Fabrication of Al<sub>2</sub>O<sub>3</sub>/PMMA Laminates and Its Barrier Performance in OLED Encapsulation

Xiong-tu ZHOU; Gui-xiong CHEN; Fan SUN; Chao-xing WU; Tai-liang GUO; Yong-ai ZHANG

doi:10.37188/CJL.20200325

您当前的位置：

首页 >

文章列表页 >

Fabrication of Al₂O₃/PMMA Laminates and Its Barrier Performance in OLED Encapsulation

Luminescence Industry and Technology Frontier | 更新时间：2021-01-12

- Fabrication of Al₂O₃/PMMA Laminates and Its Barrier Performance in OLED Encapsulation
- Chinese Journal of Luminescence Vol. 42, Issue 1, Pages: 118-125(2021)
- 作者机构：
  
  1.福州大学物理与信息工程学院, 福建福州 350116
  2.中国福建光电信息科学与技术创新实验室, 福建福州 350116
- 作者简介：
- 基金信息：
  
  the National Natural Science Foundation of China;the Program for New Century Excellent Talents in Fujian Province University
- DOI：10.37188/CJL.20200325
  CLC：
扫描看全文
Xiong-tu ZHOU, Gui-xiong CHEN, Fan SUN, et al. Fabrication of Al₂O₃/PMMA Laminates and Its Barrier Performance in OLED Encapsulation. [J]. Chinese Journal of Luminescence 42(1):118-125(2021)
DOI：

Xiong-tu ZHOU, Gui-xiong CHEN, Fan SUN, et al. Fabrication of Al₂O₃/PMMA Laminates and Its Barrier Performance in OLED Encapsulation. [J]. Chinese Journal of Luminescence 42(1):118-125(2021) DOI： 10.37188/CJL.20200325.

摘要

可靠的薄膜封装对提高有机发光二极管（Organic light-emitting diode，OLED）器件寿命至关重要。本文采用原子层沉积实现了致密Al,2,O,3,薄膜的低温制备，并研究了喷墨打印PMMA墨水在Al,2,O,3,薄膜的均匀成膜以及Al,2,O,3,/PMMA交叠薄膜的水汽阻隔性能。实验结果表明，当打印分辨率为300 DPI时，PMMA墨水在Al,2,O,3,薄膜表面均匀成膜，Al,2,O,3,/PMMA交叠薄膜具有良好的水汽阻隔性能和光学透过率。钙膜电学测试结果显示，3对Al,2,O,3,/PMMA薄膜的水汽透过率低至8.34×10,-5, g/（m,2,·d），而光学透光率在可见光范围内高于95%，表现出良好的OLED器件薄膜封装性能。

Abstract

Reliable thin film encapsulation is of great importance in the development of organic light emitting diodes(OLED). In this work, dense Al,2,O,3, thin films were achieved using atomic layer deposition(ALD) under low temperature of 90℃, and ink-jet printing(IJP) was applied to deposit PMMA thin films on the surface of Al,2,O,3, thin films with different resolutions in terms of dots per inch(DPI). It was found that Al,2,O,3,/PMMA laminates exhibited good barrier performance and optical transmittance. The water vapor transmission rate(WVTR) of the 3 dyads Al,2,O,3,/PMMA laminates showed WVTR of 8.34×10 ,-5, g/(m,2,·d). Besides, the optical transmittance of the thin films was higher than 95% in the visible wavelength, exhibiting good barrier and optical performances in OLED encapsulation.

关键词

薄膜封装原子层沉积喷墨打印水汽透过率OLED

Keywords

thin film encapsulationatomic layer depositionink-jet printingwater vapor transmission rateOLED

references

LIU Y F, FENG J, BI Y G, et al.. Recent developments in flexible organic light-emitting devices[J].Adv. Mater. Technol., 2019, 4(1):1800371-1-19.

YOON K H, KIM H S, HAN K S, et al.. Extremely high barrier performance of organic-inorganic nanolaminated thin films for organic light-emitting diodes[J].ACS Appl. Mater. Interfaces, 2017, 9(6):5399-5408.

FUKAGAWA H, SASAKI T, TSUZUKI T, et al.. Long-lived flexible displays employing efficient and stable inverted organic light-emitting diodes[J].Adv. Mater., 2018, 30(28):1706768-1-7.

LEE S M, KWON J H, KWON S, et al.. A review of flexible OLEDs toward highly durable unusual displays[J].IEEE Trans. Electron Dev., 2017, 64(5):1922-1931.

HOFFMANN L, THEIRICH D, PACK S, et al.. Gas diffusion barriers prepared by spatial atmospheric pressure plasma enhanced ALD[J].ACS Appl. Mater. Interfaces, 2017, 9(4):4171-4176.

YU D, YANG Y Q, CHEN Z, et al.. Recent progress on thin-film encapsulation technologies for organic electronic devices[J].Opt. Commun., 2016, 362:43-49.

KANG D J, PARK G U, PARK H Y, et al.. A high-performance transparent moisture barrier using surface-modified nanoclay composite for OLED encapsulation[J].Prog. Org. Coat., 2018, 118:66-71.

