珀罗”腔的模耦合，电场得以增强，并局限在领结间隙、边缘和外角、尖端和脊以下，进而促进了电子和空穴的产生。北京大学方哲宇团队提出了用周期为350 nm的Au NPs阵列修饰钙钛矿光电探测器"
},
{
"name": "sup",
"data": [
{
"name": "text",
"data": "["
},
{
"name": "xref",
"data": {
"text": "89",
"type": "bibr",
"rid": "R89",
"data": [
{
"name": "text",
"data": "89"
}
]
}
},
{
"name": "text",
"data": "]"
}
]
},
{
"name": "text",
"data": "。与未经修饰的光电探测器相比，用该AuNPs阵列修饰的器件在近红外波段的外量子效率提高了2.5倍，达到65%左右。外量子效率得以提高的机制在于:当阵列周期选择得当时，LSPPs共振频率和PSPPs共振频率相似，此时金属纳米颗粒阵列可激发出双共振，LSPPs和PSPPs之间的强耦合会进一步增强局域场强"
},
{
"name": "sup",
"data": [
{
"name": "text",
"data": "["
},
{
"name": "xref",
"data": {
"text": "90",
"type": "bibr",
"rid": "R90",
"data": [
{
"name": "text",
"data": "90"
}
]
}
},
{
"name": "text",
"data": "]"
}
]
},
{
"name": "text",
"data": "，促进了电子空穴对的产生。"
}
]
},
{
"name": "p",
"data": [
{
"name": "text",
"data": "在中红外光波段，中国台湾大学陈弘欣团队提出了一种窄带红外吸收表面等离激元增强型光电探测器。该器件由氢化非晶硅膜、Al"
},
{
"name": "sub",
"data": [
{
"name": "text",
"data": "2"
}
]
},
{
"name": "text",
"data": "O"
},
{
"name": "sub",
"data": [
{
"name": "text",
"data": "3"
}
]
},
{
"name": "text",
"data": "/Au衬底、Au圆盘阵列和Au叉指电极组成，如"
},
{
"name": "xref",
"data": {
"text": "图5(d)",
"type": "fig",
"rid": "F5",
"data": [
{
"name": "text",
"data": "图5(d)"
}
]
}
},
{
"name": "text",
"data": "所示"
},
{
"name": "sup",
"data": [
{
"name": "text",
"data": "["
},
{
"name": "xref",
"data": {
"text": "91",
"type": "bibr",
"rid": "R91",
"data": [
{
"name": "text",
"data": "91"
}
]
}
},
{
"name": "text",
"data": "]"
}
]
},
{
"name": "text",
"data": "。该结构的LSPPs共振峰位于4.88 mm处，并且在该波长处，约90%的入射光能被Al"
},
{
"name": "sub",
"data": [
{
"name": "text",
"data": "2"
}
]
},
{
"name": "text",
"data": "O"
},
{
"name": "sub",
"data": [
{
"name": "text",
"data": "3"
}
]
},
{
"name": "text",
"data": "/Au/Au圆盘结构吸收。"
}
]
}
]
}
]
},
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"title": [
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"data": "5 总结与展望"
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"data": [
{
"name": "text",
"data": "表面等离激元增强型光电探测器是未来集成纳米光子平台的重要组成部分，其通过表面等离激元共振效应将光压缩到亚衍射体中以增强吸收，是表面等离激元应用于光电探测器的一个重要方向。近年来，将半导体与表面等离激元材料相结合的光电探测器的性能得到了极大的提升，这激起了研究者们很大的研究兴趣。"
}
]
},
{
"name": "p",
"data": [
{
"name": "text",
"data": "本文介绍了表面等离激元增强型光电探测器的研究进展。首先，基于法布里-珀罗共振和表面等离激元共振这两种机制，基于亚波长孔结构的一维金属纳米光栅可以提高光电探测器的光吸收。此外，在亚波长孔径的中心对称地镀上一层超薄金属薄膜或者双金属光栅结构能够进一步提高器件的光吸收。基于亚波长孔阵列的二维金属光栅由于表面等离激元效应而表现出非凡的光透射现象，并且可以通过调节亚波长孔阵列的尺寸、形状等参数进一步提高器件的光吸收强度。此外，围绕中心孔的圆形光栅以及围绕狭缝的圆形光栅结构也可以提高光电探测器的光吸收。其次，我们介绍了随机分布的金属纳米颗粒和金属纳米颗粒阵列在光电探测器中的应用。银纳米颗粒的LSPPs共振峰一般位于紫外光波段，故其能提高光电探测器在紫外光波段的响应率、探测率等性能。而金纳米颗粒结构的LSPPs共振峰一般位于可见光波段，所以它能提高光电探测器在可见光波段的响应率、探测率等性能。并且，通过调节其分布方式、形状、周围介质等可协调共振峰位从而拓宽响应波段。"
}
]
},
{
"name": "p",
"data": [
{
"name": "text",
