基于周期性电极的窄条单纵模674 nm半导体激光器

单肖宁; 张晶; 韩金樑; 张万里; 单肖楠

doi:10.3788/fgxb20194011.1428

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基于周期性电极的窄条单纵模674 nm半导体激光器

器件制备及器件物理 | 更新时间：2020-08-12

- 基于周期性电极的窄条单纵模674 nm半导体激光器
- Narrow-strip Single-longitudinal-mode 674 nm Laser Based on Periodic Anodes
- 发光学报 2019年40卷第11期页码：1428-1433
- 作者机构：
  
  1. 长春理工大学理学院,吉林长春,130021
  2. 长春理工大学外国语学院,吉林长春,130022
  3. 吉林省长光瑞思激光技术有限公司, 吉林长春 130033
- 作者简介：
- 基金信息：
  
  国家重点研究计划（2017YFB0405102）资助项目
- DOI：10.3788/fgxb20194011.1428
  中图分类号： TN248
- 收稿日期：2019-06-02，
  
  修回日期：2019-07-02，
  
  网络出版日期：2019-07-09，
  
  纸质出版日期：2019-11-05
- 稿件说明：
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单肖宁, 张晶, 韩金樑等. 基于周期性电极的窄条单纵模674 nm半导体激光器[J]. 发光学报, 2019,40(11): 1428-1433

SHAN Xiao-ning, ZHANG Jing, HAN Jin-liang etc. Narrow-strip Single-longitudinal-mode 674 nm Laser Based on Periodic Anodes[J]. Chinese Journal of Luminescence, 2019,40(11): 1428-1433
单肖宁, 张晶, 韩金樑等. 基于周期性电极的窄条单纵模674 nm半导体激光器[J]. 发光学报, 2019,40(11): 1428-1433 DOI： 10.3788/fgxb20194011.1428.

SHAN Xiao-ning, ZHANG Jing, HAN Jin-liang etc. Narrow-strip Single-longitudinal-mode 674 nm Laser Based on Periodic Anodes[J]. Chinese Journal of Luminescence, 2019,40(11): 1428-1433 DOI： 10.3788/fgxb20194011.1428.

摘要

报道了中心波长在674 nm的周期性电极窄条形单纵模半导体激光器。其制作工艺简单，仅使用i线光刻技术和普通的刻蚀技术制作的周期性沟槽与周期性电极结构即保证了器件工作在增益耦合机制下，进而实现单纵模激光输出。当注入电流为85 mA、测试温度18℃时，激光器的输出功率为2.603 mW。当注入电流为60 mA时，在不同测试温度下，器件均保持单纵模工作。当室温为16℃时，测得器件的光谱线宽可达到2.42 pm，边模抑制比为47 dB。由于该器件制作成本低，性能优良，可广泛应用于实际生产中。

Abstract

A narrow-strip single-longitudinal-mode semiconductor laser based on periodic anodes with a central wavelength of approximately 674 nm is demonstrated. The manufacturing process is simple

the periodic trenches and periodic electrode structures fabricated only using i-line lithography and conventional etching techniques

which ensures that the device operates under a gain coupling mechanism

thereby enabling the output of a single longitudinal mode laser. When the injection current is 85 mA and the test temperature is 18℃

the output power of the laser is 2.603 mW. When the injection current is 60 mA

the device maintains a single longitudinal mode operation at different test temperatures. When the room temperature is 16℃

the measured spectral linewidth of the device can reach 2.42 pm

and the side mode suppression ratio is 47 dB. Owing to the low-cost fabrication methods and good performances

our single-longitudinal-mode devices can be used for widespread practical applications.

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references

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