用粉末靶在玻璃和PI衬底上制备AZO/Ag/AZO薄膜

刘思宁; 周艳文; 沙天怡

doi:10.3788/fgxb20153611.1300

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用粉末靶在玻璃和PI衬底上制备AZO/Ag/AZO薄膜

器件制备及器件物理 | 更新时间：2020-08-12

- 用粉末靶在玻璃和PI衬底上制备AZO/Ag/AZO薄膜
- Preparation of AZO/Ag/AZO Transparent Conductive Films Deposited on Glass and Polyimide Substrates Using Powder Targets
- 发光学报 2015年36卷第11期页码：1300-1306
- 作者机构：
  
  辽宁科技大学材料与冶金学院,辽宁鞍山,114051
- 作者简介：
- 基金信息：
  
  国家自然科学基金(51172101,51372109)();辽宁省高等学校优秀人才支持计划(LR2012009)资助项目()
- DOI：10.3788/fgxb20153611.1300
  中图分类号： TM24;O484.4
- 纸质出版日期：2015-11-10，
  
  收稿日期：2015-8-4，
  
  修回日期：2015-9-24，
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刘思宁, 周艳文, 沙天怡. 用粉末靶在玻璃和PI衬底上制备AZO/Ag/AZO薄膜[J]. 发光学报, 2015,36(11): 1300-1306

LIU Si-ning, ZHOU Yan-wen, SHA Tian-yi. Preparation of AZO/Ag/AZO Transparent Conductive Films Deposited on Glass and Polyimide Substrates Using Powder Targets[J]. Chinese Journal of Luminescence, 2015,36(11): 1300-1306
刘思宁, 周艳文, 沙天怡. 用粉末靶在玻璃和PI衬底上制备AZO/Ag/AZO薄膜[J]. 发光学报, 2015,36(11): 1300-1306 DOI： 10.3788/fgxb20153611.1300.

LIU Si-ning, ZHOU Yan-wen, SHA Tian-yi. Preparation of AZO/Ag/AZO Transparent Conductive Films Deposited on Glass and Polyimide Substrates Using Powder Targets[J]. Chinese Journal of Luminescence, 2015,36(11): 1300-1306 DOI： 10.3788/fgxb20153611.1300.

摘要

室温下在玻璃和聚酰亚胺两种不同衬底上

采用射频磁控溅射法溅射掺铝氧化锌(AZO)粉末靶和固体Ag靶

制备了两组AZO/Ag/AZO 3层透明导电薄膜

研究了AZO层厚度对不同衬底3层膜结构和光电性能的影响.结果表明:不同衬底的两组AZO/Ag/AZO薄膜均为多晶膜.当Ag层厚度不变时

随着AZO层厚度的增加

两组薄膜电学性能变化不大

透射峰向长波方向移动.玻璃和PI衬底上制备的AZO(30 nm)/Ag(14 nm)/AZO(30 nm)薄膜

在550 nm处的透光率分别为85%和70%

方块电阻分别为2.6 /□和4.6 /□.

Abstract

The sandwich films composed of aluminum ions doped zinc oxide (AZO)/silver(Ag)/AZO films were prepared on polyimide (PI) and glass substrates by RF magnetron sputtering using the powder AZO target and the solid Ag target at room temperature. The effect of the thicknesses of AZO layers on the structure

optical and electrical properties of the sandwich films was investigated. The results show that the as-deposited films are polycrystalline on both PI and glass substrates. The changes of the electrical properties of the sandwich films are not obvious

and the positions of the highest transmittance shift towards the long wavelength region with the increasing of AZO thickness. When the thicknesses of the films are 30 nm of AZO and 14 nm of Ag

the sheet resistances are as low as 2.6 /□ and 4.6 /□ on glass and PI substrates

respectively. The transmittances of the films at 550 nm are 85% on glass and 70% on PI substrates.

关键词

粉末靶有机衬底多层透明导电薄膜磁控溅射

Keywords

powder targetorganic substrateTCO multilayer filmmagnetron sputtering

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