WANG Qing-pu, ZHANG De-heng, MA Hong-lei, ZHANG Xing-hua, ZHANG Xi-jian. Green Photoluminescence Emitted from ZnO Films Deposited by r. f. Magnetron Sputtering[J]. Chinese Journal of Luminescence, 2004,25(3): 291-294
WANG Qing-pu, ZHANG De-heng, MA Hong-lei, ZHANG Xing-hua, ZHANG Xi-jian. Green Photoluminescence Emitted from ZnO Films Deposited by r. f. Magnetron Sputtering[J]. Chinese Journal of Luminescence, 2004,25(3): 291-294DOI:
Highly orientated(002) polycrystalline ZnO films with hexagonal structure have been deposited by using r. f. magnetron sputtering. Strong monochromatic green photoluminescence (located at 514 nm) has been observed in these non intensively doped ZnO films when exited with 320nm light.For the vacuum annealed samples at 830℃
the intensity of the green PL increases markedly. On the contrary
for the samples annealed in oxygen
the intensity of the green PL decreases rapidly. The green emission may correspond to the electron transition from deep oxygen vacancy level to the valance band.