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1. 泰达应用物理学院 天津,300457
2. 天津城市建设学院 天津,300384
3. 南开大学, 弱光非线性光子学教育部重点实验室 天津,300457
收稿日期:2007-08-25,
修回日期:2007-11-24,
纸质出版日期:2008-03-20
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贾国治, 姚江宏, 舒永春, 邢晓东, 皮彪. 生长温度和结构参数对InGaAs/GaAs量子阱光学特性的影响[J]. 发光学报, 2008,29(2): 325-329
JIA Guo-zhi, YAO Jiang-hong, SHU Yong-chun, XING Xiao-dong, PI Biao. Influence of Growth Temperature and Structure Parameters on Optical Characteristic InGaAs/GaAs Quantum Wells[J]. Chinese Journal of Luminescence, 2008,29(2): 325-329
贾国治, 姚江宏, 舒永春, 邢晓东, 皮彪. 生长温度和结构参数对InGaAs/GaAs量子阱光学特性的影响[J]. 发光学报, 2008,29(2): 325-329 DOI:
JIA Guo-zhi, YAO Jiang-hong, SHU Yong-chun, XING Xiao-dong, PI Biao. Influence of Growth Temperature and Structure Parameters on Optical Characteristic InGaAs/GaAs Quantum Wells[J]. Chinese Journal of Luminescence, 2008,29(2): 325-329 DOI:
研究了不同生长温度下制备的In
0.15
Ga
0.85
As/GaAs应变量子阱的PL谱
结果表明
生长温度越高
In偏析和In-Ga互混越严重
同时
导致更多的In脱附
PL谱发光峰蓝移。对不同In含量的和不同InGaAs厚度的InGaAs/GaAs量子阱进行PL谱测试
分析表明In含量
<
0.2
生长温度低于560℃时
In含量和InGaAs层量子阱的厚度对In偏析、脱附和In-Ga互混基本没有影响。
In the last few years the InGaAs/GaAs heterostructure system has received increasing interest for electronic devices and microwave industries. The strained quantum well (QW) laser has more beneficial effect than other QW lasers. For example
lower threshold current density
wider modulation bandwidth and the emission wavelength of strained QW laser can be adjusted by appropriately changing the strain. With regard to InGaAs/GaAs material system
indium distribution influence on the performances of device directly. Surface segregation of In ions during the growth process is the major factor for the indium distribution in InGaAs/GaAs heterostructure. The heteroepitaxy of InGaAs layer on GaAs substrates is characterized by a strong segregation of In atoms that accumulate at the growth front and substantially modifies the In-composition profile
resulting in different electronic and optical properties of the devices based on that material. Segregation determines the composition profiles of QW in the growth direction in many semiconductor systems
and consequently
the quantized levels are strongly influenced. The samples of InGaAs/GaAs strained QW are grown in Riber 32 compact 21 solid source molecular beam epitaxy (MBE) system equipped with a valved cracker cell for arsenic and reflection high energy electron diffraction (RHEED) for
in situ
monitoring of the growth process. Growth temperature is calibrated by infrared pyrometer. The photoluminescence (PL) was studied on InGaAs/GaAs strained QW with various different growth temperature and structure parameters. In ions segregation processes was illustrated based on the Muraki model and the differential calculation were compared with experiment results in detail. The results show that some important information was obtained about the effect of indium segregation
desorption and In-Ga intermixing on optical quality of strained quantum well. The effect is serious
and the peak position of PL is blue shifted with increasing the growth temperature. It is demonstrated that indium segregation and In-Ga intermixing have no effect on the optical properties of InGaAs/GaAs strained quantum well with In content below x=0.2 and the growth temperature below 560℃ by PL analysis.
Lam Y,Loher J P,Singh J.Comparison of steady state and transient characteristics of lattice matched and strained InGaAs-AlGaAs (on GaAs) and InGaAs-AlInAs (on InP) quantum well lasers[J].IEEE J.Quantum Electron.,1992,28(5):1248-1260.
Suemune I,Coldren L A,Yamanishi M,et al.Extremely wide modulation bandwidth in a low threshold current strained quantum well laser[J].Appl.Phys.Lett.,1988,53(15):1378-1380.
Chan M C Y,Surya C,Wai P K A.The effects of interdiffusion on the subbands in GaxIn1-xN0.04As0.96/GaAs quantum well for 1.3 and 1.55 μm operation wavelengths[J].J.Appl.Phys.,2001,90(1):197-201.
Muraki K,Fukatsu S,Shiraki Y,et al.Surface segregation of In atoms during molecular beam epitaxy and its influence on the energy levels in InGaAs/GaAs quantum wells[J].Appl.Phys.Lett.,1992,61(5):557-559.
Chattopadhyay K,Aubel J,Sundaram S,et al.Electroreflectance study of effects of indium segregation in molecular-beam-epitaxy-grown InGaAs/GaAs[J].J.Appl.Phys.,1997,81(8):3601-3606.
Yu H,Roberts C,Murray R.Influence of indium segregation on the emission from InGaAs/GaAs quantum wells[J].Appl.Phys.Lett.,1995,66(17):2253-2255.
Martini S,Quivy A,Tabata A,et al.Reduction of indium segregation in InGaAs/GaAs quantum wells grown by molecular beam epitaxy on vicinal GaAs(001) substrates[J].J.Vac.Sci.Technol.B,2000,18(4):1991-1996.
Zhang Tiemin,Miao Guoqing,Jin Yixin,et al.Effect of the InxGa1-xAs buffer layer compositions on crystalline quality and surface morphology of In0.82Ga0.18As grown by low-pressure MOCVD[J].Chin.J.Lumin.(发光学报),2006,27(5):797-800 (in Chinese).
Li Mei,Li Hui,Wang Yuxiao,et al.Research on material characteristics of GaAlAs/GraAs superluminescence diodes[J].Chin.J.Lumin.(发光学报),2007,28(6):885-889 (in Chinese).
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