Fabrication and Characteristics of MgZnO Ultraviolet Detector Based on Ag Microporous Array Structure Electrode
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Device Fabrication and Physics|更新时间:2021-02-08
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Fabrication and Characteristics of MgZnO Ultraviolet Detector Based on Ag Microporous Array Structure Electrode
Chinese Journal of LuminescenceVol. 42, Issue 2, Pages: 201-207(2021)
作者机构:
1.中国科学院长春光学精密机械与物理研究所 发光学及应用国家重点实验室, 吉林 长春 130033
2.中国科学院大学 材料科学与光电工程研究中心, 北京 100049
作者简介:
基金信息:
National Natural Science Foundation of China;National Natural Science Foundation of China;National Natural Science Foundation of China;National Natural Science Foundation of China;National Natural Science Foundation of China;National Natural Science Foundation of China;National Natural Science Foundation of China;Open Project of the State Key Laboratory of Luminescence and Applications;Open Project of the State Key Laboratory of Luminescence and Applications;Royal Society, International Exchanges 2017 Cost Share(China)
Li-yan WANG, Ke-wei LIU, Xing CHEN, et al. Fabrication and Characteristics of MgZnO Ultraviolet Detector Based on Ag Microporous Array Structure Electrode. [J]. Chinese Journal of Luminescence 42(2):201-207(2021)
DOI:
Li-yan WANG, Ke-wei LIU, Xing CHEN, et al. Fabrication and Characteristics of MgZnO Ultraviolet Detector Based on Ag Microporous Array Structure Electrode. [J]. Chinese Journal of Luminescence 42(2):201-207(2021) DOI: 10.37188/CJL.20200362.
Fabrication and Characteristics of MgZnO Ultraviolet Detector Based on Ag Microporous Array Structure Electrode
The MgZnO film was grown on the sapphire substrate by the metal organic compound chemical vapor deposition(MOCVD) method. Combined with photolithography and polystyrene(PS) microsphere template technology
the MgZnO ultraviolet detector based on the Ag microporous array electrode structure was fabricated.Compared with devices based on conventional metal film electrodes
the photocurrent of the MgZnO ultraviolet detector based on the microporous array interdigital electrode is increased by nearly 6 times
while its dark current and response time remain basically unchanged. Through the characterization of ultraviolet-visible transmission spectra and electrical properties
the mechanism of the influence of the microporous array structure Ag electrode on the UV photodetection performance of the MgZnO film was discussed. This study provides a feasible way to prepare high-performance UV detectors.
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