悬空车轮形氮化镓发光二极管

朱刚毅; 仇国庆; 秦飞飞; 刘威; 袁佳磊; 施政; 王永进; 徐春祥

doi:10.37188/fgxb20204109.1146

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悬空车轮形氮化镓发光二极管

器件制备及器件物理 | 更新时间：2020-09-10

- 悬空车轮形氮化镓发光二极管
- Floating GaN Micro Wheel Light Emitting Diodes
- 发光学报 2020年41卷第9期页码：1146-1152
- 作者机构：
  
  1.南京邮电大学通信与信息工程学院, 江苏南京 210003
  2.东南大学生物电子学国家重点实验室, 江苏南京 210096
- 作者简介：
  
  [ "朱刚毅(1980-), 男, 河南洛阳人, 博士, 副教授, 硕士研究生导师, 2013年于东南大学获得博士学位, 主要从事宽禁带半导体微腔光电特性的研究。E-mail:zhugangyi@njupt.edu.cn" ]
- 基金信息：
  
  Jiangsu Province Outstanding Youth Fund;China Postdoctoral Science Foundation;Resear
- DOI：10.37188/fgxb20204109.1146
  中图分类号： TN312.8;O439
- 纸质出版日期：2020-9，
  
  收稿日期：2020-6-20，
  
  录用日期：2020-7-10
扫描看全文
朱刚毅, 仇国庆, 秦飞飞, 等. 悬空车轮形氮化镓发光二极管[J]. 发光学报, 2020,41(9):1146-1152.

Gang-yi ZHU, Guo-qing QIU, Fei-fei QIN, et al. Floating GaN Micro Wheel Light Emitting Diodes[J]. Chinese Journal of Luminescence, 2020,41(9):1146-1152.
朱刚毅, 仇国庆, 秦飞飞, 等. 悬空车轮形氮化镓发光二极管[J]. 发光学报, 2020,41(9):1146-1152. DOI： 10.37188/fgxb20204109.1146.

Gang-yi ZHU, Guo-qing QIU, Fei-fei QIN, et al. Floating GaN Micro Wheel Light Emitting Diodes[J]. Chinese Journal of Luminescence, 2020,41(9):1146-1152. DOI： 10.37188/fgxb20204109.1146.

摘要

减少器件的界面损耗从而提升其发光性能一直是发光二极管领域一个重要的研究热点。本文采用标准半导体工艺在硅衬底上制备了GaN基车轮形发光器件。采用各向同性湿法蚀刻工艺将器件悬空，比较并研究了悬空对器件的性能，包括光强、半高宽、波长漂移、3 dB带宽等的影响。由于减小了光损耗，在悬空结构中腔效应更加明显，器件的电致发光和通信性能得到了提升。本研究对电驱动光源的制备和可见光通信具有重要意义。

Abstract

Optical loss reducing and brightness improvement are always attractive issues for light emitting diodes. In this paper

GaN based micro wheel light emitting devices(LED) are fabricated on silicon substrate by standard semiconductor technology. Isotropic wet etching process is applied to suspend the device thus optimize the device performance. Electroluminescence(EL) characteristics including the spectral intensity

full width at half maximum(FWHM)

turn-on voltage and current induced wavelength shift

communication characteristics such as 3 dB bandwidth of two GaN micro wheels are studied and compared. Due to the reducing of optical loss

cavity effect is more obvious in the floating structure

and the improved EL and communication performance are obtained. The research in this paper is of great significance for the preparation of the electrically pumped light source and the visible light communication.

关键词

发光二极管氮化镓车轮形微腔3 dB带宽

Keywords

light emitting diodesGaNmicro wheel structures3 dB bandwidth

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