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1. 吉林大学, 电子科学与工程学院, 集成光电子学国家重点联合实验室,吉林 长春,130023
2. 吉林大学, 数学学院, 吉林, 长春, 130012
收稿日期:2003-05-15,
修回日期:2003-08-16,
纸质出版日期:2004-05-20
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张素梅, 石家纬, 赵世舜, 胡贵军. 高功率AlGaAs/GaAs单量子阱远结激光器及其老化特性[J]. 发光学报, 2004,25(3): 267-271
ZHANG Su-mei, SHI Jia-wei, ZHAO Shi-shun, HU Gui-jun. High-power AlGaAs/GaAs Single Quantum Well (SQW) Remote Junction Lasers and Its Aging Characteristic[J]. Chinese Journal of Luminescence, 2004,25(3): 267-271
张素梅, 石家纬, 赵世舜, 胡贵军. 高功率AlGaAs/GaAs单量子阱远结激光器及其老化特性[J]. 发光学报, 2004,25(3): 267-271 DOI:
ZHANG Su-mei, SHI Jia-wei, ZHAO Shi-shun, HU Gui-jun. High-power AlGaAs/GaAs Single Quantum Well (SQW) Remote Junction Lasers and Its Aging Characteristic[J]. Chinese Journal of Luminescence, 2004,25(3): 267-271 DOI:
为了提高器件的可靠性和使用寿命
设计并研制了一种将p-n结和有源层分开的高功率AlGaA/sGaAs单量子阱远异质结(SQW-RJH)激光器
发射波长为808nm
腔长900μm
条宽100μm
其外延结构与通常的808nm AlGaAs/GaAs单量子阱半导体激光器的结构不同
在p-n结和有源区间多了一层p型AlGaAs层
其厚度约为0.1μm。为减小衬底表面位错对外延层质量的影响
在n
+
-GaAs衬底和n-Al
0.5
Ga
0.5
As下包层间加一层n
+
-GaAs缓冲层。对器件进行了电导数测试及恒流电老化实验。与常规AlGaAs/GaAs大功率半导体激光器相比
远结大功率半导体激光器具有阈值电流
I
th
偏大、导通电压
V
th
偏高的直流特性。3000h的恒流电老化结果表明
器件在老化初期表现出阈值电流随老化时间缓慢下降
输出功率随老化时间缓慢上升的远结特性。
For conventional high power quantum well (QW) lasers whose p-n junction is located in or near the active region
the dark spot defects (DSDs) and the dark line defects (DLDs) develop and move to the active layer during aging process
which increases non-radiative recombination centers and causes device to degrade. As a result
the threshold current increases
while the output power and the differential coefficient decrease at the same time. However
for the RJ lasers
the p-n junction is separated from the active layer by the presence of a thin waveguide layer between the active layer and p-n junction. The mobile defects are absorbed in the p-n junction located outside the active layer because of the electric field of p-n junction. Thus
the non radiative recombination centers in the active layer decrease
the degradation of RJ lasers is decided by the degradation of p-n junction. Unless the p-n junction suffers serious damage
a much longer lifetime and a better reliability may be expected for RJ lasers. We designed and succeeded in fabricating 808 nm AlGaAs/GaAs separate confinement heterostructure(SCH)single quantum well RJ lasers with a cavity length of 900 μm and a stripe width of 100μm by depositing the material on GaAs substrate with metal organic chemical vapor deposited (MOCVD). Its epitaxial structure is different from the conventional 808 nm AlGaAs/GaAs SQW semiconductor lasers. The SCH active region consists of a 10 nm thick Al
0.07
Ga
0.93
As layer between two 0.1 μm thick p-Al
0.3
Ga
0.7
As waveguide layers. One p-Al
0.3
Ga
0.7
As layer separates the active layer from the p-n junction
and also carries out optical and carrier confinement together with another p-Al
0.3
Ga
0.7
As layer. The n and p cladding layers are each 1.3 μm thick. Compared to the conventional 808 nm GaAs/AlGaAs high power SQW laser structure
there is a 0.1 μm thick p AlGaAs layer between the p-n junction and active region
as shown in Table 1. To decrease the effect of dislocations in substrate on the epitaxial layer quality
a n
+
-GaAs buffer layer is grown between the substrates and n-Al
0.5
Ga
0.5
As lower cladding layer. The DC characteristic of RJ lasers was measured. Compared with the conventional AlGaAs/GaAs high power semiconductor laser
the remote junction (RJ) high power semiconductor laser shows that the threshold current (
I
th
) and the threshold voltage (
V
th
) are large. During 3000 hour constant current LD mode aging process
the RJH lasers showed a reduction of threshold current and a fluctuate increase of output power.
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