Fabrication and Characteristics of MgZnO Ultraviolet Detector Based on Ag Microporous Array Structure Electrode

Li-yan WANG; Ke-wei LIU; Xing CHEN; Yong-xue ZHU; Qi-chao HOU; De-zhen SHEN

doi:10.37188/CJL.20200362

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Fabrication and Characteristics of MgZnO Ultraviolet Detector Based on Ag Microporous Array Structure Electrode

Device Fabrication and Physics | 更新时间：2021-02-08

- Fabrication and Characteristics of MgZnO Ultraviolet Detector Based on Ag Microporous Array Structure Electrode
- Chinese Journal of Luminescence Vol. 42, Issue 2, Pages: 201-207(2021)
- 作者机构：
  
  1.中国科学院长春光学精密机械与物理研究所发光学及应用国家重点实验室, 吉林长春 130033
  2.中国科学院大学材料科学与光电工程研究中心, 北京 100049
- 作者简介：
- 基金信息：
  
  National Natural Science Foundation of China;National Natural Science Foundation of China;National Natural Science Foundation of China;National Natural Science Foundation of China;National Natural Science Foundation of China;National Natural Science Foundation of China;National Natural Science Foundation of China;Open Project of the State Key Laboratory of Luminescence and Applications;Open Project of the State Key Laboratory of Luminescence and Applications;Royal Society, International Exchanges 2017 Cost Share(China)
- DOI：10.37188/CJL.20200362
  CLC： O472.8;TN36
- Published：2021-2，
  
  Received：29 November 2020，
  
  Accepted：10 December 2020
扫描看全文
Li-yan WANG, Ke-wei LIU, Xing CHEN, et al. Fabrication and Characteristics of MgZnO Ultraviolet Detector Based on Ag Microporous Array Structure Electrode. [J]. Chinese Journal of Luminescence 42(2):201-207(2021)
DOI：

Li-yan WANG, Ke-wei LIU, Xing CHEN, et al. Fabrication and Characteristics of MgZnO Ultraviolet Detector Based on Ag Microporous Array Structure Electrode. [J]. Chinese Journal of Luminescence 42(2):201-207(2021) DOI： 10.37188/CJL.20200362.

摘要

通过金属有机化合物化学气相沉积(MOCVD)方法在蓝宝石衬底上生长了MgZnO薄膜，结合光刻和聚苯乙烯(PS)小球模板技术，制备了基于Ag微孔阵列电极结构的MgZnO紫外探测器。与基于常规金属薄膜电极的器件相比，基于微孔阵列叉指电极的MgZnO基紫外探测器的光电流提高近6倍，同时其暗电流和响应时间基本保持不变。通过紫外-可见透射光谱和电学性质等表征，讨论了Ag微孔阵列结构电极对MgZnO薄膜紫外光电探测性能的影响机制。本研究为制备高性能紫外探测器提供了一条可行的途径。

Abstract

The MgZnO film was grown on the sapphire substrate by the metal organic compound chemical vapor deposition(MOCVD) method. Combined with photolithography and polystyrene(PS) microsphere template technology

the MgZnO ultraviolet detector based on the Ag microporous array electrode structure was fabricated.Compared with devices based on conventional metal film electrodes

the photocurrent of the MgZnO ultraviolet detector based on the microporous array interdigital electrode is increased by nearly 6 times

while its dark current and response time remain basically unchanged. Through the characterization of ultraviolet-visible transmission spectra and electrical properties

the mechanism of the influence of the microporous array structure Ag electrode on the UV photodetection performance of the MgZnO film was discussed. This study provides a feasible way to prepare high-performance UV detectors.

关键词

MgZnO紫外探测器聚苯乙烯微孔阵列

Keywords

MgZnOultraviolet detectorpolystyrenemicroporous array

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