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类球状微米金刚石聚晶的场发射
Growth and Field Emission Properties of Globe-like Diamond Microcrystalline-aggregate
- 发光学报 2008年29卷第2期 页码：393-397
- 作者机构：
1. 郑州大学物理工程学院, 材料物理教育部重点实验室,河南 郑州,450052
2. 中国科学院, 安徽光学精密机械研究所,安徽 合肥,230031
- 作者简介：
- 基金信息：国家教育重点项目资助(205091)()
DOI：
中图分类号： O484;TB383收稿：2007-08-25，
修回：2007-11-24，
纸质出版：2008-03-20
- 稿件说明：
移动端阅览
高金海, 姚宁, 张兵临, 王英俭. 类球状微米金刚石聚晶的场发射[J]. 发光学报, 2008,29(2): 393-397
GAO Jin-hai, YAO Ning, ZHANG Bing-lin, WANG Ying-jian. Growth and Field Emission Properties of Globe-like Diamond Microcrystalline-aggregate[J]. Chinese Journal of Luminescence, 2008,29(2): 393-397
摘要
在覆盖金属钛层的陶瓷上
采用微波等离子体化学气相沉积(MPCVD)法制备出类球状微米金刚石聚晶薄膜。利用扫描电子显微镜、拉曼光谱
X射线衍射
分析了薄膜的结构和表面形貌。测试了类球状微米金刚石聚晶膜的场致电子发射特性。开启电场仅为0.55V/μm
在2.18V/μm的电场下
其场发射电流密度高达11mA/cm
2
。仔细分析了膜的发射过程
发现类球状微米金刚石聚晶的结构对发射有很大影响
并对其发射机理进行了研究。
Abstract
Carbon based materials with a low or negative electron affinity
such as diamond
diamond-like carbon (DLC)
amorphous carbon (a-C)
were widely used as cold cathode. Diamond films were generally deposited on the substrates by using chemical vapor deposition (CVD)
introducing a hydrocarbon gas diluted with an amount of hydrogen gas. There were a limited number of reports dealing with the field emission characteristics of the globe-like diamond microcrystalline aggregates. The globe-like diamond microcrystalline-aggregates were fabricated by microwave plasma chemical vapor deposition (MPCVD) method in the high methane concentration of H
2
/CH
4
=100/10 sccm using a microwave plasma CVD system in our laboratory. The cera-mic with a Ti mental layer was used as substrate. The fabricated diamond aggregates were evaluated by Raman scattering spectroscopy
scanning electron microscopy (SEM)
X-ray diffraction (XRD). It concluded that the globe-like diamond microcrystalline-aggregates are composed of diamond.The field emission properties were tested by using a diode structure in a vacuum chamber. A phosphor-coated indium tin oxide (ITO) anode was used for observing and characterizing the field emission. It was found that the globe-like diamond microcrystalline-aggregate exhibited good electron emission properties. The turn-on field was only 0.55 V/μm
and emission current density as high as 11 mA/cm
2
was obtained under an applied field of 2.18 V/μm. At the successive operation circles
the turn-on field tends to stabilize at 1.6 V/μm and the current density of 1.1 mA/cm2 is obtained at an electric field of 2.9 V/μm. The Fowler-Nordheim (F-N) plots of the field emission are almost straight line
which indicates that the mechanism of the electron emission from the diamond microcrystalline-aggregate is linked to field emission by tunnel effect. The growth mechanism and field emission properties of the globe-like diamond microcrystalline-aggregates are discussed relating to microstructure and electrical conductivity. We think that the good emission properties of the diamond aggregates are considered to be combined results from the lots of the grain boundaries in the diamonds microcrystalline-aggregates and the emission enhance factor is very high as β=1 328.2.
关键词
Keywords
references
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