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1. 吉林大学 物理学院,吉林 长春,130021
2. 肇庆学院 电子信息与机电工程学院, 广东 肇庆 526061
收稿日期:2013-08-08,
修回日期:2013-09-13,
纸质出版日期:2014-01-03
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曹丽芬, 卞峰苓, 王忆欣, 孙胜男, 崔海宁. 基于AAO模板的TiO<sub>2</sub>微纳结构及其光电特性[J]. 发光学报, 2014,35(1): 79-83
CAO Li-fen, BIAN Feng-ling, WANG Yi-xin, SUN Sheng-nan, CUI Hai-ning. TiO<sub>2</sub> Micro-structure and Photocurrent Characteristics Based on AAO Template[J]. Chinese Journal of Luminescence, 2014,35(1): 79-83
曹丽芬, 卞峰苓, 王忆欣, 孙胜男, 崔海宁. 基于AAO模板的TiO<sub>2</sub>微纳结构及其光电特性[J]. 发光学报, 2014,35(1): 79-83 DOI: 10.3788/fgxb20143501.0079.
CAO Li-fen, BIAN Feng-ling, WANG Yi-xin, SUN Sheng-nan, CUI Hai-ning. TiO<sub>2</sub> Micro-structure and Photocurrent Characteristics Based on AAO Template[J]. Chinese Journal of Luminescence, 2014,35(1): 79-83 DOI: 10.3788/fgxb20143501.0079.
以多孔氧化铝(AAO)和导电玻璃FTO为基底,用射频(RF)磁控溅射法和溶胶凝胶(Sol-gel)法分别制备了微纳结构的TiO
2
,两种TiO
2
沉积技术各自体现出其特质。从XRD衍射光谱和拉曼散射光谱可以看到,在相同退火条件下,RF和Sol-gel法制备的TiO
2
晶相结构不同。在以导电玻璃FTO为基底时,RF制备的薄膜颗粒分布均匀,没有团簇现象;而Sol-gel制备的薄膜由密实的颗粒构成。在以AAO为模板时,Sol-gel制备的TiO
2
溶胶粒子由于胶体溶液的流动性使其对孔的填充率保持较高的水平;而RF制备的TiO
2
对孔的填充率则降低。光电流实验的结果表明,前者具有更好的光电特性。
Micro-structure of titanium dioxide (TiO
2
) layers were prepared by RF sputtering and Sol-gel on conductive glass FTO and porous alumina (AAO). The results show that there are great differences in the two kinds of TiO
2
. XRD diffraction and Raman scattering spectra illustrate that the crystal structure of TiO
2
prepared by RF sputtering and Sol-gel are different after being calcinated at 500 ℃. On the conductive glass FTO
the TiO
2
particles prepared by RF are distributed evenly and no cluster phenomenon
but the TiO
2
prepared by sol-gel consist of small particle. On AAO templet
TiO
2
sol particles are easy to flow in the hole due to the liquidity colloidal solution
which is contrary with the simple prepared by RF. The photocurrent experiment results show that the TiO
2
prapered by sol-gel have better photocurrent performance.
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