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AlUMINUM NITRIDE THIN FILM PREPARED BY RADIO FREQUENCY MAGNETRON SPUTTERING
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    • AlUMINUM NITRIDE THIN FILM PREPARED BY RADIO FREQUENCY MAGNETRON SPUTTERING

    • Chinese Journal of Luminescence   Vol. 20, Issue 2, Pages: 165-169(1999)

    • Received：13 July 1998，

      Published：30 May 1999

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  • Zhao Yanli, Zhong Guozhu, Fan Xiwu, Li Changhua. AlUMINUM NITRIDE THIN FILM PREPARED BY RADIO FREQUENCY MAGNETRON SPUTTERING[J]. Chinese Journal of Luminescence, 1999,20(2): 165-169 DOI：

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