Xiong-tu ZHOU, Gui-xiong CHEN, Fan SUN, et al. Fabrication of Al2O3/PMMA Laminates and Its Barrier Performance in OLED Encapsulation. [J]. Chinese Journal of Luminescence 42(1):118-125(2021)
DOI:
Xiong-tu ZHOU, Gui-xiong CHEN, Fan SUN, et al. Fabrication of Al2O3/PMMA Laminates and Its Barrier Performance in OLED Encapsulation. [J]. Chinese Journal of Luminescence 42(1):118-125(2021) DOI: 10.37188/CJL.20200325.
Fabrication of Al2O3/PMMA Laminates and Its Barrier Performance in OLED Encapsulation
Reliable thin film encapsulation is of great importance in the development of organic light emitting diodes(OLED). In this work
dense Al
2
O
3
thin films were achieved using atomic layer deposition(ALD) under low temperature of 90℃
and ink-jet printing(IJP) was applied to deposit PMMA thin films on the surface of Al
2
O
3
thin films with different resolutions in terms of dots per inch(DPI). It was found that Al
2
O
3
/PMMA laminates exhibited good barrier performance and optical transmittance. The water vapor transmission rate(WVTR) of the 3 dyads Al
2
O
3
/PMMA laminates showed WVTR of 8.34×10
-5
g/(m
2
·d). Besides
the optical transmittance of the thin films was higher than 95% in the visible wavelength
exhibiting good barrier and optical performances in OLED encapsulation.
关键词
薄膜封装原子层沉积喷墨打印水汽透过率OLED
Keywords
thin film encapsulationatomic layer depositionink-jet printingwater vapor transmission rateOLED
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