80 Gb/s High Speed PAM4 Modulated 850 nm Vertical-cavity Surface-emitting Laser

WANG Yanjing; TONG Cunzhu; LUAN Xiaoqian; JIANG Ning; TONG Haixia; WANG Lijie; TIAN Sicong; MENG Bo

doi:10.37188/CJL.20230170

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80 Gb/s High Speed PAM4 Modulated 850 nm Vertical-cavity Surface-emitting Laser

Device Fabrication and Physics | 更新时间：2023-11-01

- 80 Gb/s High Speed PAM4 Modulated 850 nm Vertical-cavity Surface-emitting Laser
  增强出版
- Chinese Journal of Luminescence Vol. 44, Issue 10, Pages: 1811-1815(2023)
- 作者机构：
  
  1.中国科学院长春光学精密机械与物理研究所发光学及应用国家重点实验室，吉林长春　130033
  2.吉光半导体科技有限公司，吉林长春　130031
- 作者简介：
- 基金信息：
  
  The K.C. Wong Education Foundation(GJTD⁃2020⁃10);The Open Fund of State Key Laboratory of High Power Semiconductor Lasers(2022⁃CCLG⁃ZDSYS⁃005)
- DOI：10.37188/CJL.20230170
  CLC： TN248.4
- Received：24 July 2023，
  
  Revised：08 August 2023，
  
  Published：05 October 2023
- 稿件说明：
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王延靖,佟存柱,栾晓倩等.80 Gb/s高速PAM4调制850 nm垂直腔面发射激光器[J].发光学报,2023,44(10):1811-1815.

WANG Yanjing,TONG Cunzhu,LUAN Xiaoqian,et al.80 Gb/s High Speed PAM4 Modulated 850 nm Vertical-cavity Surface-emitting Laser[J].Chinese Journal of Luminescence,2023,44(10):1811-1815.
王延靖,佟存柱,栾晓倩等.80 Gb/s高速PAM4调制850 nm垂直腔面发射激光器[J].发光学报,2023,44(10):1811-1815. DOI： 10.37188/CJL.20230170.

WANG Yanjing,TONG Cunzhu,LUAN Xiaoqian,et al.80 Gb/s High Speed PAM4 Modulated 850 nm Vertical-cavity Surface-emitting Laser[J].Chinese Journal of Luminescence,2023,44(10):1811-1815. DOI： 10.37188/CJL.20230170.

摘要

展示了高速直接调制850 nm氧化物限制垂直腔面发射激光器（VCSEL）的结果。优化设计应变InGaAs/AlGaAs量子阱以实现高微分增益，通过表面刻蚀来调节光子寿命实现响应平坦化。研制的氧化物孔径约7 µm的VCSEL具有平坦的频率响应，3 dB调制带宽为24 GHz，相对噪声强度值-155 dB/Hz，未采用任何预加重和均衡技术情况下PAM4调制数据传输速率达80 Gb/s。

Abstract

We present the results of a high-speed direct modulation 850 nm oxide confined vertical cavity surface emitting laser（VCSEL），optimize the design of strain InGaAs/AlGaAs quantum wells to achieve high differential gain， and adjust the photon lifetime through surface etching to achieve response flattening. The developed VCSEL with an oxide aperture of about 7 µm has a flat frequency response， a 3 dB modulation bandwidth of 24 GHz， and a relative noise intensity value of -155 dB/Hz. Without any pre-emphasis and equalization technology， the PAM4 modulation data transmission rate can reach 80 Gb/s.

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references

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