"data": "除了增强半导体层的光吸收外，表面等离激元模式还可通过辐射或非辐射产生热载流子，只要热载流子的能量高于金属和半导体接触形成的肖特基势垒高度，就能进行光电探测，从而打破半导体带隙的限制，拓宽光电探测器的响应波段，这一领域的发展前景也值得大家关注。关于该领域的研究进展我们已在另一篇文章中进行了综述"
},
{
"name": "sup",
"data": [
{
"name": "text",
"data": "["
},
{
"name": "xref",
"data": {
"text": "92",
"type": "bibr",
"rid": "R92",
"data": [
{
"name": "text",
"data": "92"
}
]
}
},
{
"name": "text",
"data": "]"
}
]
},
{
"name": "text",
"data": "。"
}
]
},
{
"name": "p",
"data": [
{
"name": "text",
"data": "此外，传统的表面等离激元材料，如金和银等，被广泛应用于光电探测器中。但是，这些贵金属材料也有一定的局限性。贵金属的熔点较低，由其制成的纳米结构在高温下容易变形。因此，贵金属不适合高温应用。为了使表面等离激元材料具有更强的场约束和高温应用能力，寻求新型的表面等离激元材料是有必要的。合金和氮化物等非金属材料已在表面等离激元增强型光电探测器中得到了应用"
},
{
"name": "sup",
"data": [
{
"name": "text",
"data": "["
},
{
"name": "blockXref",
"data": {
"data": [
{
"name": "xref",
"data": {
"text": "93",
"type": "bibr",
"rid": "R93",
"data": [
{
"name": "text",
"data": "93"
}
]
}
},
{
"name": "text",
"data": "-"
},
{
"name": "xref",
"data": {
"text": "95",
"type": "bibr",
"rid": "R95",
"data": [
{
"name": "text",
"data": "95"
}
]
}
}
],
"rid": [
"R93",
"R94",
"R95"
],
"text": "93-95",
"type": "bibr"
}
},
{
"name": "text",
"data": "]"
}
]
},
{
"name": "text",
"data": "，其相关纳米结构也值得进一步研究。"
}
]
},
{
"name": "p",
"data": [
{
"name": "text",
"data": "本文专家审稿意见及作者回复内容的下载地址:http://cjl.lightpublishing.cn/thesisDetails#10.37188/CJL.20210100."
}
]
}
]
}
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},
"response": [],
"contributions": [],
"acknowledgements": [],
"conflict": [],
"supportedby": [],
"articlemeta": {
"doi": "10.37188/CJL.20210100",
"clc": [
[
{
"name": "text",
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"dc": [
{
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"data": "A"
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"publisherid": "1000-7032(2021)07-1014-15",
"citeme": [],
"fundinggroup": [
{
"lang": "zh",
"text": [
{
"name": "text",
"data": "国家自然科学基金（61775156，61922060，61805172，61905173）；山西省重点研发（国际合作）项目（201803D421044）；霍英东教育基金会高等院校青年教师基金资助项目"
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"text": [
{
"name": "text",
"data": "Supported by National Natural Science Foundation of China (61775156, 619220600, 61805172, 61905173); Shanxi Provincial Key Research and Development Project (International Cooperation) (201803D421044); Fok Ying-tung Education Foundation for Young Teachers of Higher Education"
}
]
}
],
"history": {
"received": "2021-03-19",
"revised": "2021-04-04",
"ppub": "2021-07-01",
"opub": "2021-10-22"
},
"copyright": {
"data": [],
"year": "2021"
}
},
"appendix": [],
"type": "research-article",
"ethics": [],
"supplementary": [],
"journalTitle": "发光学报",
"issue": "07",
"volume": "42",
"originalSource": []
}
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GU Hao-shuang
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