SUN F B, DUAN Y, YANG Y Q, et al.. Fabrication of tunable[Al2O3:alucone] thin-film encapsulations for top-emitting organic light-emitting diodes with high performance optical and barrier properties[J].Org. Electron., 2014, 15(10):2546-2552.

HAN P, LAI T C, WANG M, et al.. Outstanding memory characteristics with atomic layer deposited Ta2O5/Al2O3/TiO2/Al2O3/Ta2O5 nanocomposite structures as the charge trapping layer[J].Appl. Surf. Sci., 2019, 467-648:423-427.

OH J, SHIN S, PARK J, et al.. Characteristics of Al2O3/ZrO2 laminated films deposited by ozone-based atomic layer deposition for organic device encapsulation[J].Thin Solid Films, 2016, 599:119-124.

WENG Y L, CHEN G X, ZHOU X T, et al.. Design and fabrication of bi-functional TiO2/Al2O3 nanolaminates with selected light extraction and reliable moisture vapor barrier performance[J].Nanotechnology, 2019, 30(8):085702.

KIM B J, PARK H, SEONG H, et al.. A single-chamber system of initiated chemical vapor deposition and atomic layer deposition for fabrication of organic/inorganic multilayer films[J].Adv. Eng. Mater., 2017, 19(6):1600819.

WU J, FEI F, WEI C T, et al.. Efficient multi-barrier thin film encapsulation of OLED using alternating Al2O3 and polymer layers[J].RSC Adv., 2018, 8(11):5721-5727.

LEE L, YOON K H, JUNG J W, et al.. Ultra gas-proof polymer hybrid thin layer[J].Nano Lett., 2018, 18(9):5461-5466.

LEE B H, YOON B, ANDERSON V R, et al.. Alucone alloys with tunable properties using alucone molecular layer deposition and Al2O3 atomic layer deposition[J].J. Phys. Chem. C, 2012, 116(5):3250-3257.

WANG X, DUAN Y H, CHEN Z, et al.. A flexible transparent gas barrier film employing the method of mixing ALD/MLD-grown Al2O3 and alucone layers[J].Nanoscale Res. Lett., 2015, 10:130-1-7.

ZHAN Z Y, AN J N, WEI Y F, et al.. Inkjet-printed optoelectronics[J].Nanoscale, 2017, 9(3):965-993.

VAN DE WEIJER P, AKKERMAN H B, BOUTEN P C P, et al.. Side leakage into the organic interlayer of unstructured hybrid thin-film encapsulation stacks and lifetime implications for roll-to-roll produced organic light-emitting diodes[J].Org. Electron., 2018, 53:256-264.

CHEN G X, WENG Y L, SUN F, et al.. Low-temperature atomic layer deposition of Al2O3/Alucone nanolaminates for OLED encapsulation[J].RSC Adv., 2019, 9(36):20884-20891.

KOROTKOV R Y, GOFF T, RICOU P. Fluorination of polymethylmethacrylate with SF6 and hexafluoropropylene using dielectric barrier discharge system at atmospheric pressure[J].Surf. Coat. Technol., 2007, 201(16-17):7207-7215.

GROVER R, SRIVASTAVA R, KAMALASANAN M N, et al.. Multilayer thin film encapsulation for organic light emitting diodes[J].RSC Adv., 2014, 4(21):10808-10814.

CHOI D W, YOO M, LEE H M, et al.. A study on the growth behavior and stability of molecular layer deposited alucone films using diethylene glycol and trimethyl aluminum precursors, and the enhancement of diffusion barrier properties by atomic layer deposited Al2O3 capping[J].ACS Appl. Mater. Interfaces, 2016, 8(19):12263-12271.

PARK E K, KIM S, HEO J, et al.. Electrical evaluation of crack generation in SiNx and SiOxNy thin-film encapsulation layers for OLED displays[J].Appl. Surf. Sci., 2016, 370:126-130.

KWON J H, JEONG E G, JEON Y, et al.. Design of highly water resistant, impermeable, and flexible thin-film encapsulation based on inorganic/organic hybrid layers[J].ACS Appl. Mater. Interfaces, 2019, 11(3):3251-3261.

Views

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Thin-film Encapsulation of Organic Light Emitting Diode by Atomic Layer Deposition

Test Method and System of Water Vapor Transmission Rate Based on Al₂O₃ Encapsulated Thin-film for OLEDs

Encapsulation of Quantum-dot Color Conversion Films Based on Atomic Layer Deposition

Constructing Efficient and Stable Perovskite Solar Cells by Adjusting Atomic-layer-deposited SnO_x Layer via Oxygen Sources

Related Author

No data

Related Institution

College of Physics and Information Engineering， Fuzhou University

State Key Laboratory of Integrated Optoelectronics， College of Electronic Science and Engineering， Jilin University

School of Electronic Engineering， Changchun College of Electronic Technology

School of Mechatronics and Automation, Shanghai University

Key Laboratories of Advanced Display and System Application (Shanghai University), Ministry of Education

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176862 Email：fgxbt@126.com
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰

Fabrication of Al2O3/PMMA Laminates and Its Barrier Performance in OLED Encapsulation

DOI：10.37188/CJL.20200325

摘要

Abstract

关键词

Keywords

references

Fabrication of Al₂O₃/PMMA Laminates and Its Barrier Performance in OLED Encapsulation