
浏览全部资源
扫码关注微信
南昌大学 教育部发光材料与器件工程研究中心
收稿:2010-03-10,
修回:2010-5-6,
网络首发:2010-08-27,
纸质出版:2010-08-27
移动端阅览
熊贻婧, 张 萌, 熊传兵, 肖宗湖, 王光绪, 汪延明, 江风益. Si衬底GaN基LED外延薄膜转移至金属基板的应力变化[J]. 发光学报, 2010,31(4): 531-537
XIONG Yi-jing, ZHANG Meng, XIONG Chuan-bing, XIAO Zong-hu, WANG Guang-xu, WANG Yan-ming, JIANG Feng-yi. Investigation of Strain of GaN Light-emitting Diode Films Transferred to Metal Substrate from Si(111)[J]. 发光学报, 2010,31(4): 531-537
熊贻婧, 张 萌, 熊传兵, 肖宗湖, 王光绪, 汪延明, 江风益. Si衬底GaN基LED外延薄膜转移至金属基板的应力变化[J]. 发光学报, 2010,31(4): 531-537 DOI:
XIONG Yi-jing, ZHANG Meng, XIONG Chuan-bing, XIAO Zong-hu, WANG Guang-xu, WANG Yan-ming, JIANG Feng-yi. Investigation of Strain of GaN Light-emitting Diode Films Transferred to Metal Substrate from Si(111)[J]. 发光学报, 2010,31(4): 531-537 DOI:
采用电镀金属基板及湿法腐蚀衬底的方法将硅衬底上外延生长的GaN MQW LED薄膜转移至不同结构的金属基板
通过高分辨X射线衍射(HRXRD)和光致发光(PL)研究了转移的GaN薄膜应力变化。研究 发现:(1)转移至铜基板、铬基板、铜/镍/铜叠层基板等三种基板的GaN薄膜张应力均减小
其中转移至铬基板的GaN薄膜张应力最小。(2)随着铬基板中铬主体层厚度的增加
转移后的GaN薄膜应力不发生明显变化。
paper
Nakamura S, Fasol S, Pearton S. The Blue Laser Diode: The Complete Story
. Second Revised. New York: Springer, 2000, 335-336.
Tan Yanliang, Xiao Detao, You Kaiming, et al. Aanlysis of apparent resistance extremun in GaN LED
. Chin. J. Lumin. (发光学报), 2008, 29 (2):337-341 (in Chinese).
Lin Jieben, Guo Zhenning, Chen Libai, et al. Watt-level power InGaN-based blue LED photometric, chromatric and electric characteristics
. Chin. J. Lumin. (发光学报), 2009, 30 (3):379-384 (in Chinese).
Chen Guichu, Fan Guanghan. Effect of Al compasition on the properties of GaN-based quantum cascade laser
. Chin. J. Lumin. (发光学报), 2009, 30 (4):473-476 (in Chinese).
Zhang Shuming, Yang Hui, Duan Lihong, et al. Industrialization of GaN-based blue-green LEDs
. Liquid Crystals and Displays (液晶与显示), 2003, 18 (1):44-47 (in Chinese).
Wong W S, Sands T, Cheung N W, et al. In<em>xGa1-xN light emitting diodes on Si substrates fabricated by Pd-In metal bonding and laser lift-off
. Appl. Phys. Lett., 77 (18):2822-2825.
Chen Fuchu, Fang Ilai, Jung Tangchu, et al. Study of GaN light-emitting diodes fabricated by laser lift-off technique
. Appl. Phys., 95 (8):3916-3923.
Ghosh S, Misra P, Grahn H T. Optical polarization anisotropy in strained a-plane GaN film on r-plane sapphire
. Phys. Status Solidi b, 2006, 243 (7):1441-1445.
Dadgar A, Christen J, Riemann T, et al. Bright blue electroluminescence from an InGaN/GaN multiquantum-well diode on Si(111): Impact of an AlGaN/GaN multilayer
. Appl. Phys. Lett., 2001, 78 (15):2211-2213.
Qiu Chong, Liu Junlin, Zheng Changda, et al. The influence of SiN passivation layer to the GaN-based blue LED on Si substrate
. Chin. J. Lumin. (发光学报), 2008, 29 (5):840-844 (in Chinese).
Krost A, Dadgar A. GaN-based optoelectronics on silicon substrates
. Mater. Scie. Eng. B, 2002, 93 (1-3):77-84.
Mo Chunlan, Fang Wenqing, Liu Hechu, et al. Growth and device characteristic of InGaN MQW LED on Si substrate
. Chin. High Tech. Lett., 2005, 15 (5):58-61.
Xiong Chuanbing, Jiang Fengyi, Wang Li, et al. The investigation on the interference phenomenonin electroluminescence spectrum of vertical structured InGaAlN multiple quantum well light-emitting diodes
. Acta Phys. Sin. (物理学报), 2008, 57 (12):7860-7864 (in Chinese).
Xiong Chuanbing, Jiang Fengyi, Fang Wenqing, et al. Change in stress of GaN light-emitting diode films during the process of transferring the film from the Si(111) growth substrate to new substrate
. Acta Phys. Sin. (物理学报), 2008, 57 (5):3176-3181 (in Chinese).
Mo Chunlan, Fang Wenqing, Liu Hechu, et al. Growth and characterization of InGaN blue LED structure on Si (111) by MOCVD
. J. Crystal Growth, 2005, 285 (3):312-317.
Xu Jiazhen. Test and Analysis of Semiconductor
. Second Revised. Beijing: Science Press, 2007.
Ning Ning, Xiong Jie, Zhou Xun. High-resolution XRD study of the effect of the annealing time on strain in Mg doped p-type GaN epitaxial films
. J. Functional Materials (功能材料), 2009, 40 (2):242-245 (in Chinese).
Li Yi, Liu Bin, Xie Zili, et al. High-resolution X-ray diffraction studies on the indium content and layer thickness in InGaN/GaN multiquantum wells
. J. Functional Materials (功能材料), 2008, 39 (8):1259-1260 (in Chinese).
Shapiro N A, Feick H, Hong W, et al. Luminescence energy and carrier lifetime in InGaN/GaN quantum wells as a function of applied biaxial strain
. J. Appl. Phys., 2003, 94 (7):4520-4529.
0
浏览量
381
下载量
11
CSCD
关联资源
相关文章
相关作者
相关机构
京公网安备11010802024621