Design and Simulation of Metalens for Enhanced Responsivity of Avalanche Photodetectors

CHU Guanghui; YANG Guohao; LIU Tianhong; LI Jinping; CHANG Weijie; FAN Xinye; TONG Cunzhu

doi:10.37188/CJL.20230221

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Design and Simulation of Metalens for Enhanced Responsivity of Avalanche Photodetectors

更新时间：2023-11-14

- Design and Simulation of Metalens for Enhanced Responsivity of Avalanche Photodetectors
  增强出版
- Chinese Journal of Luminescence Pages: 1-8(2023)
- 作者机构：
  
  1.聊城大学物理科学与信息工程学院，山东聊城　252059
  2.中国科学院长春光学精密机械与物理研究所，发光学及应用国家重点实验室，吉林长春　130033
  3.福州大学机械工程与自动化学院，福建福州　350108
- 作者简介：
- 基金信息：
  
  National Key R&D Program of China(2018YFB2201000);National Natural Science Foundation of China(6230030591)
- DOI：10.37188/CJL.20230221
  CLC：
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初光辉,杨国皓,刘天宏等.用于雪崩光电探测器响应度增强的超透镜设计与仿真[J].发光学报,

CHU Guanghui,YANG Guohao,LIU Tianhong,et al.Design and Simulation of Metalens for Enhanced Responsivity of Avalanche Photodetectors[J].Chinese Journal of Luminescence,
初光辉,杨国皓,刘天宏等.用于雪崩光电探测器响应度增强的超透镜设计与仿真[J].发光学报, DOI：10.37188/CJL.20230221

CHU Guanghui,YANG Guohao,LIU Tianhong,et al.Design and Simulation of Metalens for Enhanced Responsivity of Avalanche Photodetectors[J].Chinese Journal of Luminescence, DOI：10.37188/CJL.20230221

摘要

超透镜除了可以实现传统透镜的聚焦和成像功能之外，还可通过对超构单元的设计实现对光场偏振、波长和振幅等的多维度操控，由于体积薄、重量轻、成本低、易集成，其在光电子器件领域中开始崭露头角，已经成为当前的研究热点和重要方向。本文采用时域有限差分算法（Finite-Difference Time-Domain，FDTD）设计并优化了基于InGaAs雪崩探测器原位集成的超透镜，同时估算了超透镜的聚焦效率和透射率。仿真结果表明，超透镜将入射光会聚至探测器的光敏区中，透射率达到82.8%，并且在目标焦距150 μm，超透镜半径50 μm时聚焦效率达到 84.89%。为进一步提高透射率，在超透镜表面增加抗反射层（AR Layer），结果表明：300 nm的SiO,2,层透射率达到最大值86.6%，250 nm的SiN层透射率达到最大值87.6%。透射率比未增加AR层时分别增加了3.8%和4.8%。最后计算得出集成超透镜的探测器的吸收区光场能量比未集成超透镜的探测器吸收区光场能量提升了250.96倍，将极大提升探测器的响应度。本文提出了单片集成超透镜的雪崩探测器设计方案，将雪崩探测器光敏区之外的入射光会聚至光敏区，在不损失带宽前提下提升探测器的量子效率，为高响应度、带宽雪崩探测器的设计提供了新思路。

Abstract

In addition to the focusing and imaging functions， Metalens can also manipulate light field polarization， wavelength， and amplitude through kinds of meta-units. Due to the small size， light weight， low cost and easy integration， Metalens has become a research hotspot and important trend in optoelectronic integration area. In this paper， finite-difference time-domain （FDTD） algorithm is used to design and optimize Metalens based on in-situ integration of InGaAs avalanche detectors， and the focusing efficiency and transmittance of the Metalens are calculated. The simulation results show that the Metalens converges incident light into the absorption layer of detector， the transmittance reaches 82.8%， and the focusing efficiency reaches 84.89% when the target focal length is 150 μm and the Metalens radius is 50 μm. To further increase the transmittance， an AR anti-reflection layer is added. The results show that the maximum transmittance is 86.6% and 87.6% for 300 nm SiO,2 ,and 250 nm SiN. Compared with the Metalens without AR layer， the max transmittance increased by 3.8% and 4.8%， respectively. Finally， it is estimated that the energy of the light field in the absorption region integrated with Metalens is 250.96 times higher than that of the detector without Metalens， which can greatly improve the responsivity of detector. This paper proposes a monolithic integrated method for avalanche detector with Metalens， which can concentrate the energy outside the detection area into absorption area， improves the quantum efficiency of detector without bandwidth reduction. This will provide a new sight for high responsivity and high bandwidth detectors.

关键词

超透镜探测器聚焦效率量子效率

Keywords

Metalensdetectorfocusing efficiencyquantum efficiency

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