Fabrication of Al<sub>2</sub>O<sub>3</sub>/PMMA Laminates and Its Barrier Performance in OLED Encapsulation

Xiong-tu ZHOU; Gui-xiong CHEN; Fan SUN; Chao-xing WU; Tai-liang GUO; Yong-ai ZHANG

doi:10.37188/CJL.20200325

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Fabrication of Al₂O₃/PMMA Laminates and Its Barrier Performance in OLED Encapsulation

Luminescence Industry and Technology Frontier | 更新时间：2021-01-12

- Fabrication of Al₂O₃/PMMA Laminates and Its Barrier Performance in OLED Encapsulation
- Chinese Journal of Luminescence Vol. 42, Issue 1, Pages: 118-125(2021)
- 作者机构：
  
  1.福州大学物理与信息工程学院, 福建福州 350116
  2.中国福建光电信息科学与技术创新实验室, 福建福州 350116
- 作者简介：
- 基金信息：
  
  the National Natural Science Foundation of China;the Program for New Century Excellent Talents in Fujian Province University
- DOI：10.37188/CJL.20200325
  CLC： TN383;TN873
- Received：28 October 2020，
  
  Accepted：2020-11-19，
  
  Published：2021-01
- 稿件说明：
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Xiong-tu ZHOU, Gui-xiong CHEN, Fan SUN, et al. Fabrication of Al₂O₃/PMMA Laminates and Its Barrier Performance in OLED Encapsulation[J]. Chinese journal of luminescence, 2021, 42(1): 118-125.
DOI：

Xiong-tu ZHOU, Gui-xiong CHEN, Fan SUN, et al. Fabrication of Al₂O₃/PMMA Laminates and Its Barrier Performance in OLED Encapsulation[J]. Chinese journal of luminescence, 2021, 42(1): 118-125. DOI： 10.37188/CJL.20200325.

摘要

可靠的薄膜封装对提高有机发光二极管（Organic light-emitting diode，OLED）器件寿命至关重要。本文采用原子层沉积实现了致密Al

薄膜的低温制备，并研究了喷墨打印PMMA墨水在Al

薄膜的均匀成膜以及Al

/PMMA交叠薄膜的水汽阻隔性能。实验结果表明，当打印分辨率为300 DPI时，PMMA墨水在Al

薄膜表面均匀成膜，Al

/PMMA交叠薄膜具有良好的水汽阻隔性能和光学透过率。钙膜电学测试结果显示，3对Al

/PMMA薄膜的水汽透过率低至8.34×10

-5

g/（m

·d），而光学透光率在可见光范围内高于95%，表现出良好的OLED器件薄膜封装性能。

Abstract

Reliable thin film encapsulation is of great importance in the development of organic light emitting diodes(OLED). In this work

dense Al

thin films were achieved using atomic layer deposition(ALD) under low temperature of 90℃

and ink-jet printing(IJP) was applied to deposit PMMA thin films on the surface of Al

thin films with different resolutions in terms of dots per inch(DPI). It was found that Al

/PMMA laminates exhibited good barrier performance and optical transmittance. The water vapor transmission rate(WVTR) of the 3 dyads Al

/PMMA laminates showed WVTR of 8.34×10

-5

g/(m

·d). Besides

the optical transmittance of the thin films was higher than 95% in the visible wavelength

exhibiting good barrier and optical performances in OLED encapsulation.

关键词

Keywords

references

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Related Author

Xiong-tu ZHOU

Gui-xiong CHEN

Fan SUN

Chao-xing WU

Tai-liang GUO

Yongai ZHANG

LIU Chun-yan

WANG Yuan

Related Institution

College of Physics and Information Engineering， Fuzhou University

School of Electronic Engineering， Changchun College of Electronic Technology

State Key Laboratory of Integrated Optoelectronics， College of Electronic Science and Engineering， Jilin University

School of Mechatronics and Automation, Shanghai University

Key Laboratories of Advanced Display and System Application (Shanghai University), Ministry of Education

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Fabrication of Al2O3/PMMA Laminates and Its Barrier Performance in OLED Encapsulation

DOI：10.37188/CJL.20200325

摘要

Abstract

关键词

Keywords

references

Fabrication of Al₂O₃/PMMA Laminates and Its Barrier Performance in OLED Encapsulation