发光薄膜沉积技术中薄膜晶体管的优化设计 Optimal Design of Thin Film Transistor in Luminescent Film Deposition Technology 朱筱珂 ZHU Xiao-ke 1 first-author 梁依倩 LIANG Yi-qian 2 刘琳琳 LIU Lin-lin 2 刘仰辉 LIU Yang-hui 1 侯一曼 HOU Yi-man 1 华南理工大学 材料科学与工程学院,广东 广州,510640 华南理工大学 材料科学与工程学院,广东 广州,510640 School of Materials Science and Engineering, South China University of Technology, Guangzhou 510640, China School of Materials Science and Engineering, South China University of Technology, Guangzhou 510640, China 华南理工大学 发光材料与器件国家重点实验室, 广东 广州 510640 华南理工大学 发光材料与器件国家重点实验室, 广东 广州 510640 State Key Laboratory of Luminescence Materials and Devices, South China University of Technology, Guangzhou 510640, China State Key Laboratory of Luminescence Materials and Devices, South China University of Technology, Guangzhou 510640, China 为了能制备高均匀性、大尺寸高清RGB-OLED显示终端，发展了一种全新的、无掩膜低成本的彩色薄膜沉积技术薄膜晶体管导向的薄膜沉积技术，并研究了薄膜晶体管的宽长比及栅压对电聚合发光薄膜性能的影响，寻找最佳的制备条件。实验中采用像素尺寸大小为200 m200 m的AMOLED基板，通过TFT来控制发光薄膜在ITO像素上的电化学聚合过程。首先对不同宽长比的TFT性能进行表征，再对不同宽长比的TFT在不同栅压条件下制备的电化学聚合薄膜进行表征和分析。实验结果表明，在同一宽长比的TFT控制下，施加栅压越大，制备的薄膜越厚，发光效果越好；在不同宽长比的TFT控制下，宽长比越大，聚合薄膜越厚，发光效果越好。在较大栅压下，选择宽长比为50 m/10 m的TFT最为适宜。研究结果为电化学聚合技术在AMOLED显示中的应用奠定了良好基础。 In order to prepare high uniformity and large size high-definition RGB-OLED display terminals, we developed a new and low-cost color film deposition technology-thin film transistor(TFT) oriented film deposition technology, and studied the influence of width to length ratio of thin film transistor and gate voltage on the performance of electropolymerized luminescent film, to find the best preparation conditions. The electrochemical polymerization process of luminescent films on ITO pixels was controlled by TFT on AMOLED substrate with pixel size of 200 m200 m. Firstly, the properties of TFT with different width-length ratio were characterized, and then electrochemical polymerized films prepared with different width-length ratio under different grid pressure conditions were characterized and analyzed. The experimental results show that under the control of TFT with the same width to length ratio, the higher the gate pressure is applied, the thicker the prepared film is, and the better the luminescence effect is. Under the control of TFT with different width-length ratio, the higher the width-length ratio is, the thicker the polymer film is, and the better the luminescence effect is. TFT with a width length ratio of 50 m/10 m is the most suitable condition under large gate pressure. 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New York:John Wiley & Sons, 1981. 10.3788/fgxb20204101.0086 TP394.1;TH691.9 国家级大学生创新创业训练计划项目（201810561012）资助 Supported by National Innovation and Entrepreneurship Training Program for College Students(201810561012) 2019-08-28 2019-10-15 2019-10-18 2020-01-05 2020-08-11 1 41