电化学刻蚀法制备LaB6场发射微尖锥阵列

王小菊; 林祖伦; 祁康成; 陈泽祥; 汪志刚; 蒋亚东

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电化学刻蚀法制备LaB₆场发射微尖锥阵列

论文 | 更新时间：2020-08-11

- 电化学刻蚀法制备LaB₆场发射微尖锥阵列
- Fabrication of LaB₆ Tip Field Emission Arrays Using Electro-chemical Etching Method
- 发光学报 2007年28卷第3期页码：429-432
- 作者机构：
  
  电子科技大学, 光电信息学院,四川成都,610054
- 作者简介：
- 基金信息：
- DOI：
  中图分类号： O462.2;TN873+.95
- 收稿日期：2006-04-06，
  
  修回日期：2006-11-08，
  
  纸质出版日期：2007-05-20
- 稿件说明：
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王小菊, 林祖伦, 祁康成, 陈泽祥, 汪志刚, 蒋亚东. 电化学刻蚀法制备LaB6场发射微尖锥阵列[J]. 发光学报, 2007,28(3): 429-432

WANG Xiao-ju, LIN Zu-lun, QI Kang-cheng, CHEN Ze-xiang, WANG Zhi-gang, JIANG Ya-dong. Fabrication of LaB6 Tip Field Emission Arrays Using Electro-chemical Etching Method[J]. Chinese Journal of Luminescence, 2007,28(3): 429-432
王小菊, 林祖伦, 祁康成, 陈泽祥, 汪志刚, 蒋亚东. 电化学刻蚀法制备LaB6场发射微尖锥阵列[J]. 发光学报, 2007,28(3): 429-432 DOI：

WANG Xiao-ju, LIN Zu-lun, QI Kang-cheng, CHEN Ze-xiang, WANG Zhi-gang, JIANG Ya-dong. Fabrication of LaB6 Tip Field Emission Arrays Using Electro-chemical Etching Method[J]. Chinese Journal of Luminescence, 2007,28(3): 429-432 DOI：

摘要

采用电化学刻蚀方法

成功制备出单尖的六硼化镧、钼、钨及钨铼合金场发射冷阴极尖锥

并对这几种场发射单尖锥阴极的电子发射性能进行了测试比较.结果表明

LaB

作为场发射阴极

具有良好的发射性能和稳定性.在〈111〉面单晶LaB

基片上

用PECVD法沉积非晶硅作掩膜

制备出具有一定高度的LaB

微尖锥场发射阵列

结果发现

LaB

基底较为平整

尖锥阵列呈现出各向异性.该结论对LaB

材料在场发射阴极方面的进一步研究具有重要的指导意义.

Abstract

At present

field emitting cold cathode materials

including molybdenum

silicon

diamond carbon films

diamond-like carbon films and carbon nanotubes

are being developed. With each of these materials having their own shortages

it is important to seek some new field emitting cold cathode materials. Lanthanum hexaboride (LaB

) is a material with low work function

low resistivity

low sputtering yield

high melting point and high chemical stability. It has been widely used as thermionic emitters. On the other hand

LaB

is also an excellent material for use as field emission cathodes. Some field emitting cold cathode single tips in-cluding LaB

molybdenum

tungsten and tungsten rhenium were fabricated by using electro-chemical etching method. The electron emission characteristics of these cold cathodes were studied in a diode test cell in vacuum system. Changing the anode voltage at a pressure of 1×10-3 Pa

the current density of single crystal LaB

was compared with other material cathodes. It showed that LaB

was one kind of excellent materials to act as field emitting cold cathode

whose current density was much higher than any other materials. In addition

LaB

field emission arrays were attempted to be fabricated by using electro-chemical etching method. The a-type si-licon layer was depositing by PECVD as mask. Electrolytes in this process were ethanol (CH

OH) containing 2% hydrochloric acid (HCl) and the electrolytic current was 0.6 mA. The SEM showed that the substrate and surface of single crystal LaB

tips were both smooth. The height of LaB

tips was about 1.7μm. The uniformity of the tips was fine

while due to the erosion selectivity for different crystalloid surface in electro-chemical etching method

serious anisotropic phenomenon was observed for LaB

tips. It demonstrated that

seeking some new electrolytes or using other special dry etching methods instead of wet etching methods

maybe effective to fabricate excellent LaB

field emitting cold cathode tips. These experimental conclusions were constructive to direct the application of LaB

to field emission cathodes further.

关键词

Keywords

references

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