基于表面等离子激元的双金属光栅结构提高LED光提取效率的研究

王志斌; 张骞; 张健; 刘丽君

doi:10.3788/fgxb20133412.1624

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基于表面等离子激元的双金属光栅结构提高LED光提取效率的研究

器件制备及器件物理 | 更新时间：2020-08-12

- 基于表面等离子激元的双金属光栅结构提高LED光提取效率的研究
- Improvement of LED Light Emitting Efficiency by Using Double Metal Gratings
- 发光学报 2013年34卷第12期页码：1624-1630
- 作者机构：
  
  燕山大学电气工程学院,河北秦皇岛,066004
- 作者简介：
- 基金信息：
  
  国家自然科学基金（61107039）;河北省自然科学基金（F2012203202）资助项目
- DOI：10.3788/fgxb20133412.1624
  中图分类号： O472
- 收稿日期：2013-07-01，
  
  修回日期：2013-08-15，
  
  纸质出版日期：2013-12-10
- 稿件说明：
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王志斌, 张骞, 张健, 刘丽君. 基于表面等离子激元的双金属光栅结构提高LED光提取效率的研究[J]. 发光学报, 2013,34(12): 1624-1630

WANG Zhi-bin, ZHANG Qian, ZHANG Jian, LIU Li-jun. Improvement of LED Light Emitting Efficiency by Using Double Metal Gratings[J]. Chinese Journal of Luminescence, 2013,34(12): 1624-1630
王志斌, 张骞, 张健, 刘丽君. 基于表面等离子激元的双金属光栅结构提高LED光提取效率的研究[J]. 发光学报, 2013,34(12): 1624-1630 DOI： 10.3788/fgxb20133412.1624.

WANG Zhi-bin, ZHANG Qian, ZHANG Jian, LIU Li-jun. Improvement of LED Light Emitting Efficiency by Using Double Metal Gratings[J]. Chinese Journal of Luminescence, 2013,34(12): 1624-1630 DOI： 10.3788/fgxb20133412.1624.

摘要

为了提高GaN基LED的光提取效率，构建了一种在金属银膜上下表面分别刻蚀光栅结构的双光栅LED模型。利用时域有限差分法（FDTD）进行数值模拟，比较了无银膜、无光栅、单光栅、双光栅模型下LED的光提取效率。结果表明：在光栅周期为300 nm，占空比为0.23，银膜厚度为30 nm，光源深度为150 nm时，光提取效率较单光栅结构提高了6倍，较无光栅结构提高了16倍。

Abstract

In order to improve the light emitting efficiency of GaN-based LED

a double-grating structure was established by etching grating on both sides of silver metal film. A numerical simulation was conducted using the finite difference time domain method (FDTD). The light extraction efficiency in different patterns was compared

including without-silver-film pattern

without-grating pattern

single-grating pattern and double-grating pattern. When the grating period is 300 nm

duty cycle is 0.23

silver film thickness is 30 nm and light source depth is 150 nm

the light extraction efficiency of the double-grating structure is improved by 6 times than the single-grating structure

and 16 times than the structure without grating.

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references

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