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深圳大学 材料学院, 深圳市特种功能材料重点实验室
收稿:2009-11-20,
修回:1900-1-2,
网络首发:2010-04-30,
纸质出版:2010-04-30
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柳文军, 蔡少敏, 谢红丝, 等. 阴极电沉积ZnO薄膜的取向控制生长[J]. 发光学报, 2010,31(2):214-218.
LIU Wen-jun, CAI Shao-min, XIE Hong-si, et al. Orientation-controlling Growth of Electrodeposited ZnO Films on Cathode[J]. Chinese Journal of Luminescence, 2010, 31(2): 214-218.
采用阴极电沉积法
在Zn(NO
3
)
2
水溶液中
以304不锈钢为衬底制备了ZnO薄膜
研究了Zn
2+
浓度和电流密度对ZnO薄膜择优取向的影响规律。XRD结果表明:随着Zn
2+
浓度和电流密度增大
ZnO薄膜逐渐由(002)面择优取向生长转变为(101)面择优取向生长;当Zn
2+
浓度为0.005 mol·L
-1
、电流密度为2.0 mA·cm
-2
或Zn
2+
浓度为0.05 mol·L
-1
、电流密度为0.5 mA·cm
-2
时
可以得到(002)面择优取向生长的ZnO薄膜;当Zn
2+
浓度为0.05 mol·L
-1
、电流密度为2.0 mA·cm
-2
时
可以得到(101)面择优取向生长的ZnO薄膜。根据二维晶核理论
通过分析不同生长条件下的过饱和度及其对ZnO的(002)型和(101)型二维晶核形核活化能的影响
对这一规律进行了解释。可见
通过改变Zn
2+
浓度和电流密度能够实现阴极电沉积ZnO薄膜的取向可控生长。
paper
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