Mn掺杂对ZnO：Mn薄膜结构特性的影响

李彤; 介琼; 张宇; 倪晓昌; 赵新为

doi:10.3788/fgxb20133409.1167

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Mn掺杂对ZnO：Mn薄膜结构特性的影响

材料合成及性能 | 更新时间：2020-08-12

- Mn掺杂对ZnO：Mn薄膜结构特性的影响
- Influence of Mn-doping on The Structure Properties of ZnO：Mn Thin Films
- 发光学报 2013年34卷第9期页码：1167-1172
- 作者机构：
  
  1. 天津职业技术师范大学电子工程学院天津,300222
  2. 东京理科大学物理系东京,日本
- 作者简介：
- 基金信息：
  
  天津市教委项目(20120710,20110711)资助()
- DOI：10.3788/fgxb20133409.1167
  中图分类号： TB34;TB43
- 收稿日期：2013-05-03，
  
  修回日期：2013-07-02，
  
  纸质出版日期：2013-09-10
- 稿件说明：
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李彤, 介琼, 张宇, 倪晓昌, 赵新为. Mn掺杂对ZnO：Mn薄膜结构特性的影响[J]. 发光学报, 2013,34(9): 1167-1172

LI Tong, JIE Qiong, ZHANG Yu, NI Xiao-chang, ZHAO Xin-wei. Influence of Mn-doping on The Structure Properties of ZnO：Mn Thin Films[J]. Chinese Journal of Luminescence, 2013,34(9): 1167-1172
李彤, 介琼, 张宇, 倪晓昌, 赵新为. Mn掺杂对ZnO：Mn薄膜结构特性的影响[J]. 发光学报, 2013,34(9): 1167-1172 DOI： 10.3788/fgxb20133409.1167.

LI Tong, JIE Qiong, ZHANG Yu, NI Xiao-chang, ZHAO Xin-wei. Influence of Mn-doping on The Structure Properties of ZnO：Mn Thin Films[J]. Chinese Journal of Luminescence, 2013,34(9): 1167-1172 DOI： 10.3788/fgxb20133409.1167.

摘要

利用射频磁控溅射方法在玻璃衬底上室温沉积了一系列不同Mn掺杂的ZnO:Mn薄膜。结合Raman光谱

XRD谱和SEM分析了ZnO:Mn薄膜的结构特性。 Raman拟合结果显示

在Mn摩尔分数从0增加到5.6%的过程中

ZnO:Mn薄膜始终保持着六角纤锌矿结构;随着Mn掺杂浓度的增大

437 cm

-1

和527 cm

-1

位置上的Raman散射峰出现红移现象

说明Mn掺杂量的增加导致晶格更加无序

缺陷增多;当Mn摩尔分数达到15.8%时

647 cm

-1

处的Raman散射峰出现

暗示了MnO的产生

同时薄膜结晶质量变差。这一结论也得到了XRD和SEM结果的支持。

Abstract

ZnO:Mn thin films with different Mn concentration were prepared on glass substrates at room temperature using RF magnetron sputtering method. Raman spectroscopy

X-ray diffraction spectra and SEM were used to analyze the structural characteristics of the ZnO:Mn films. The results show that ZnO:Mn thin films have significant wurtzite structure with Mn doping mole fraction from 0 up to 5.6%. The redshift of Raman peaks at 437 cm

-1

and 527 cm

-1

can be explained by the lattice defects and disorder induced by the increasing of Mn concentration. The appearance of Raman spectra at 647 cm

-1

indicates the formation of MnO

leading to the worse crystallization of ZnO:Mn films

which is also evidenced by XRD and SEM results.

关键词

Keywords

references

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