The Zn

1-x

Mn

x

O(x=0.07) thin films were grown on glass by direct current(dc) magnetron sputtering

and the influences of oxygen partial pressure on crystallization behavior as well as on optical properties of Zn

1-x

Mn

x

O films were investigated.X-ray diffraction(XRD) results indicate that the films are highly c-axis oriented

especially at the ambient of oxygen partial pressure of 0.4.When Ris 0.4

there are the smallest full width at half maximum(FWHM) of the diffraction peak and the biggest grain size.The lattice parameter c of the Zn

1-x

Mn

x

O thin films is larger than that of ZnO film.The optical transmission spectra show that the absorption is the largest when Ris 0.4.X-ray photoelectron spectroscopy(XPS) results show:1.the two peaks at 640.7 and 652.3 eVare in agreement with the binding energy of Mn 2p

3/2

and Mn 2p

1/2

without other XPS signals

indicating the coexistence of small amounts of Mn

2+

and MnO

2.

2.the binding energy of Zn 2p

3/2

is 1021.7 eVwith a narrow linewidth of 1.86 eV

implying only a single component of Zn

2+

ions. 3.the two narrow peaks at 530.1 and 532.0 eV

the former may be attributed to O

2

-ions in Zn-O and Mn-O bonds

while another is associated with the loosely bound oxygen chemisorbed on the surface and/or grain boundary of polycrystalline film.The quantitative analysis indicates that the atom fraction of Mn doped in film is 7.3%(Zn

0.93

Mn

0.07

O).Owing to Burstein-Moss(B-M) effect

the absorption spectra show that the blue-shift absorption edge transition happens between valence band level and near or above the Fermi level

while the absorption band tailing is attributed to the d-d transitions of tetrahedral Mn

2+

between the crystal-field-split 3d

5

multiplet levels.When x is sure

the band-gap energy is the largest at Rbeing

0.4

by calculation.It can be interpreted when the alloy enters the antiferromagnetic or spin-glass phase

the effect of the exchange interaction decreases

in turn removing this red shift

and producing an apparent additional blue shift of the energy gap at low temperatures and oxygen partial pressure below 0.4.