纳米压印制备的光子晶体结构对AlGaN基材料深紫外出光效率的提高

蔡钧安; 秦志新

doi:10.3788/fgxb20143508.0998

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纳米压印制备的光子晶体结构对AlGaN基材料深紫外出光效率的提高

器件制备及器件物理 | 更新时间：2020-08-12

- 纳米压印制备的光子晶体结构对AlGaN基材料深紫外出光效率的提高
- Enhancement of Deep-UV Light Extraction Efficiency from Bulk AlGaN with Photonic Crystals Fabricated by Nanoimprint Lithography
- 发光学报 2014年35卷第8期页码：998-1002
- 作者机构：
  
  北京大学物理学院人工微结构和介观物理国家重点实验室北京,100871
- 作者简介：
- 基金信息：
  
  国家重点基础研究发展计划（2012CB619301）();国家高技术研究发展计划（2014AA032608）资助项目()
- DOI：10.3788/fgxb20143508.0998
  中图分类号： TN303;TN304
- 收稿日期：2014-04-13，
  
  修回日期：2014-05-22，
  
  网络出版日期：2014-04-18，
  
  纸质出版日期：2014-08-03
- 稿件说明：
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蔡钧安, 秦志新,. 纳米压印制备的光子晶体结构对AlGaN基材料深紫外出光效率的提高[J]. 发光学报, 2014,35(8): 998-1002

CAI Jun-an, QIN Zhi-xin,. Enhancement of Deep-UV Light Extraction Efficiency from Bulk AlGaN with Photonic Crystals Fabricated by Nanoimprint Lithography[J]. Chinese Journal of Luminescence, 2014,35(8): 998-1002
蔡钧安, 秦志新,. 纳米压印制备的光子晶体结构对AlGaN基材料深紫外出光效率的提高[J]. 发光学报, 2014,35(8): 998-1002 DOI： 10.3788/fgxb20143508.0998.

CAI Jun-an, QIN Zhi-xin,. Enhancement of Deep-UV Light Extraction Efficiency from Bulk AlGaN with Photonic Crystals Fabricated by Nanoimprint Lithography[J]. Chinese Journal of Luminescence, 2014,35(8): 998-1002 DOI： 10.3788/fgxb20143508.0998.

摘要

通过利用阳极氧化铝的方法制备高度有序的光子晶体结构作为纳米压印模板，将大面积光子晶体图案转移到了样品表面，解决了国际上小尺寸光子晶体制备困难的问题。采用纳米压印的方法在AlGaN基样品表面上制备了290 nm的周期光子晶体结构，并将表面具有光子晶体结构的AlGaN基样品正面出光强度提高121%。偏振特性的实验结果表明六角排列的孔状光子晶体将原来朝向样品侧面传播的TE偏振光偏折转向正面，从而增加光抽取效率，改变出光偏振度。指出远场角分辨图案的变化归因于光子晶体对出光的衍射和Bragg散射效果。实验中采用的创新性工艺可以用来制备具有高出光效率的深紫外发光二极管。

Abstract

Photonic crystal structures of 290 nm period were fabricated on the surface of AlGaN layer by nanoimprint lithography. Highly ordered porous anodic aluminum oxide was adopted as a convenient approach for large area of PhC pattern transferred. In contrast to a planar sample

both intensity and radiation profile of surface emission from AlGaN materials with PhCs structures were improved significantly. Honeycomb PhC structures deflected the original in-plane vector of TE guided light. The modified radiation profile was attributed to the diffraction and Bragg scattering effects of PhCs. The results would be helpful to enhancing surfacing emission and ameliorate polarization properties of deep-UV LEDs.

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references

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