用于千瓦级直接半导体激光堆栈的聚焦光学系统

米庆改; 王旭葆; 肖荣诗

doi:10.3788/fgxb20183908.1107

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用于千瓦级直接半导体激光堆栈的聚焦光学系统

器件制备及器件物理 | 更新时间：2020-08-12

- 用于千瓦级直接半导体激光堆栈的聚焦光学系统
- Focus Optical System for Kilowatt-class Direct Laser Diodes Stack
- 发光学报 2018年39卷第8期页码：1107-1114
- 作者机构：
  
  北京工业大学激光工程研究院北京,100124
- 作者简介：
- 基金信息：
  
  国家重点基础研究发展计划（973）（2011CB606305）();北京市教委项目（KM201310005018）资助()
- DOI：10.3788/fgxb20183908.1107
  中图分类号： TN248.4
- 纸质出版日期：2018-8-5，
  
  网络出版日期：2018-4-2，
  
  收稿日期：2017-11-16，
  
  修回日期：2018-2-8，
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米庆改, 王旭葆, 肖荣诗. 用于千瓦级直接半导体激光堆栈的聚焦光学系统[J]. 发光学报, 2018,39(8): 1107-1114

MI Qing-gai, WANG Xu-bao, XIAO Rong-shi. Focus Optical System for Kilowatt-class Direct Laser Diodes Stack[J]. Chinese Journal of Luminescence, 2018,39(8): 1107-1114
米庆改, 王旭葆, 肖荣诗. 用于千瓦级直接半导体激光堆栈的聚焦光学系统[J]. 发光学报, 2018,39(8): 1107-1114 DOI： 10.3788/fgxb20183908.1107.

MI Qing-gai, WANG Xu-bao, XIAO Rong-shi. Focus Optical System for Kilowatt-class Direct Laser Diodes Stack[J]. Chinese Journal of Luminescence, 2018,39(8): 1107-1114 DOI： 10.3788/fgxb20183908.1107.

摘要

针对2 750 W直接大功率半导体激光堆栈输出的矩形光斑，设计了一种长焦距光学系统用于激光材料加工。首先，对整形光路进行了理论分析，利用倒置开普勒望远系统原理对慢轴光束进行扩束和准直，再利用聚焦镜实现快慢轴同步聚焦。推导出了快慢轴聚焦光斑大小的公式并计算出焦深理论值，分析了聚焦光斑大小的影响因素。接着，用ZEMAX软件模拟了LD stack光源和整个光学系统并进行了光线追迹，得到了模拟的光束变化形式及聚焦光斑尺寸。最后，进行相应的实验验证，实现了1.5 mm4.0 mm的焦点光斑，焦距250 mm，焦深18.6 mm。讨论了整个聚焦光学系统性能的优缺点以及今后的改进方向。这种聚焦方法可以得到长焦距高功率密度聚焦光斑，满足激光熔覆、表面处理等工艺对光源的要求。

Abstract

A focus optical system was designed to focus the rectangular spot of 2 750 W direct laser diodes stack for laser material processing. First

the beam transformation principle was analyzed theoretically. The invert Kepler telescope system principle was applied to expand and collimate the laser beam in the slow axis direction. The fast and slow axis beams were synchronous focused by focus lens. The formula of focus spot size in the fast and slow axis directions was deduced

and the theoretical value of focal depth was calculated. The influence factors of the focus spot size were analyzed. Second

LD stack and the whole optical system were simulated by ZEMAX software. After the ray tracing

the beam variation form and simulate focus spot were obtained. Finally

the experiment was performed

a focus spot whose size was 1.5 mm4.0 mm with 250 mm focal length

and 18.6 mm focal depth was obtained. The merit and demerit of the whole focus optical system and improve orientation in the future were discussed. This focus method could obtain long focal length and high power density focus spot

which can meet the light source requirement of laser cladding and surface treatment.

关键词

半导体激光堆栈ZEMAX光束整形光束聚焦

Keywords

LD stackZEMAXbeam shapingbeam focus

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