锥形碳氮结构的发光性能

王必本; 陈玉安; 陈轩

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锥形碳氮结构的发光性能

器件制备及器件物理 | 更新时间：2020-08-12

- 锥形碳氮结构的发光性能
- Photoluminescence of CN Cones
- 发光学报 2011年32卷第9期页码：902-906
- 作者机构：
  
  1. 重庆大学材料科学与工程学院, 重庆 400044
  2. 重庆理工大学化学化工学院重庆,400054
- 作者简介：
- 基金信息：
  
  重庆市自然科学基金(CSTC, 2009BA4027)资助项目()
- DOI：
  中图分类号： O482.31
- 收稿日期：2011-03-18，
  
  修回日期：2011-05-10，
  
  网络出版日期：2011-09-22，
  
  纸质出版日期：2011-09-22
- 稿件说明：
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王必本, 陈玉安, 陈轩. 锥形碳氮结构的发光性能[J]. 发光学报, 2011,32(9): 902-906

WANG Bi-ben, CHEN Yu-an, CHEN Xuan. Photoluminescence of CN Cones[J]. Chinese Journal of Luminescence, 2011,32(9): 902-906
王必本, 陈玉安, 陈轩. 锥形碳氮结构的发光性能[J]. 发光学报, 2011,32(9): 902-906 DOI：

WANG Bi-ben, CHEN Yu-an, CHEN Xuan. Photoluminescence of CN Cones[J]. Chinese Journal of Luminescence, 2011,32(9): 902-906 DOI：

摘要

利用偏压增强化学气相沉积系统

以CH

、H

和NH

为反应气体

分别在沉积有钛膜和碳膜的Si衬底上制备锥形碳结构

并用扫描电子显微镜、X射线能谱仪和显微Raman光谱仪对其进行表征

结果表明所制备的样品为锥形碳氮结构。用显微Raman光谱仪对锥形碳氮结构在室温下的发光性能进行了研究

发光谱显示出中心在621

643

726 nm的发光带。根据碳氮薄膜的发光机理对锥形碳氮结构的发光性能进行了分析。

Abstract

Carbon cones were grown on silicon substrates by bias-enhanced chemical vapor deposition using methane

hydrogen and ammonia as the reaction gases

and the silicon substrates were pre-deposited with titanium and carbon films

respectively. The cones were characterized by scanning electron microscopy

energy dispersive X-ray and micro-Raman spectroscopy. The results indicate that the cones are CN structure. The photoluminescence of CN cones was investigated by micro-Raman spectroscopy at room temperature and the photoluminescence spectrum showed three emission bands centered at about 621

643

726 nm

respectively. According to the photoluminescence mechanism of CN films

the photoluminescence of CN cones was analyzed.

关键词

Keywords

references

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