溅射的Ti 薄膜热氧化形成的TiO2 薄膜与p+-Si 形成的异质结的电致发光

张安邦; 马向阳; 金璐; 杨德仁

doi:10.3788/fgxb20113205.0471

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溅射的Ti 薄膜热氧化形成的TiO₂ 薄膜与p⁺-Si 形成的异质结的电致发光

器件制备及器件物理 | 更新时间：2020-08-12

- 溅射的Ti 薄膜热氧化形成的TiO₂ 薄膜与p⁺-Si 形成的异质结的电致发光
- Electroluminescence of Heterostructures Formed by p⁺-Si and TiO₂ Films Derived from Oxidation of Sputtered Ti Films
- 发光学报 2011年32卷第5期页码：471-475
- 作者机构：
  
  浙江大学硅材料国家重点实验室,浙江杭州,310027
- 作者简介：
- 基金信息：
  
  教育部博士点基金(007033501)();浙江省自然科学基金杰出青年团队项目(R4090055)();国家"();973"();计划(2007CB13
- DOI：10.3788/fgxb20113205.0471
  中图分类号： TN304;O482.31
- 收稿日期：2010-11-28，
  
  修回日期：2010-12-29，
  
  网络出版日期：2011-05-22，
  
  纸质出版日期：2011-05-22
- 稿件说明：
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张安邦, 马向阳, 金璐, 杨德仁. 溅射的Ti 薄膜热氧化形成的TiO2 薄膜与p+-Si 形成的异质结的电致发光[J]. 发光学报, 2011,32(5): 471-475

ZHANG An-bang, MA Xiang-yang, JIN Lu, YANG De-ren. Electroluminescence of Heterostructures Formed by p+-Si and TiO2 Films Derived from Oxidation of Sputtered Ti Films[J]. Chinese Journal of Luminescence, 2011,32(5): 471-475
张安邦, 马向阳, 金璐, 杨德仁. 溅射的Ti 薄膜热氧化形成的TiO2 薄膜与p+-Si 形成的异质结的电致发光[J]. 发光学报, 2011,32(5): 471-475 DOI： 10.3788/fgxb20113205.0471.

ZHANG An-bang, MA Xiang-yang, JIN Lu, YANG De-ren. Electroluminescence of Heterostructures Formed by p+-Si and TiO2 Films Derived from Oxidation of Sputtered Ti Films[J]. Chinese Journal of Luminescence, 2011,32(5): 471-475 DOI： 10.3788/fgxb20113205.0471.

摘要

利用磁控溅射法以不同条件在重掺硼硅片(p

-Si)上制备Ti薄膜

经过一定条件下的热氧化转化为TiO

薄膜

从而形成TiO

-Si异质结。研究表明:要使TiO

-Si异质结产生显著的电致发光

其中的TiO

薄膜必须呈现单一的锐钛矿相

这就要求在较低的功率下溅射获得晶粒尺寸较小的Ti薄膜。此外

TiO

的薄膜厚度需要控制在合理的范围。文中对上述结果的物理机制进行了探讨。

Abstract

TiO

-Si heterostructures were formed by thermal oxidation of the sputtered Ti films on heavily boron-doped silicon (p

-Si) substrates. In order to make the TiO

-Si heterostructures more suitable for electroluminescence

the TiO

films should be anastate in crystal structure. This required the precursor Ti films possess small crystal grains. Such Ti films could be sputtered at relatively low sputtering power. Moreover

the thickness of TiO

films should be controlled in a desirable range. The related mechanisms for the above-mentioned results have been discussed.

关键词

Keywords

references

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