This paper proposes a strategy to successfully realize ultra-thin transparent conductive Ag thin films with excellent surface, optical, and electrical properties by introducing a silver oxide seed layer onto the surface of a glass substrate. Firstly, a 1-nm-thick Ag film is evaporated onto a glass substrate by thermal deposition and then treated with oxygen plasma to generate a silver oxide seed layer. The seed layer can alleviate the random migration of Ag atoms and improve the nucleation density of the subsequently deposited Ag atoms, thus promoting the film formation of Ag atoms. An efficient phosphorescent organic light-emitting device was fabricated using the realized ultra-thin transparent silver oxide/silver film as an anode. The device's maximum current efficiency and power efficiency are 60.4 cd·A
-1
and 63.2 lm·W
-1
, respectively, 1.45 and 1.60 times higher than those of the conventional ITO-based devices. The results show that the ultra-thin transparent Ag thin film with silver oxide as a seed layer is a highly promising transparent conductive electrode.
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