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Fabrication of GaN-based Grating by Optimized Inductively Coupled Plasma Etching
Luminescence Industry and Technology Frontier | 更新时间:2021-06-18
    • Fabrication of GaN-based Grating by Optimized Inductively Coupled Plasma Etching

    • Chinese Journal of Luminescence   Vol. 42, Issue 6, Pages: 889-895(2021)
    • DOI:10.37188/CJL.20210037    

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  • Xiao-hao GUO, Lei HU, Xiao-yu REN, et al. Fabrication of GaN-based Grating by Optimized Inductively Coupled Plasma Etching. [J]. Chinese Journal of Luminescence 42(6):889-895(2021) DOI: 10.37188/CJL.20210037.

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