RAS在线监测AlGaAs的MOCVD生长

徐华伟; 张金龙; 宁永强; 曾玉刚; 张星

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RAS在线监测AlGaAs的MOCVD生长

器件制备及器件物理 | 更新时间：2020-08-12

- RAS在线监测AlGaAs的MOCVD生长
- In-situ Monitoring of AlGaAs Growth by Reflectance Anisotropy Spectroscopy in MOCVD
- 发光学报 2011年32卷第12期页码：1297-1302
- 作者机构：
  
  1. 中国科学院研究生院北京,100039
  2. 中国科学院激发态重点实验室长春光学精密机械与物理研究所,吉林长春,130033
- 作者简介：
- 基金信息：
  
  国家自然科学基金(60876036,10974012,11074247, 60876036,61106047,61176045, 61106068,51172225,6
- DOI：
  中图分类号： O484.1;TN304.2
- 收稿日期：2011-07-21，
  
  修回日期：2011-10-08，
  
  网络出版日期：2011-12-22，
  
  纸质出版日期：2011-12-22
- 稿件说明：
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徐华伟, 张金龙, 宁永强, 曾玉刚, 张星. RAS在线监测AlGaAs的MOCVD生长[J]. 发光学报, 2011,32(12): 1297-1302

XU Hua-wei, ZHANG Jin-long, NING Yong-qiang, ZENG Yu-gang, ZHANG Xing. In-situ Monitoring of AlGaAs Growth by Reflectance Anisotropy Spectroscopy in MOCVD[J]. Chinese Journal of Luminescence, 2011,32(12): 1297-1302
徐华伟, 张金龙, 宁永强, 曾玉刚, 张星. RAS在线监测AlGaAs的MOCVD生长[J]. 发光学报, 2011,32(12): 1297-1302 DOI：

XU Hua-wei, ZHANG Jin-long, NING Yong-qiang, ZENG Yu-gang, ZHANG Xing. In-situ Monitoring of AlGaAs Growth by Reflectance Anisotropy Spectroscopy in MOCVD[J]. Chinese Journal of Luminescence, 2011,32(12): 1297-1302 DOI：

摘要

通过瞬态反射各向异性谱和瞬态反射谱在线监测和研究了Al

As的生长过程

利用金属有机化合物汽相淀积技术在GaAs (001)衬底上生长了多层Al

As结构。选择最适合在线监测生长过程的探测光能量

在此探测光能量处所得到的反射各向异性谱和反射谱的信号在生长过程中有很明显的振荡行为产生。研究发现

通过瞬态反射各向异性谱可以很好地分辨出由表面引起的光学各向异性和由界面处引起的光学各向异性

能够得到界面处形成缺陷的信息

并且发现了反射各向异性谱和反射谱的信号随着铝组分的不同而发生有规律的变化。

Abstract

The MOCVD growth of Al

As for application in high-power laser diodes was studied by using time resolved reflectance anisotropy spectroscopy (RAS) and normalized reflectance (NR) were studied. Multi-layer Al

As structures with different Al compisition were grown on GaAs (001) substrates. The most suitable photon energy for monitoring the growth process was investigated. The NR and RAS signals at photon energy near the fundamental band gap showed an oscillatory behavior during the growth. The different contribution of surface-induced optical anisotropy and interface-induced optical anisotropy could be distinguished in situ by RAS transient spectra. The intensities of the RAS and NR signals were strongly dependent on the aluminium composition.

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references

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