退火温度对溶胶-凝胶法制备Na掺杂 ZnO薄膜的结构和光学特性的影响

高书霞; 王德义

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退火温度对溶胶-凝胶法制备Na掺杂 ZnO薄膜的结构和光学特性的影响

论文 | 更新时间：2020-08-12

- 退火温度对溶胶-凝胶法制备Na掺杂 ZnO薄膜的结构和光学特性的影响
- Influence of Annealing Temperature on Structure and Optical Properties of Na-doped ZnO Thin Films Prepared by Sol-gel Method
- 发光学报 2009年30卷第1期页码：81-85
- 作者机构：
  
  1. 烟台大学光电信息学院
  2. 烟台大学环境与材料工程学院
- 作者简介：
  
  [ "" ]
- 基金信息：
- DOI：
  中图分类号： O482.31
- 收稿日期：2008-05-08，
  
  修回日期：1900-01-02，
  
  网络出版日期：2009-02-20，
  
  纸质出版日期：2009-02-20
- 稿件说明：
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高书霞, 王德义. 退火温度对溶胶-凝胶法制备Na掺杂 ZnO薄膜的结构和光学特性的影响[J]. 发光学报, 2009,30(1):81-85.

Influence of Annealing Temperature on Structure and Optical Properties of Na-doped ZnO Thin Films Prepared by Sol-gel Method[J]. Chinese journal of luminescence, 2009, 30(1): 81-85.
高书霞, 王德义. 退火温度对溶胶-凝胶法制备Na掺杂 ZnO薄膜的结构和光学特性的影响[J]. 发光学报, 2009,30(1):81-85. DOI：

Influence of Annealing Temperature on Structure and Optical Properties of Na-doped ZnO Thin Films Prepared by Sol-gel Method[J]. Chinese journal of luminescence, 2009, 30(1): 81-85. DOI：

摘要

采用溶胶-凝胶旋涂法在Si(100)衬底上制备Na掺杂ZnO薄膜

退火温度分别为873

973

1 073 K。研究了退火温度对Na掺杂ZnO薄膜形貌、微观结构和光学性能的影响。室温光致发光谱显示

在973 K下退火的样品具有中心位于361 nm处尖锐而强的紫外发光峰

在388

425 nm处各有一个比较弱的紫色和蓝色发光峰

在可见光范围内发光峰的强度很弱。

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