ZnO纳米/微米结构传感器对乙醇气敏性研究

曹培江; 彭双娇; 韩舜; 柳文军; 贾芳; 曾玉祥; 朱德亮; 吕有明

doi:10.3788/fgxb20143504.0460

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ZnO纳米/微米结构传感器对乙醇气敏性研究

器件制备及器件物理 | 更新时间：2020-08-12

- ZnO纳米/微米结构传感器对乙醇气敏性研究
- Gas-sensitive Property of Nano/Micro-structured ZnO Sensors on Ethanol
- 发光学报 2014年35卷第4期页码：460-464
- 作者机构：
  
  深圳大学材料学院深圳市特种功能材料重点实验室,广东深圳,518060
- 作者简介：
- 基金信息：
  
  国家自然科学基金（60976036，51371120，51302174）();深圳市科技计划项目资助()
- DOI：10.3788/fgxb20143504.0460
  中图分类号： O472+.4;O484.4
- 收稿日期：2013-12-26，
  
  修回日期：2014-01-20，
  
  网络出版日期：2014-02-16，
  
  纸质出版日期：2014-04-03
- 稿件说明：
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曹培江, 彭双娇, 韩舜等. ZnO纳米/微米结构传感器对乙醇气敏性研究[J]. 发光学报, 2014,35(4): 460-464

CAO Pei-jiang, PENG Shuang-jiao, HAN Shun etc. Gas-sensitive Property of Nano/Micro-structured ZnO Sensors on Ethanol[J]. Chinese Journal of Luminescence, 2014,35(4): 460-464
曹培江, 彭双娇, 韩舜等. ZnO纳米/微米结构传感器对乙醇气敏性研究[J]. 发光学报, 2014,35(4): 460-464 DOI： 10.3788/fgxb20143504.0460.

CAO Pei-jiang, PENG Shuang-jiao, HAN Shun etc. Gas-sensitive Property of Nano/Micro-structured ZnO Sensors on Ethanol[J]. Chinese Journal of Luminescence, 2014,35(4): 460-464 DOI： 10.3788/fgxb20143504.0460.

摘要

采用化学气相法分别在石英舟内表面和单晶硅衬底上制备了ZnO微米片、纳米线、微米四足体以及微米球4种结构，并制作了相应的气敏传感器。扫描电子显微镜、气敏测试仪等结果显示：合成的ZnO纳米/微米结构尺寸在200 nm~100 m之间，传感器最佳工作电流区间为120~130 mA，其中微米四足体制备的传感器灵敏度高达127，展现出优异的气敏特性。在4种结构中，微米四足体材料内部的V

缺陷含量最高，结合气敏测试与荧光光谱结果，我们认为材料内部的V

缺陷含量是影响材料气敏特性的最重要因素。

Abstract

The micro plates

nano wires

micro tetrapods and micro spheres of ZnO were fabricated on the internal surface of quartz boat and the surface of single crystal silicon by chemical vapor deposition method

and the corresponding gas sensors were made. The following testing results from scanning electron microscope

the gas sensor testing instrument were obtained. The as grown ZnO with nano/micro structures have a different size from 200 nm to 100 m. The optimized working currents range of these sensors are 120 ~ 130 mA. The gas sensor fabricated by micro tetrapods of ZnO exhibits the best sensitivity property and the corresponding sensitivity is up to 127. The highest content of V

defect exists in micro tetrapods of ZnO. Combining the gas sensor testing with PL spectra results

we attribute the most important factor affecting the gas sensor property to the content of V

defect in these materials.

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Keywords

references

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