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1. 中国科学院 研究生院 北京,100049
2. 长春理工大学 材料科学与工程学院,吉林 长春,130022
3. 中国科学院 激发态物理重点实验室, 长春光学精密机械与物理研究所,吉林 长春,130033
收稿日期:2010-08-25,
修回日期:2010-11-15,
网络出版日期:2011-10-22,
纸质出版日期:2011-10-22
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曹建明, 秦杰明, 张振中, 王立昆, 郑剑, 韩舜, 赵延民, 张炳烨, 张吉英, 申德振. 热处理对立方相结构Mg<sub>0.57</sub>Zn<sub>0.43</sub>O 合金薄膜表面和组成的影响[J]. 发光学报, 2011,32(10): 973-976
CAO Jian-ming, QIN Jie-ming, ZHANG Zhen-zhong, WANG Li-kun, ZHENG Jian, HAN Shun, ZHAO Yan-min, ZHANG Bing-ye, ZHANG Ji-ying, SHEN De-zhen. Annealing Effect on Smoothness and Composition of Cubic-phase Mg<sub>0.57</sub>Zn<sub>0.43</sub>O Thin Film[J]. Chinese Journal of Luminescence, 2011,32(10): 973-976
曹建明, 秦杰明, 张振中, 王立昆, 郑剑, 韩舜, 赵延民, 张炳烨, 张吉英, 申德振. 热处理对立方相结构Mg<sub>0.57</sub>Zn<sub>0.43</sub>O 合金薄膜表面和组成的影响[J]. 发光学报, 2011,32(10): 973-976 DOI:
CAO Jian-ming, QIN Jie-ming, ZHANG Zhen-zhong, WANG Li-kun, ZHENG Jian, HAN Shun, ZHAO Yan-min, ZHANG Bing-ye, ZHANG Ji-ying, SHEN De-zhen. Annealing Effect on Smoothness and Composition of Cubic-phase Mg<sub>0.57</sub>Zn<sub>0.43</sub>O Thin Film[J]. Chinese Journal of Luminescence, 2011,32(10): 973-976 DOI:
MgZnO合金具有可覆盖日盲紫外波段的禁带宽度和晶格匹配的单晶衬底
是理想的日盲紫外探测材料。由于MgO和ZnO分属立方相和六角相
分相问题使高质量单一相MgZnO难以获得。热处理是提高薄膜结晶质量的有效手段。利用MOCVD方法制备了单一立方相Mg
0.57
Zn
0.43
O合金薄膜
研究了薄膜的退火行为对薄膜结构和光学性能的影响。研究发现
450 ℃的原生样品经过550
650
750
850 ℃氧气氛退火后
薄膜的结晶特性和表面形貌得到明显的改善。随着退火温度的增加
薄膜吸收截止边逐渐蓝移
带隙展宽。X光电子能谱分析发现
随着退火温度增加
Zn含量逐渐减小
这种现象被归结为组分蒸汽压的差异。在退火温度达到950 ℃时
样品发生了分相
出现了低Mg含量的六角相MgZnO。
Annealing behavior for cubic-phase Mg
0.57
Zn
0.43
O thin films grown at 450 ℃ by metal-organic chemical vapor deposition were studied. After annealed at 550
650
750 and 850 ℃ in oxygen atmospheres
the crystal quality and surface smoothness of the thin films were improved significantly. Their bandgap shifts continuously to the higher energy the increasing annealing temperature. Confirmed by energy dispersive X-ray spectra
the enlarged bandgap was caused by the decrease of Zn content during annealing. Phase separation of the Mg
0.57
Zn
0.43
O films with significant surface roughening can also be observed during annealing at 950 ℃.
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